Method and apparatus for cleaning semiconductor wafer
US-2015332940-A1 · Nov 19, 2015 · US
Touchless site isolation using gas bearing
US8945407B2 · US · B2
| Field | Value |
|---|---|
| Publication number | US-8945407-B2 |
| Application number | US-201113337374-A |
| Country | US |
| Kind code | B2 |
| Filing date | Dec 27, 2011 |
| Priority date | Dec 27, 2011 |
| Publication date | Feb 3, 2015 |
| Grant date | Feb 3, 2015 |
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Abstract
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A gas bearing seal using porous materials for distribution of gas flow can provide site isolation during wet processing. In some embodiments, a flow cell comprises a porous media gas bearing surrounding a periphery of the flow cell, isolating the liquid inside the flow cell from the ambient air outside the flow cell. In some embodiments, a protective chuck comprises a porous media gas bearing disposed in a middle of the protective chuck, isolating the liquid outside the protective chuck with the gaseous ambient generated by the porous media gas bearing.
First claim
Opening claim text (preview).
What is claimed is: 1. A method for processing a substrate, comprising providing a substrate, wherein the substrate comprises a first surface region and a second surface region; providing a flow cell, wherein the flow cell comprises a hollow interior operable to receive a fluid, a peripheral portion circumscribing the hollow interior, and an inlet operable to receive gas flow, wherein the peripheral portion comprises a bottom surface and the flow cell further comprises a porous…
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Classifications
Electricity · mapped topic
- H10P72/0416Primary
Electricity · mapped topic
Cross-Sectional Technologies · mapped topic
Cross-Sectional Technologies · mapped topic
- F15D1/00Primary
Mechanical Engineering · mapped topic
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- What does patent US8945407B2 cover?
- A gas bearing seal using porous materials for distribution of gas flow can provide site isolation during wet processing. In some embodiments, a flow cell comprises a porous media gas bearing surrounding a periphery of the flow cell, isolating the liquid inside the flow cell from the ambient air outside the flow cell. In some embodiments, a protective chuck comprises a porous media gas bearing d…
- Who is the assignee on this patent?
- Francis Aaron, Intermolecular Inc
- What technology area does this patent fall under?
- Primary CPC classification H10P72/0416. Mapped technology areas include Electricity.
- When was this patent published?
- Publication date Tue Feb 03 2015 00:00:00 GMT+0000 (Coordinated Universal Time) (B2). Legal status and post-grant events are not shown on this page.
- What related patents are in patentsdb?
- We list 8 related publications on this page (citations in our corpus or others sharing the same primary CPC).