Hole Pattern For Uniform Illumination Of Workpiece Below A Capacitively Coupled Plasma Source
US-2015380221-A1 · Dec 31, 2015 · US
Method and apparatus for coating
US8945676B2 · US · B2
| Field | Value |
|---|---|
| Publication number | US-8945676-B2 |
| Application number | US-201013258152-A |
| Country | US |
| Kind code | B2 |
| Filing date | Mar 25, 2010 |
| Priority date | Mar 25, 2009 |
| Publication date | Feb 3, 2015 |
| Grant date | Feb 3, 2015 |
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- Title
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Abstract
Official abstract text for this publication.
The invention relates to a method and an apparatus for coating one or more objects ( 1 ) by exposing an object ( 1 ) to alternately repeating surface reactions of two or more gaseous precursors. The apparatus comprises a reaction chamber ( 2, 40 ), means for forming at least one distinct precursor region inside the reaction chamber, and means for causing translational, essentially mechanically unsupported and unsuspended, motion of an object ( 1 ) inside the reaction chamber, relative to the reaction chamber, for bringing the surface of the object ( 1 ) into contact with a gaseous precursor, the means for causing the translational motion comprising means for moving the object ( 1 ) essentially through the at least one distinct precursor region inside the reaction chamber.
First claim
Opening claim text (preview).
The invention claimed is: 1. A method for coating one or more objects, comprising; introducing a first precursor to a reaction chamber; introducing a second precursor to the reaction chamber; and exposing an object to alternately repeating surface reactions of two or more gaseous precursors inside the reaction chamber, wherein the method comprises forming at least one distinct precursor region inside the reaction chamber, and causing translational, mechanically unsupported and u…
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Classifications
Operations & Transport · mapped topic
Chemistry & Metallurgy · mapped topic
- C23C16/45551Primary
Chemistry & Metallurgy · mapped topic
Cross-Sectional Technologies · mapped topic
Chemistry & Metallurgy · mapped topic
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- What does patent US8945676B2 cover?
- The invention relates to a method and an apparatus for coating one or more objects ( 1 ) by exposing an object ( 1 ) to alternately repeating surface reactions of two or more gaseous precursors. The apparatus comprises a reaction chamber ( 2, 40 ), means for forming at least one distinct precursor region inside the reaction chamber, and means for causing translational, essentially mechanically …
- Who is the assignee on this patent?
- Maula Jarmo, Beneq Oy
- What technology area does this patent fall under?
- Primary CPC classification C23C16/45551. Mapped technology areas include Chemistry & Metallurgy.
- When was this patent published?
- Publication date Tue Feb 03 2015 00:00:00 GMT+0000 (Coordinated Universal Time) (B2). Legal status and post-grant events are not shown on this page.
- What related patents are in patentsdb?
- We list 8 related publications on this page (citations in our corpus or others sharing the same primary CPC).