Substrate processing apparatus
US-2024269862-A1 · Aug 15, 2024 · US
US2026054397A9 · US · A9
| Field | Value |
|---|---|
| Publication number | US-2026054397-A9 |
| Application number | US-202519075995-A |
| Country | US |
| Kind code | A9 |
| Filing date | Mar 11, 2025 |
| Priority date | Sep 1, 2020 |
| Publication date | Feb 26, 2026 |
| Grant date | — |
A practical reading order for non-experts. Skip the full description unless you need deep technical detail.
What the patent document calls the invention.
A short plain-language summary of the technical disclosure.
Who owns or filed the patent and who is credited as inventor.
Filing, priority, publication, and grant dates set the timeline.
The legal scope of protection — read this for what is actually claimed.
Technology tags used to group this patent with similar filings.
Prior art links and similar publications in this corpus.
Official abstract text for this publication.
An apparatus includes a drive unit; and an arm assembly connected to the drive unit, where the arm assembly comprises a traversing platform having an end-effector configured to carry a payload located thereon; a linear actuation system configured to drive the traversing platform in a linear direction; and a magnetic support system comprising at least one guide attached to a frame of the arm assembly, a plurality of vertical actuators attached to the traversing platform, and a plurality of horizontal actuators attached to the traversing platform, the plurality of vertical actuators being configured, with the at least one guide, to move the traversing platform in a vertical direction relative to the linear direction, and the plurality of horizontal actuators being configured, with the at least one guide, to move the traversing platform in a horizontal direction relative to the linear direction.
Opening claim text (preview).
What is claimed is: 1 . An apparatus, comprising: at least one processor; and at least one non-transitory memory including computer program code, the at least one memory and the computer program code configured to, with the at least one processor, cause the apparatus at least to: actuate three vertical actuators to control first, second, and third degrees of freedom related to a vertical position of a traversing platform of a robot; actuate three horizontal actuators to control fourth and fifth degrees of freedom related to a horizontal position of the traversing platform of the robot; and actuate a linear actuator to control a sixth degree of freedom related to a linear movement of the traversing platform of the robot. 2 . The apparatus of claim 1 , wherein causing the apparatus to actuate the three vertical actuators to control the first, second, and third degrees of freedom comprises controlling a z-axis coordinate, a pitch angle, and a roll angle of the traversing platform. 3 . The apparatus of claim 2 , wherein the pitch angle of the traversing platform is changed to adjust the vertical position of the traversing platform. 4 . The apparatus of claim 2 , wherein the pitch angle of the traversing platform is changed independently of the vertical position of the traversing platform. 5 . The apparatus of claim 1 , wherein causing the apparatus to actuate the three horizontal actuators to control the fourth and fifth degrees of freedom comprises controlling a y-axis coordinate and a yaw angle of the traversing platform. 6 . The apparatus of claim 5 , wherein the yaw angle of the traversing platform is changed to adjust the horizontal position of the traversing platform. 7 . The apparatus of claim 5 , wherein the yaw angle of the traversing platform is changed independently of the horizontal position of the traversing platform. 8 . The apparatus of claim 1 , wherein causing the apparatus to actuate the linear actuator to control the sixth degree of freedom comprises controlling an x-axis coordinate of the traversing platform. 9 . The apparatus of claim 2 , wherein the roll angle of the traversing platform is changed to adjust a position of the traversing platform along a z-axis. 10 . The apparatus of claim 2 , wherein the roll angle of the traversing platform is changed independently of the vertical position of the traversing platform and the horizontal position of the traversing platform. 11 . A method of adjusting a position of a traversing platform of a robot, the method comprising: actuating three vertical actuators to control first, second, and third degrees of freedom related to a vertical position of the traversing platform; actuating three horizontal actuators to control fourth and fifth degrees of freedom related to a horizontal position of the traversing platform; and actuating a linear actuator to control a sixth degree of freedom related to a linear movement of the traversing platform. 12 . The method of claim 11 , wherein actuating the three vertical actuators to control the first, second, and third degrees of freedom comprises controlling a z-axis coordinate, a pitch angle, and a roll angle of the traversing platform. 13 . The method of claim 12 , wherein controlling the pitch angle of the traversing platform adjusts the vertical position of the traversing platform. 14 . The method of claim 12 , wherein controlling the pitch angle of the traversing platform does not change the vertical position of the traversing platform. 15 . The method of claim 11 , wherein actuating the three horizontal actuators to control the fourth and fifth degrees of freedom comprises controlling a y-axis coordinate and a yaw angle of the traversing platform. 16 . The method of claim 15 , wherein controlling the yaw angle of the traversing platform adjusts the horizontal position of the traversing platform. 17 . The method of claim 15 , wherein controlling the yaw angle of the traversing platform does not change the horizontal position of the traversing platform. 18 . The method of claim 11 , wherein actuating the linear actuator to control the sixth degree of freedom comprises controlling an x-axis coordinate of the traversing platform.
Optical sensing devices · CPC title
Manipulators transporting wafers · CPC title
the wafers being placed on a robot blade or gripped by a gripper for conveyance · CPC title
Mechanical parts of transfer devices · CPC title
Electromagnetic sensing devices · CPC title
Related publications grouped by family.
Answers are generated from the same data shown on this page.