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Methods for forming templated materials
US8962354B2 · US · B2
| Field | Value |
|---|---|
| Publication number | US-8962354-B2 |
| Application number | US-201414491407-A |
| Country | US |
| Kind code | B2 |
| Filing date | Sep 19, 2014 |
| Priority date | Dec 6, 2012 |
| Publication date | Feb 24, 2015 |
| Grant date | Feb 24, 2015 |
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Abstract
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Methods of forming layers can comprise defining a plurality of discrete site-isolated regions (SIRs) on a substrate, forming a first layer on one of the discrete SIRs, forming a second layer on the first layer, measuring a lattice parameter or an electrical property of the second layer, The process parameters for the formation of the first layer are varied in a combinatorial manner between different discrete SIRs to explore the possible layers that can result in suitable lattice matching for second layer of a desired crystalline structure.
First claim
Opening claim text (preview).
What is claimed is: 1. A method of forming multiple samples on a substrate using high productivity combinatorial processes, the method comprising: defining a plurality of site-isolated regions on the substrate, forming a first layer in a first set of site-isolated regions of the plurality of site-isolated regions, wherein the first layer is formed using physical vapor deposition; forming a second layer in a second set of site-isolated regions of the plurality of site-isolat…
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Classifications
- H10P74/207Primary
Electricity · mapped topic
Electricity · mapped topic
Electricity · mapped topic
Electricity · mapped topic
- H10D1/68Primary
Electricity · mapped topic
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- What does patent US8962354B2 cover?
- Methods of forming layers can comprise defining a plurality of discrete site-isolated regions (SIRs) on a substrate, forming a first layer on one of the discrete SIRs, forming a second layer on the first layer, measuring a lattice parameter or an electrical property of the second layer, The process parameters for the formation of the first layer are varied in a combinatorial manner between diff…
- Who is the assignee on this patent?
- Intermolecular Inc
- What technology area does this patent fall under?
- Primary CPC classification H10P74/207. Mapped technology areas include Electricity.
- When was this patent published?
- Publication date Tue Feb 24 2015 00:00:00 GMT+0000 (Coordinated Universal Time) (B2). Legal status and post-grant events are not shown on this page.
- What related patents are in patentsdb?
- We list 8 related publications on this page (citations in our corpus or others sharing the same primary CPC).