Information processing device, substrate processing device, and information processing method
US-2024302817-A1 · Sep 12, 2024 · US
Substrate processing congestion management apparatus and semiconductor processing system including the same
US2026101705A1 · US · A1
| Field | Value |
|---|---|
| Publication number | US-2026101705-A1 |
| Application number | US-202519059858-A |
| Country | US |
| Kind code | A1 |
| Filing date | Feb 21, 2025 |
| Priority date | Oct 8, 2024 |
| Publication date | Apr 9, 2026 |
| Grant date | — |
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Abstract
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A substrate processing congestion management apparatus includes at least one processor configured to divide a process sequence of a substrate processing apparatus into specific sections and determine whether congestion occurs in the specific sections, to set an initial suspected region corresponding to a section in which the congestion occurs, analyze outliers in events occurring in the initial suspected region, deduce a final suspected region while updating the initial suspected region based on an event in which an outlier is identified, and determine, among the events, an event with a greatest contribution to the final suspected region as a congestion cause, and to notify the congestion cause and automatically control the substrate processing apparatus to reduce process congestion and improve substrate processing throughput, based on the determined congestion cause.
First claim
Opening claim text (preview).
What is claimed is: 1 . A substrate processing congestion management apparatus comprising: at least one processor configured to: divide a process sequence of a substrate processing apparatus into specific sections and determine whether congestion occurs in the specific sections; set an initial suspected region corresponding to a section in which the congestion occurs, analyze outliers in events occurring in the initial suspected region, deduce a final suspected region while…
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Physics · mapped topic
Physics · mapped topic
- H10P72/0612Primary
Electricity · mapped topic
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Frequently asked questions
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- What does patent US2026101705A1 cover?
- A substrate processing congestion management apparatus includes at least one processor configured to divide a process sequence of a substrate processing apparatus into specific sections and determine whether congestion occurs in the specific sections, to set an initial suspected region corresponding to a section in which the congestion occurs, analyze outliers in events occurring in the initial…
- Who is the assignee on this patent?
- Samsung Electronics Co Ltd
- What technology area does this patent fall under?
- Primary CPC classification H10P72/0612. Mapped technology areas include Electricity.
- When was this patent published?
- Publication date Thu Apr 09 2026 00:00:00 GMT+0000 (Coordinated Universal Time) (A1). Legal status and post-grant events are not shown on this page.
- What related patents are in patentsdb?
- We list 8 related publications on this page (citations in our corpus or others sharing the same primary CPC).