Substrate processing congestion management apparatus and semiconductor processing system including the same
US-2026101705-A1 · Apr 9, 2026 · US
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Patent family 99315141
This patent family groups 1 related publication across US. Members often share priority claims or equivalent filings in different countries.
| Field | Value |
|---|---|
| Family ID | 99315141 |
| Family type | — |
| Earliest priority | Oct 8, 2024 |
| First filing country | US |
| Member publications | 1 |
| Countries | US |
| Representative publication | US2026101705A1 — Substrate processing congestion management apparatus and semiconductor processing system including the same |
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US2026101705A1 — Substrate processing congestion management apparatus and semiconductor processing system including the same (published Apr 9, 2026)
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