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Method for examining a sample by using a charged particle beam
US8937281B2 · US · B2
| Field | Value |
|---|---|
| Publication number | US-8937281-B2 |
| Application number | US-201213541618-A |
| Country | US |
| Kind code | B2 |
| Filing date | Jul 3, 2012 |
| Priority date | Jun 24, 2009 |
| Publication date | Jan 20, 2015 |
| Grant date | Jan 20, 2015 |
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Abstract
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A method for examining a sample with a scanning charged particle beam imaging apparatus. First, an image area and a scan area are specified on a surface of the sample. Herein, the image area is entirely overlapped within the scan area. Next, the scan area is scanned by using a charged particle beam along a direction neither parallel nor perpendicular to an orientation of the scan area. It is possible that only a portion of the scan area overlapped with the image area is exposed to the charged particle beam. It also is possible that both the shape and the size of the image area are essentially similar with that of the scan area, such that the size of the area projected by the charged particle beam is almost equal to the size of the image area.
First claim
Opening claim text (preview).
What is claimed is: 1. A method for examining a sample with scanning charged particle beam imaging apparatus, comprising: specifying an image area and a scan area, wherein said image area is a portion of a surface of said sample and said scan area is an area to be scanned, wherein said image area is entirely covered with said scan area, wherein an orientation of said scan area is at a tilted angle neither parallel nor perpendicular to an orientation of said image area; and scann…
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Electricity · mapped topic
- H01J37/265Primary
Electricity · mapped topic
Electricity · mapped topic
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- What does patent US8937281B2 cover?
- A method for examining a sample with a scanning charged particle beam imaging apparatus. First, an image area and a scan area are specified on a surface of the sample. Herein, the image area is entirely overlapped within the scan area. Next, the scan area is scanned by using a charged particle beam along a direction neither parallel nor perpendicular to an orientation of the scan area. It is po…
- Who is the assignee on this patent?
- Zhao Yan, Jau Jack, Fang Wei, and 1 more
- What technology area does this patent fall under?
- Primary CPC classification H01J37/265. Mapped technology areas include Electricity.
- When was this patent published?
- Publication date Tue Jan 20 2015 00:00:00 GMT+0000 (Coordinated Universal Time) (B2). Legal status and post-grant events are not shown on this page.
- What related patents are in patentsdb?
- We list 8 related publications on this page (citations in our corpus or others sharing the same primary CPC).