Thermo-mechanical actuator
US-12117739-B2 · Oct 15, 2024 · US
Lithographic apparatus and detector apparatus
US8934083B2 · US · B2
| Field | Value |
|---|---|
| Publication number | US-8934083-B2 |
| Application number | US-201013260009-A |
| Country | US |
| Kind code | B2 |
| Filing date | Mar 23, 2010 |
| Priority date | Apr 27, 2009 |
| Publication date | Jan 13, 2015 |
| Grant date | Jan 13, 2015 |
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- Title
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Abstract
Official abstract text for this publication.
An apparatus and method for detecting extreme ultraviolet (EUV) radiation is disclosed. The apparatus includes a detector having a top surface, a layer of scintillation material on the top surface of the detector, a layer of spacer material on the layer of scintillation material, and a spectral purity filter layer on the layer of spacer material. The method includes directing the EUV radiation through the spectral purity filter layer and through the spacer material layer. The spacer material layer may be disposed between the spectral purity filter layer and a layer of scintillation material. The method further includes detecting scintillation radiation emitted by the scintillation material using the detector.
First claim
Opening claim text (preview).
What is claimed is: 1. A detector apparatus comprising: a detector having a top surface; a layer of scintillation material disposed on the top surface of the detector; a layer of spacer material disposed on the layer of scintillation material; and a spectral purity filter layer disposed on the layer of spacer material. 2. The apparatus of claim 1 , wherein the layer of spacer material is less than 100 nm thick. 3. The apparatus of…
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Classifications
Electricity · mapped topic
- G03F7/7085Primary
Physics · mapped topic
- G03F7/706Primary
Physics · mapped topic
Electricity · mapped topic
Electricity · mapped topic
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Frequently asked questions
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- What does patent US8934083B2 cover?
- An apparatus and method for detecting extreme ultraviolet (EUV) radiation is disclosed. The apparatus includes a detector having a top surface, a layer of scintillation material on the top surface of the detector, a layer of spacer material on the layer of scintillation material, and a spectral purity filter layer on the layer of spacer material. The method includes directing the EUV radiation …
- Who is the assignee on this patent?
- Nikolaev Ivan Sergejevitsj, Wehrens Martijn, Asml Netherlands Bv
- What technology area does this patent fall under?
- Primary CPC classification G03F7/7085. Mapped technology areas include Physics.
- When was this patent published?
- Publication date Tue Jan 13 2015 00:00:00 GMT+0000 (Coordinated Universal Time) (B2). Legal status and post-grant events are not shown on this page.
- What related patents are in patentsdb?
- We list 8 related publications on this page (citations in our corpus or others sharing the same primary CPC).