Electronic device manufacture using low-k dielectric materials

Patent metadata

Field	Value
Publication number	US-8945677-B2
Application number	US-201213358462-A
Country	US
Kind code	B2
Filing date	Jan 25, 2012
Priority date	Jan 25, 2011
Publication date	Feb 3, 2015
Grant date	Feb 3, 2015

Abstract

Materials and methods for manufacturing electronic devices and semiconductor components using low dielectric materials comprising polyimide based aerogels are described. Additional methods for manipulating the properties of the dielectric materials and affecting the overall dielectric property of the system are also provided.

First claim

What is claimed is:

1. A method for producing a low-k dielectric component suitable for an electronic device comprising the steps of:
a) disposing on to a substrate a layer of pre-sol composition comprising a polyamic acid pre-sol, a catalyst and a polar, aprotic solvent,
b) curing the pre-sol composition to form a wet-gel material,
c) removing the solvent using supercritical fluid to provide a polyimide aerogel film, and
d) capping a surface of the polyimide aerogel film away from the substrate with at least one non-porous, low-k dieletric material.

2. The method of claim 1 , wherein the step of removing the solvent using super critical fluid is accompanied by pressure cycling to provide an increased density at the surface of the aerogel film away from the substrate.

3. The method of claim 1 , wherein the pre-sol composition comprises a hybrid pre-sol comprising:
a) at least one tetra-, tri-, di- and/or mono-alkoxysilane which may optionally be partially hydrolyzed,
b) at least one bis- bi-, or trialkoxysilane diimide,
c) a selected amount of water, and
d) a gelation catalyst.

4. The method of claim 1 , wherein the method further comprises at least one step which produces an aerogel with a pattern.

5. The method of claim 4 , wherein at least one step which produces an aerogel with a pattern comprises:
a) providing a predefined pattern on the substrate with a patterning material,
b) applying the pre-sol compositions on to the predefined patterns, and
b) optionally removing the patterning material after the aerogel film is obtained to provide an aerogel pattern.

6. The method of claim 1 , wherein the step of capping the surface of the aerogel film comprises capping a portion of the surface of the aerogel film away from the substrate, or capping the entirety of the surface of the aerogel film away from the substrate.

7. The method of claim 1 , wherein the polyimide aerogel film has a density between about 0.05 and about 0.40 g/cc.

8. The method of claim 1 , wherein the polyimide aerogel film has a dielectric constant between about 1.1 and 2.0.

9. The method of claim 1 , wherein the at least one non-porous, low-k dieletric material comprises glasses, siloxanes, silsesquioxanes, polyimides, poly(aryl esters), polycarbonates, poly(arylene ethers), polyimides, polyaromatic hydrocarbons, poly(perfluorinated hydrocarbons, polybenzoxazoles, parylenes, polycycloolefins, benzocyclobutenes, or combinations thereof.

10. The method of claim 1 , wherein the step of capping a surface of the polyimide aerogel film comprises dispersing the non-porous, low-k dieletric material onto at least a portion of the polyimide aerogel film surface by chemical vapor deposition, atomic layer deposition, physical vapor deposition, spin-on deposition, or combinations thereof.

11. A low-k dielectric component suitable for an electronic device produced by the method of claim 1 .

12. The low-k dielectric component of claim 1 , comprising: a substrate layer; a polyimide aerogel film coating at least a portion of the substrate; and a barrier layer coating at least a portion of the polyimide aerogel film away from the substrate; wherein the barrier layer comprises at least one non-porous, low-k dieletric material.

13. The low-k dielectric component of claim 12 , wherein the polyimide aerogel film has a density between about 0.05 and about 0.40 g/cc.

14. The low-k dielectric component of claim 12 , wherein the polyimide aerogel film has a dielectric constant between about 1.1 and 2.0.

15. The low-k dielectric component of claim 12 , wherein the polyimide aerogel film is formed from a pre-sol composition comprising: a polyamic acid pre-sol, a catalyst and a polar, aprotic solvent.

16. The low-k dielectric component of claim 15 , wherein the pre-sol composition comprises a hybrid pre-sol composition, comprising:
a) at least one tetra-, tri-, di- and/or mono- alkoxysilane which may optionally be partially hydrolyzed,
b) at least one bis- bi-, or trialkoxysilane diimide,
c) a selected amount of water, and
d) a gelation catalyst.

17. The low-k dielectric component of claim 12 , wherein the at least one non-porous, low-k dieletric material comprises glasses, siloxanes, silsesquioxanes, polyimides, poly(aryl esters), polycarbonates, poly(arylene ethers), polyimides, polyaromatic hydrocarbons, poly(perfluorinated hydrocarbons, polybenzoxazoles, parylenes, polycycloolefins, benzocyclobutenes, or combinations thereof.

18. The low-k dielectric component of claim 12 , wherein the barrier layer is coated onto the polyimide aerogel film by chemical vapor deposition, atomic layer deposition, physical vapor deposition, spin-on deposition, or combinations thereof.

Assignees

• Zafiropoulos Nicholas A
• Nahass Paul
• Trifu Roxana
• Begag Redouane
• Rhine Wendell E
• Dong Wenting
• White Shannon
• Gould George L
• Naiman Alaric
• Sinta Roger
• Aspen Aerogels Inc

Inventors

• Zafiropoulos Nicholas A
• Nahass Paul
• Trifu Roxana
• Begag Redouane
• Rhine Wendell E
• Dong Wenting
• White Shannon
• Gould George L
• Naiman Alaric
• Sinta Roger

Classifications

• H10P95/08

  Planarisation of organic insulating materials · CPC title

• H10P14/6922

  the material containing Si, O and at least one of H, N, C, F or other non-metal elements, e.g. SiOC, SiOC:H or SiONC · CPC title

• H10P14/6342

  Liquid deposition, e.g. spin-coating, sol-gel techniques or spray coating · CPC title

• H10P14/683 Primary

  carbon-based polymeric organic materials, e.g. polyimides, poly cyclobutene or PVC · CPC title

• H10P14/665

  Porous materials · CPC title