Methods of forming semiconductor devices
US-2024387699-A1 · Nov 21, 2024 · US
Planarizing method
US8936729B2 · US · B2
| Field | Value |
|---|---|
| Publication number | US-8936729-B2 |
| Application number | US-201213603924-A |
| Country | US |
| Kind code | B2 |
| Filing date | Sep 5, 2012 |
| Priority date | Dec 20, 2011 |
| Publication date | Jan 20, 2015 |
| Grant date | Jan 20, 2015 |
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Abstract
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According to one embodiment, a planarizing method is proposed. In the planarizing method, a surface to be processed of an object to be processed including a silicon oxide film is planarized in a processing solution by bringing the surface to be processed into contact with or close proximity with the surface of a solid-state plate on which fluorine is adsorbed. The bonding energy between fluorine and the solid-state plate is lower than that between fluorine and silicon.
First claim
Opening claim text (preview).
What is claimed is: 1. A method for chemically planarizing a silicon oxide containing surface of an object to be processed, the method comprising: immersing the silicon oxide containing surface and an ion exchanger on which fluorine is absorbed into a processing fluid, wherein bonding energy between fluorine and the ion exchanger, bonding energy between fluorine and silicon, and bonding energy between anions contained in the processing solution and the ion exchanger, are such that…
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- H10P95/064Primary
Electricity · mapped topic
Electricity · mapped topic
Electricity · mapped topic
Electricity · mapped topic
Electricity · mapped topic
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- What does patent US8936729B2 cover?
- According to one embodiment, a planarizing method is proposed. In the planarizing method, a surface to be processed of an object to be processed including a silicon oxide film is planarized in a processing solution by bringing the surface to be processed into contact with or close proximity with the surface of a solid-state plate on which fluorine is adsorbed. The bonding energy between fluorin…
- Who is the assignee on this patent?
- Gawase Akifumi, Matsui Yukiteru, Toshiba Kk
- What technology area does this patent fall under?
- Primary CPC classification H10P95/064. Mapped technology areas include Electricity.
- When was this patent published?
- Publication date Tue Jan 20 2015 00:00:00 GMT+0000 (Coordinated Universal Time) (B2). Legal status and post-grant events are not shown on this page.
- What related patents are in patentsdb?
- We list 8 related publications on this page (citations in our corpus or others sharing the same primary CPC).