Single Line Stab And Coupler And Method Of Use
US-2016362964-A1 · Dec 15, 2016 · US
Substrate supporting apparatus and substrate transporting apparatus with coupling magnets
US8926258B2 · US · B2
| Field | Value |
|---|---|
| Publication number | US-8926258-B2 |
| Application number | US-201213664769-A |
| Country | US |
| Kind code | B2 |
| Filing date | Oct 31, 2012 |
| Priority date | Dec 21, 2011 |
| Publication date | Jan 6, 2015 |
| Grant date | Jan 6, 2015 |
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- Title
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Abstract
Official abstract text for this publication.
A substrate supporting apparatus includes a substrate support that supports a substrate. A first connecting member is connected to the substrate support and includes a first magnet. A second connecting member faces the first connecting member and is connectable to a transport robot for transporting the substrate to a substrate holder. The second connecting member includes a second magnet magnetically coupled with the first magnet. A spacer is configured to hold an interval between the first connecting member and the second connecting member. The first connecting member and the second connecting member are relatively movable in a plane direction of the substrate via the spacer.
First claim
Opening claim text (preview).
What is claimed is: 1. A substrate supporting apparatus comprising: a substrate support that supports a substrate; a first connecting member connected to the substrate support, the first connecting member including a first magnet; a second connecting member facing the first connecting member and connectable to a transport robot for transporting the substrate to a substrate holder, the second connecting member including a second magnet magnetically coupled with the first magnet…
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Classifications
Operations & Transport · mapped topic
Operations & Transport · mapped topic
Chemistry & Metallurgy · mapped topic
- B25J15/0047Primary
Operations & Transport · mapped topic
Cross-Sectional Technologies · mapped topic
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Frequently asked questions
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- What does patent US8926258B2 cover?
- A substrate supporting apparatus includes a substrate support that supports a substrate. A first connecting member is connected to the substrate support and includes a first magnet. A second connecting member faces the first connecting member and is connectable to a transport robot for transporting the substrate to a substrate holder. The second connecting member includes a second magnet magnet…
- Who is the assignee on this patent?
- Canon Anelva Corp
- What technology area does this patent fall under?
- Primary CPC classification B25J15/0047. Mapped technology areas include Operations & Transport.
- When was this patent published?
- Publication date Tue Jan 06 2015 00:00:00 GMT+0000 (Coordinated Universal Time) (B2). Legal status and post-grant events are not shown on this page.
- What related patents are in patentsdb?
- We list 8 related publications on this page (citations in our corpus or others sharing the same primary CPC).