Universal clamping fixture to maintain laminate flatness during chip join
US-2015371887-A1 · Dec 24, 2015 · US
Heated electrostatic chuck including mechanical clamp capability at high temperature
US8941968B2 · US · B2
| Field | Value |
|---|---|
| Publication number | US-8941968-B2 |
| Application number | US-201113152735-A |
| Country | US |
| Kind code | B2 |
| Filing date | Jun 3, 2011 |
| Priority date | Jun 8, 2010 |
| Publication date | Jan 27, 2015 |
| Grant date | Jan 27, 2015 |
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- Title
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- Abstract
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Abstract
Official abstract text for this publication.
An electrostatic clamp is provided, having a clamping plate, wherein a clamping surface of the clamping plate is configured to contact the workpiece. A voltage applied to one or more electrodes selectively electrostatically attracts the workpiece to the clamping surface. One or more auxiliary clamping members are further provided wherein the one or more auxiliary clamping members are configured to selectively secure at least a portion of the workpiece to the clamping surface. A temperature monitoring device configured to determine a temperature of the workpiece is provided, and a controller is configured to selectively clamp the workpiece to the clamping surface via a control of the voltage to the one or more electrodes and the one or more auxiliary clamping members, based, at least in part, on the temperature of the workpiece.
First claim
Opening claim text (preview).
What is claimed is: 1. An electrostatic clamp, comprising: a clamping plate having a clamping surface, wherein a portion of the clamping surface is configured to contact both a first workpiece of a first size and second workpiece of a second size, wherein the second size is larger than the first size; one or more electrodes associated with the clamping plate, wherein a voltage applied to the one or more electrodes is operable to selectively electrostatically attract the first wo…
Assignees
Inventors
Classifications
Electricity · mapped topic
- H10P72/7608Primary
Electricity · mapped topic
Electricity · mapped topic
- H01L21/68728Primary
Electricity · mapped topic
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Frequently asked questions
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- What does patent US8941968B2 cover?
- An electrostatic clamp is provided, having a clamping plate, wherein a clamping surface of the clamping plate is configured to contact the workpiece. A voltage applied to one or more electrodes selectively electrostatically attracts the workpiece to the clamping surface. One or more auxiliary clamping members are further provided wherein the one or more auxiliary clamping members are configured…
- Who is the assignee on this patent?
- Justesen Perry J I, Weed Allan D, Lee William Davis, and 4 more
- What technology area does this patent fall under?
- Primary CPC classification H10P72/7608. Mapped technology areas include Electricity.
- When was this patent published?
- Publication date Tue Jan 27 2015 00:00:00 GMT+0000 (Coordinated Universal Time) (B2). Legal status and post-grant events are not shown on this page.
- What related patents are in patentsdb?
- We list 8 related publications on this page (citations in our corpus or others sharing the same primary CPC).