Method of storing high purity alkyl tin compounds

Patent metadata

Field	Value
Publication number	US-2026001897-A1
Application number	US-202519320080-A
Country	US
Kind code	A1
Filing date	Sep 5, 2025
Priority date	Jun 2, 2022
Publication date	Jan 1, 2026
Grant date	—

Abstract

Monoalkyl tin triamide compounds having purity of at least about 99 mol % and the chemical formula RSn(NMe 2 ) 3 are described. R 1 is selected from R A , R B and R C ; R A is a primary alkyl group having about 1 to 10 carbon atoms, R B is a secondary alkyl group having about 3 to 10 carbon atoms, and R C is a tertiary alkyl group having about 3 to 10 carbon atoms; each R 2 is independently an alkyl group having about 1 to 10 carbon atoms; and a content of R 1 Sn(NR 2 2 ) 2 (N(R 2 )CH 2 NR 2 2 ) is less than about 1 mol %. Methods for synthesizing, purifying, and storing these compounds are also provided. The monoalkyl tin compounds may be used for the formation of high-resolution EUV lithography patterning precursors and are attractive due to their high purity and minimal concentration of dialkyl tin and other tin impurities.

First claim

1 - 26 . (canceled)

27 . A method of storing a sample of a monoalkyl tin triamide compound having formula (1) and having a purity of at least about 99 mol %:

wherein R 1 is R C ;
R C is a tertiary alkyl group having about 3 to 10 carbon atoms;
each R 2 is independently a methyl or ethyl group;
wherein a content of R 1 Sn(NR 2 2 ) 2 (N(R 2 )CH 2 NR 2 2 ) in the sample is less than about 0.2 mol %;
the method comprising storing the sample of the monoalkyltin triamide compound having formula (1) substantively without light exposure and at a temperature of less than about 30° C.

28 . The method according to claim 27 , wherein the sample of the monoalkyl tin triamide compound having formula (1) is stored for about three days to about one year.

29 . The method according to claim 27 , wherein the sample of the monoalkyltin triamide undergoes substantively no decomposition after a storage time of about three days to about one year.

30 . (canceled)

31 . The method according to claim 27 , wherein the content of R 1 Sn(NR 2 2 ) 2 (N(R 2 )CH 2 NR 2 2 ) in the sample of the monoalkyl tin triamide having formula (1) is less than about 0.05 mol %.

32 - 38 . (canceled)

39 . The method according to claim 28 , wherein the sample of the monoalkyltin triamide undergoes substantively no decomposition after a storage time of about three days to about one year.

40 . The method according to claim 28 , wherein the content of R 1 Sn(NR 2 2 ) 2 (N(R 2 )CH 2 NR 2 2 ) in the sample of the monoalkyl tin triamide having formula (1) is less than about 0.05 mol %.

41 . The method according to claim 27 , wherein a content of dialkyl bis(dialkylamino)tin having formula (2) in the sample is less than 1 mol %:

42 . The method according to claim 27 , wherein a total content of tetrakis(dialkylamino)tin in the sample is less than 1 mol %.

43 . The method according to claim 27 , wherein an APHA color of the sample is less than 20.

Assignees

• Gelest Inc
• Mitsubishi Chem Corp

Inventors

• Yang Li
• Hioki Yuta

Classifications

• C07F7/2296

  Purification, stabilisation, isolation · CPC title

• C07F7/2284 Primary

  Compounds with one or more Sn-N linkages · CPC title