Mid-infrared avalanche photodiodes with low dark currents
US-2024170601-A1 · May 23, 2024 · US
US8928036B2 · US · B2
| Field | Value |
|---|---|
| Publication number | US-8928036-B2 |
| Application number | US-56763509-A |
| Country | US |
| Kind code | B2 |
| Filing date | Sep 25, 2009 |
| Priority date | Sep 25, 2008 |
| Publication date | Jan 6, 2015 |
| Grant date | Jan 6, 2015 |
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A barrier infrared detector with absorber materials having selectable cutoff wavelengths and its method of manufacture is described. A GaInAsSb absorber layer may be grown on a GaSb substrate layer formed by mixing GaSb and InAsSb by an absorber mixing ratio. A GaAlAsSb barrier layer may then be grown on the barrier layer formed by mixing GaSb and AlSbAs by a barrier mixing ratio. The absorber mixing ratio may be selected to adjust a band gap of the absorber layer and thereby determine a cutoff wavelength for the barrier infrared detector. The absorber mixing ratio may vary along an absorber layer growth direction. Various contact layer architectures may be used. In addition, a top contact layer may be isolated into an array of elements electrically isolated as individual functional detectors that may be used in a detector array, imaging array, or focal plane array.
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What is claimed is: 1. A barrier infrared detector, comprising: a substrate layer comprising GaSb; an entire absorber layer substantially lattice matched to and in direct contact with the substrate layer and comprising a first quaternary alloy of GaInAsSb having an absorber mixing ratio of InAsSb and GaSb of the first quaternary alloy of GaInAsSb; and a barrier layer in direct contact with the absorber layer and comprising a second quaternary alloy of GaAlAsSb having a barrier…
Electricity · mapped topic
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