Methods for constructing parts with improved properties using metallic glass alloys
US-2015315678-A1 · Nov 5, 2015 · US
Real time process control of the polymer dispersion index
US8962067B2 · US · B2
| Field | Value |
|---|---|
| Publication number | US-8962067-B2 |
| Application number | US-201313749307-A |
| Country | US |
| Kind code | B2 |
| Filing date | Jan 24, 2013 |
| Priority date | Jan 24, 2013 |
| Publication date | Feb 24, 2015 |
| Grant date | Feb 24, 2015 |
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Abstract
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Processes for real time process control of the Polymer Dispersion Index (PDI) during polymerization processes. By tuning this chain length distribution in real time, a resulting polymer can have predetermined physical properties such as thickness, physical yield strength, decomposition time, thermal stability, etc. Techniques herein can dynamically control chain length distribution through use of a mass density measurement device located within a processing chamber and providing real time feedback of polymer growth. Chamber parameters can be controlled or modified before and during polymerization based on mass density feedback. Such chamber parameters can include pressure, temperature, chemistry, and process gas flow rates and flow periods.
First claim
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The invention claimed is: 1. A method of forming a polymer film, the method comprising: disposing a substrate on a substrate holder in a process chamber of a vapor deposition system; positioning a mass density measurement device in the process chamber adjacent to the substrate holder, wherein positioning the mass density measurement device in the process chamber includes positioning a quartz crystal microbalance (QCM) sensor in the process chamber adjacent to the substrate holde…
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- What does patent US8962067B2 cover?
- Processes for real time process control of the Polymer Dispersion Index (PDI) during polymerization processes. By tuning this chain length distribution in real time, a resulting polymer can have predetermined physical properties such as thickness, physical yield strength, decomposition time, thermal stability, etc. Techniques herein can dynamically control chain length distribution through use …
- Who is the assignee on this patent?
- Tokyo Electron Ltd
- What technology area does this patent fall under?
- Primary CPC classification B05D5/00. Mapped technology areas include Operations & Transport.
- When was this patent published?
- Publication date Tue Feb 24 2015 00:00:00 GMT+0000 (Coordinated Universal Time) (B2). Legal status and post-grant events are not shown on this page.
- What related patents are in patentsdb?
- We list 8 related publications on this page (citations in our corpus or others sharing the same primary CPC).