Resistance change memory device
US-9214626-B2 · Dec 15, 2015 · US
US8962385B2 · US · B2
| Field | Value |
|---|---|
| Publication number | US-8962385-B2 |
| Application number | US-201414490062-A |
| Country | US |
| Kind code | B2 |
| Filing date | Sep 18, 2014 |
| Priority date | Apr 9, 2012 |
| Publication date | Feb 24, 2015 |
| Grant date | Feb 24, 2015 |
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A resistive random access memory (ReRAM) includes a first metal layer having a first metal and a metal-oxide layer on the first metal layer. The metal-oxide layer includes the first metal. The ReRAM further includes a second metal layer over the metal-oxide layer and a first continuous conductive barrier layer in physical contact with sidewalls of the first metal layer and of the metal-oxide layer.
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What is claimed is: 1. A method of forming a resistive random access memory (ReRAM) comprising: forming a first opening in a first dielectric layer; forming a continuous barrier layer within the first opening, wherein the continuous barrier layer is in physical contact with a sidewall of the first opening and a bottom of the first opening; forming a first metal layer within the first opening; oxidizing a top portion of the first metal layer to form a metal-oxide layer within…
Electricity · mapped topic
Electricity · mapped topic
Electricity · mapped topic
Electricity · mapped topic
Electricity · mapped topic
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