System and method for heating plasma exposed surfaces
US-9224583-B2 · Dec 29, 2015 · US
Substrate holding device, substrate processing apparatus, and method of processing substrate
US2026101718A1 · US · A1
| Field | Value |
|---|---|
| Publication number | US-2026101718-A1 |
| Application number | US-202519349883-A |
| Country | US |
| Kind code | A1 |
| Filing date | Oct 3, 2025 |
| Priority date | Oct 4, 2024 |
| Publication date | Apr 9, 2026 |
| Grant date | — |
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- Title
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Abstract
Official abstract text for this publication.
A substrate holding device includes a porous component, a supporting component, a rotation driver, and a holding driver. The porous component includes an adsorbing surface that adsorbs a film of a framed substrate. The supporting component surrounds the porous component and supports a frame of the framed substrate. The rotation driver rotates the supporting component and the porous component in unison. The holding driver includes at least one magnet disposed opposite to the frame with respect to the supporting component and separated from the supporting component, the holding driver compressively holding the frame against the supporting component by a magnetic force of the magnet.
First claim
Opening claim text (preview).
What is claimed is: 1 . A substrate holding device, comprising: a porous component including an adsorbing surface that adsorbs a film of a framed substrate, the framed substrate including an annular frame, the film attached to an interior of the frame, and a substrate provided on the film; a supporting component surrounding the porous component and supporting the frame; a rotation driver rotating the supporting component and the porous component in unison; and a holding d…
Assignees
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Classifications
Electricity · mapped topic
Electricity · mapped topic
- H10P72/7606Primary
Electricity · mapped topic
- H10P72/78Primary
Electricity · mapped topic
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Frequently asked questions
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- What does patent US2026101718A1 cover?
- A substrate holding device includes a porous component, a supporting component, a rotation driver, and a holding driver. The porous component includes an adsorbing surface that adsorbs a film of a framed substrate. The supporting component surrounds the porous component and supports a frame of the framed substrate. The rotation driver rotates the supporting component and the porous component in…
- Who is the assignee on this patent?
- Screen Holdings Co Ltd
- What technology area does this patent fall under?
- Primary CPC classification H10P72/7606. Mapped technology areas include Electricity.
- When was this patent published?
- Publication date Thu Apr 09 2026 00:00:00 GMT+0000 (Coordinated Universal Time) (A1). Legal status and post-grant events are not shown on this page.
- What related patents are in patentsdb?
- We list 8 related publications on this page (citations in our corpus or others sharing the same primary CPC).