ReRAM device structure

US8962385B2 · US · B2

Patent metadata
FieldValue
Publication numberUS-8962385-B2
Application numberUS-201414490062-A
CountryUS
Kind codeB2
Filing dateSep 18, 2014
Priority dateApr 9, 2012
Publication dateFeb 24, 2015
Grant dateFeb 24, 2015

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Abstract

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A resistive random access memory (ReRAM) includes a first metal layer having a first metal and a metal-oxide layer on the first metal layer. The metal-oxide layer includes the first metal. The ReRAM further includes a second metal layer over the metal-oxide layer and a first continuous conductive barrier layer in physical contact with sidewalls of the first metal layer and of the metal-oxide layer.

First claim

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What is claimed is: 1. A method of forming a resistive random access memory (ReRAM) comprising: forming a first opening in a first dielectric layer; forming a continuous barrier layer within the first opening, wherein the continuous barrier layer is in physical contact with a sidewall of the first opening and a bottom of the first opening; forming a first metal layer within the first opening; oxidizing a top portion of the first metal layer to form a metal-oxide layer within…

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What does patent US8962385B2 cover?
A resistive random access memory (ReRAM) includes a first metal layer having a first metal and a metal-oxide layer on the first metal layer. The metal-oxide layer includes the first metal. The ReRAM further includes a second metal layer over the metal-oxide layer and a first continuous conductive barrier layer in physical contact with sidewalls of the first metal layer and of the metal-oxide la…
Who is the assignee on this patent?
Freescale Semiconductor Inc
What technology area does this patent fall under?
Primary CPC classification H01L45/1633. Mapped technology areas include Electricity.
When was this patent published?
Publication date Tue Feb 24 2015 00:00:00 GMT+0000 (Coordinated Universal Time) (B2). Legal status and post-grant events are not shown on this page.
What related patents are in patentsdb?
We list 8 related publications on this page (citations in our corpus or others sharing the same primary CPC).