Gas Analysis with an Inverted Magnetron Source
US-2019368959-A1 · Dec 5, 2019 · US
US8928329B2 · US · B2
| Field | Value |
|---|---|
| Publication number | US-8928329-B2 |
| Application number | US-201213559347-A |
| Country | US |
| Kind code | B2 |
| Filing date | Jul 26, 2012 |
| Priority date | Jul 26, 2011 |
| Publication date | Jan 6, 2015 |
| Grant date | Jan 6, 2015 |
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A fast response output signal circuit ( 10 ) for a cold cathode gauge is provided to produce a fast response output signal ( 48 ) in addition to a voltage output signal ( 40 ) that is representative of the pressure in the cold cathode gauge. The fast response output signal ( 48 ) is either on or off, thus can be used to trigger a closing of an isolation valve or other responsive action upon a change in pressure that attains or exceeds a certain set point threshold. The fast response output signal is produced and processed with analog circuits, but the set point is produced with a microprocessor. The voltage output signal can be produced as a logarithmic function of the pressure.
Opening claim text (preview).
The invention claimed is: 1. A fast response signal circuit for a cold cathode pressure gauge that provides a current signal which is proportional to pressure in the cold cathode gauge, comprising: an electrometer circuit that is connectable electrically to the current signal from the cold cathode pressure gauge and that amplifies and processes the current signal from the cold cathode pressure gauge to provide a first analog voltage output signal that is proportional to the curren…
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