Method for providing a planarizable workpiece support, a workpiece planarization arrangement, and a chuck
US-2017263490-A1 · Sep 14, 2017 · US
Controlled surface roughness in vacuum retention
US8960686B2 · US · B2
| Field | Value |
|---|---|
| Publication number | US-8960686-B2 |
| Application number | US-201113250871-A |
| Country | US |
| Kind code | B2 |
| Filing date | Sep 30, 2011 |
| Priority date | Sep 30, 2011 |
| Publication date | Feb 24, 2015 |
| Grant date | Feb 24, 2015 |
How to read this patent
A practical reading order for non-experts. Skip the full description unless you need deep technical detail.
- Title
What the patent document calls the invention.
- Abstract
A short plain-language summary of the technical disclosure.
- Assignees and inventors
Who owns or filed the patent and who is credited as inventor.
- Key dates
Filing, priority, publication, and grant dates set the timeline.
- First independent claim
The legal scope of protection — read this for what is actually claimed.
- CPC / IPC classifications
Technology tags used to group this patent with similar filings.
- Citations and related patents
Prior art links and similar publications in this corpus.
Abstract
Official abstract text for this publication.
An apparatus, particularly a chuck for retaining a thin part for micro-machining processing, is disclosed. The chuck is formed of a plate-shaped body having a first surface and a second surface opposite the first surface. The plate-shaped body includes a light-transmissive material, and at least one of the first surface or the second surface is a roughened surface. The chuck can be incorporated into a micro-machining system using a chuck support that allows light through to backlight a processed part for inspection.
First claim
Opening claim text (preview).
What is claimed is: 1. An apparatus for supporting a part to be micro-machined, comprising: a chuck formed of a plate-shaped body having a first surface that is flat for supporting a flat bottom surface of the part, a second surface opposite the first surface, and an outer edge extending between the first surface and the second surface, the plate-shaped body formed of a light-transmissive material and the first surface being a roughened surface; a chuck support supporting the ch…
Assignees
Inventors
Classifications
Cross-Sectional Technologies · mapped topic
- B23Q3/088Primary
Operations & Transport · mapped topic
Cross-Sectional Technologies · mapped topic
Cross-Sectional Technologies · mapped topic
Patent family
Related publications grouped by family.
External sources
Next steps
Free tools are coming soon. Tell us what you want to track and we'll notify you.
Frequently asked questions
Answers are generated from the same data shown on this page.
- What does patent US8960686B2 cover?
- An apparatus, particularly a chuck for retaining a thin part for micro-machining processing, is disclosed. The chuck is formed of a plate-shaped body having a first surface and a second surface opposite the first surface. The plate-shaped body includes a light-transmissive material, and at least one of the first surface or the second surface is a roughened surface. The chuck can be incorporated…
- Who is the assignee on this patent?
- Ferguson Robert A, Electro Scient Ind Inc
- What technology area does this patent fall under?
- Primary CPC classification B23Q3/088. Mapped technology areas include Operations & Transport.
- When was this patent published?
- Publication date Tue Feb 24 2015 00:00:00 GMT+0000 (Coordinated Universal Time) (B2). Legal status and post-grant events are not shown on this page.
- What related patents are in patentsdb?
- We list 8 related publications on this page (citations in our corpus or others sharing the same primary CPC).