Reluctance transducer
US-10699831-B2 · Jun 30, 2020 · US
Sensor with energy-harvesting device
US8928162B2 · US · B2
| Field | Value |
|---|---|
| Publication number | US-8928162-B2 |
| Application number | US-201414229068-A |
| Country | US |
| Kind code | B2 |
| Filing date | Mar 28, 2014 |
| Priority date | Mar 14, 2011 |
| Publication date | Jan 6, 2015 |
| Grant date | Jan 6, 2015 |
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Abstract
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A method of fabricating a device includes forming a moveable plate over a substrate, and forming an energy harvesting coil in the moveable plate. The method further includes forming at least one connector connecting the movable plate with the energy harvesting coil, wherein a portion of the energy harvesting coil extends along the at least one connector. The method further includes forming electrodes around the moveable plate, the electrodes adapted to sense motion of the moveable plate.
First claim
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What is claimed is: 1. A method of fabricating a device comprising: forming a moveable plate over a substrate; forming an energy harvesting coil in the moveable plate; forming at least one connector connecting the movable plate with the substrate, wherein a portion of the energy harvesting coil extends along the at least one connector; and forming electrodes around the moveable plate, the electrodes adapted to sense motion of the moveable plate. 2. The…
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Frequently asked questions
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- What does patent US8928162B2 cover?
- A method of fabricating a device includes forming a moveable plate over a substrate, and forming an energy harvesting coil in the moveable plate. The method further includes forming at least one connector connecting the movable plate with the energy harvesting coil, wherein a portion of the energy harvesting coil extends along the at least one connector. The method further includes forming elec…
- Who is the assignee on this patent?
- Taiwan Semiconductor Mfg
- What technology area does this patent fall under?
- Primary CPC classification G01P15/11. Mapped technology areas include Physics.
- When was this patent published?
- Publication date Tue Jan 06 2015 00:00:00 GMT+0000 (Coordinated Universal Time) (B2). Legal status and post-grant events are not shown on this page.
- What related patents are in patentsdb?
- We list 8 related publications on this page (citations in our corpus or others sharing the same primary CPC).