Apparatus having a roughness measurement sensor and corresponding methods

Patent metadata

Field	Value
Publication number	US-8959986-B2
Application number	US-201113163128-A
Country	US
Kind code	B2
Filing date	Jun 17, 2011
Priority date	Dec 19, 2008
Publication date	Feb 24, 2015
Grant date	Feb 24, 2015

Abstract

An apparatus having a roughness sensing system and a roughness measurement sensor, wherein a slide element and a probe tip come to operation, and method of use thereof. The slide element is arranged on an extreme end of a probe pin in the form of a scan-slide element. The probe tip is integrated into the probe pin, and the distance between the scan-slide element and the probe tip is predetermined. The roughness sensing system is a 1D-, 2D- or 3D-scanning system having a parallelogram configuration. The apparatus further has a serving device which enables moving the probe pin together with the scan-slide element and the probe tip jointly over a surface to be scanned.

First claim

What is claimed is:

1. An apparatus, comprising:
a roughness sensing system comprising a 1D-, 2D- or 3D-scanning system and having a parallelogram configuration;
a roughness measurement sensor including a probe pin having a slide element comprising a scan-slide element located at an end of the probe pin and a probe tip integrated with the probe pin at a predetermined distance from the scan-slide element; and
an advancing device adapted to jointly move the probe pin together wi…

Assignees

• Mies Georg
• Klingelnberg Ag

Inventors

• Mies Georg

Classifications

• G01B5/28 Primary

  Physics · mapped topic