Semiconductor die, semiconductor package and substrate dicing method
US-2024421000-A1 · Dec 19, 2024 · US
Method for forming a groove on a surface of flat plate formed of a nitride semiconductor crystal
US8962363B2 · US · B2
| Field | Value |
|---|---|
| Publication number | US-8962363-B2 |
| Application number | US-201414298722-A |
| Country | US |
| Kind code | B2 |
| Filing date | Jun 6, 2014 |
| Priority date | Jun 13, 2013 |
| Publication date | Feb 24, 2015 |
| Grant date | Feb 24, 2015 |
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Abstract
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Provided is a novel method for forming a groove composed of two smooth inclined surfaces on a surface of a flat plate formed of a nitride semiconductor crystal having an A, C, M-axes. In the present invention, a disk-shaped dicing blade is moved along a direction of the A-axis to form first and second inclined surfaces on the surface of the flat plate. The following mathematical formulae (I)-(III) are satisfied: 45 degrees≦θb−a≦60 degrees (I) 45 degrees≦θb+a≦60 degrees (II), 0 degrees≦|a|≦7.5 degrees, where angle θb represents an angle formed between a surface of the edge and a radial direction of the dicing blade in a cross-sectional view which includes the M-axis and the C-axis. The angle a represents an angle formed between the principal surface and the M-axis.
First claim
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The invention claimed is: 1. A method for forming a groove on a surface of a flat plate formed of a nitride semiconductor crystal having an A-axis, a C-axis, and an M-axis, the method comprising: (a) moving a disk-shaped dicing blade along a direction of the A-axis to form a first inclined surface and a second inclined surface on the surface of the flat plate, wherein the flat plate has a principal surface; the disk-shaped dicing blade has an edge along the circumference there…
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- What does patent US8962363B2 cover?
- Provided is a novel method for forming a groove composed of two smooth inclined surfaces on a surface of a flat plate formed of a nitride semiconductor crystal having an A, C, M-axes. In the present invention, a disk-shaped dicing blade is moved along a direction of the A-axis to form first and second inclined surfaces on the surface of the flat plate. The following mathematical formulae (I)-(I…
- Who is the assignee on this patent?
- Panasonic Corp, Panasonic Ip Man Co Ltd
- What technology area does this patent fall under?
- Primary CPC classification H10P54/00. Mapped technology areas include Electricity.
- When was this patent published?
- Publication date Tue Feb 24 2015 00:00:00 GMT+0000 (Coordinated Universal Time) (B2). Legal status and post-grant events are not shown on this page.
- What related patents are in patentsdb?
- We list 8 related publications on this page (citations in our corpus or others sharing the same primary CPC).