Method for cleaning a surface

US8932408B2 · US · B2

Patent metadata
FieldValue
Publication numberUS-8932408-B2
Application numberUS-52375908-A
CountryUS
Kind codeB2
Filing dateJan 9, 2008
Priority dateJan 22, 2007
Publication dateJan 13, 2015
Grant dateJan 13, 2015

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  1. Title

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  2. Abstract

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  3. Assignees and inventors

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  4. Key dates

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  5. First independent claim

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  6. CPC / IPC classifications

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  7. Citations and related patents

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Abstract

Official abstract text for this publication.

A method for cleaning a surface of a plate-like article includes the steps of: treating the surface with free flow cleaning, wherein liquid is dispensed through a dispense nozzle onto the surface in a continuous liquid flow, and treating the surface with spray cleaning, wherein liquid is directed through a spray nozzle towards the surface in form of droplets. The surface is treated with a spray cleaning step before the free flow cleaning step and a spray cleaning step after the free flow cleaning step.

First claim

Opening claim text (preview).

The invention claimed is: 1. A method for spray cleaning a surface of a plate-like article, comprising the steps: treating the surface with free flow cleaning, wherein liquid is dispensed through a dispense nozzle onto the surface in a continuous liquid flow, treating the surface with spray cleaning, wherein liquid is directed through a spray nozzle towards the surface in form of droplets, wherein the surface is treated with a spray cleaning step before the free flow cleaning…

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What does patent US8932408B2 cover?
A method for cleaning a surface of a plate-like article includes the steps of: treating the surface with free flow cleaning, wherein liquid is dispensed through a dispense nozzle onto the surface in a continuous liquid flow, and treating the surface with spray cleaning, wherein liquid is directed through a spray nozzle towards the surface in form of droplets. The surface is treated w…
Who is the assignee on this patent?
Sellmer Reinhard, Lam Res Ag
What technology area does this patent fall under?
Primary CPC classification B08B3/02. Mapped technology areas include Operations & Transport.
When was this patent published?
Publication date Tue Jan 13 2015 00:00:00 GMT+0000 (Coordinated Universal Time) (B2). Legal status and post-grant events are not shown on this page.
What related patents are in patentsdb?
We list 8 related publications on this page (citations in our corpus or others sharing the same primary CPC).