Flow cells with patterned bonding regions

Patent metadata

Field	Value
Publication number	US-2026009718-A1
Application number	US-202519328197-A
Country	US
Kind code	A1
Filing date	Sep 14, 2025
Priority date	Aug 26, 2022
Publication date	Jan 8, 2026
Grant date	—

Abstract

An example flow cell includes a patterned substrate having an active region and a bonding region that at least partially surrounds the active region. The active region includes first depressions defined in a layer of the patterned substrate, surface chemistry positioned in the first depressions, and first interstitial regions surrounding the first depressions. The bonding region includes second depressions defined in the layer and second interstitial regions surrounding the second depressions. An adhesive is positioned over the second depressions and over the second interstitial regions. A cover is attached to the adhesive such that a flow channel is defined between a portion of the cover and the active region.

First claim

1 .- 13 . (canceled)

14 . A flow cell, comprising:
a patterned substrate having an active region and a bonding region that at least partially surrounds the active region, wherein the active region includes:
first posts defined in a layer of the patterned substrate;
surface chemistry positioned over the first posts; and
first interstitial regions surrounding the first posts; and wherein the bonding region includes:
second posts defined in the layer; and
second interstitial regions surrounding the second posts;
an adhesive positioned over the second interstitial regions and over the second posts; and a cover attached to the adhesive such that a flow channel is defined between a portion of the cover and the active region.

15 . The flow cell as defined in claim 14 , wherein:
a geometry of each of the first posts and of each of the second posts is the same; and the geometry is selected from the group consisting of a cylinder, an oval cylinder, a cube, a cuboid, a cone, a polygonal prism, and combinations thereof.

16 . The flow cell as defined in claim 14 , wherein a geometry of each of the first posts is different from a geometry of each of the second posts.

17 . The flow cell as defined in claim 16 , wherein:
the geometry of each of the first posts is selected from the group consisting of a cylinder, an oval cylinder, a cube, a cuboid, a cone, a polygonal prism, and combinations thereof; the geometry of each of the second posts includes a narrow portion that extends out to a wide portion; and for the geometry of each of the second posts, a dimension across a base of the narrow portion is smaller than at least one dimension of the wide portion that is parallel to the dimension across the base.

18 . The flow cell as defined in claim 17 , wherein:
the narrow portion has a geometry selected from the group consisting of a cylinder, an oval cylinder, a cube, a cuboid, a cone, and a polygonal prism; and the wide portion has a geometry selected from the group consisting of a cylinder, an oval cylinder, a cube, a cuboid, and a polygonal prism.

19 . The flow cell as defined in claim 17 , wherein:
the substrate includes the layer, at least one additional layer underlying the layer, and a base support underlying the at least one additional layer; and for the geometry of each of the second posts:
the wide portion is defined in the layer; and
the narrow portion is defined in the at least one additional layer.

20 . The flow cell as defined in claim 16 , wherein:
the geometry of each of the first posts is selected from the group consisting of a cylinder, an oval cylinder, a cube, a cuboid, a cone, a polygonal prism, and combinations thereof; the geometry of each of the second posts is selected from the group consisting of a slanted cylinder, a slanted oval cylinder, a slanted sube, a slanted cuboid, and a slanted polygonal prism; and the geometry of each of the second posts has its central axis at a non-ninety degree angle relative to a plane at a bottom of the second post.

21 . The flow cell as defined in claim 14 , wherein the adhesive fills the second interstitial regions.

22 . The flow cell as defined in claim 14 , wherein:
the patterned substrate includes a plurality of additional layers underlying the layer, and a base support underlying the plurality of additional layers; an etch rate of the layer and of each of the plurality of additional layers increases moving toward the base support; the base support is non-etchable; and the geometry of each of the second posts decreases moving toward the base support.

23 . The flow cell as defined in claim 14 wherein:
the patterned substrate includes a plurality of additional layers underlying the layer, and a base support underlying the plurality of additional layers;
the layer has a first etch rate;
an etch rate of each of the plurality of additional layers alternates between a second etch rate and the first etch rate moving toward the base support;
the base support is non-etchable; and
the geometry of each of the second posts varies between a first dimension and a second dimension moving toward the base support.

24 .- 39 . (canceled)

40 . A method, comprising:
forming a patterned substrate by:
defining an active region within a layer by:
defining first posts at first predetermined locations within a predetermined region of the layer that is surrounded by a second predetermined region of the layer; and
introducing surface chemistry to each of the first posts;

defining a bonding region of the layer by defining second posts at second predetermined locations within the second predetermined region of the layer;
introducing an adhesive to the bonding region at least around each of the second posts; and positioning a cover in contact with the adhesive, thereby securing the cover to the bonding region and creating a flow channel between a portion of the cover and the active region.

Assignees

• Illumina Inc

Inventors

• Irvin Casey Scott
• Ziebarth Jonathan
• Rapp Michael
• Chan Danny Yuan
• Kim Innsu Daniel
• Aiyar Avishek

Classifications

• B01J2219/0061

  The surface being organic · CPC title

• B01J2219/00612

  the surface being inorganic · CPC title

• B01J2219/00626

  Covalent · CPC title

• B01J2219/00637

  by coating it with another layer · CPC title

• B01J2219/00608

  DNA chips · CPC title