Methods for controlling the phase of self-assembled ionic liquid crystal (ilc) structures

Patent metadata

Field	Value
Publication number	US-2025368898-A1
Application number	US-202418677975-A
Country	US
Kind code	A1
Filing date	May 30, 2024
Priority date	May 30, 2024
Publication date	Dec 4, 2025
Grant date	—

Abstract

Embodiments of improved methods are provided to form ordered structures on a surface of a substrate using direct self-assembly (DSA) of ionic liquid crystals (ILCs). More specifically, various embodiments of methods are provided to control the phase of an ordered structure formed on a substrate surface via self-assembly of ILCs having cation head groups, alkyl tail groups having a plurality of hydrocarbons and anions. In the embodiments disclosed herein, the phase of the ordered structure is controlled by replacing the hydrogen (H) atoms of the hydrocarbons included the alkyl chain with larger sized functional groups. Adding larger sized functional groups to the alkyl chain changes the phase of the ordered structure by: (a) increasing the separation between the hydrophilic (cation) and hydrophobic (alkyl tail) groups of the ILCs, and (b) changing the orientation of alkyl tails within the tail groups of the self-assembled ILCs.

First claim

1 . A method to control a phase of a self-assembled ionic liquid crystal (ILC) structure formed on a substrate, the method comprising:
providing a solution comprising ionic liquid crystals (ILCs) having cation head groups, anions and alkyl tail groups, each alkyl tail group comprising a chain of hydrocarbons; depositing the solution onto a surface of the substrate, wherein the ILCs self-assemble on the surface of the substrate to form an ordered structure having alternating head groups and tail groups, wherein the cation head groups and the anions of the ILCs segregate to the head groups and the alkyl tail groups segregate to the tail groups; and controlling the phase of the ordered structure by replacing hydrogen (H) atoms within the chain of hydrocarbons with larger functional groups prior to depositing the solution onto the surface of the substrate.

2 . The method of claim 1 , wherein the cation head groups comprise an imidazolium, pyrazolium, pyrrolidinium, pyridinium, piperidinium, morpholinium, ammonium, phosphonium, sulphonium or cholinium-based cation head group.

3 . The method of claim 1 , wherein the cation head groups comprise an imidazolium-based cation head group of the form: 1-R 1 -3-R 2 -imidazolium, where R 1 is an alkyl chain with a chain length ranging from 8-18 hydrocarbons, and R 2 is a hydrogen, methyl, ethyl, propyl, butyl, substituted or unsubstituted phenyl, or other hydrocarbon group.

4 . The method of claim 3 , wherein the cation head groups comprise 1-dodecyl-3-methylimidazolium.

5 . The method of claim 3 , wherein the anions comprise tetrafluoroborate (BF 4 − ), chloride (Cl − ), acetate (CH 3 COO − ), hexafluorophosphate (PF 6 − ), trifluoromethyl acetate (C 3 H 3 F 3 O 2 − ), nitrate (NO 3 − ), dicyanamide (C 2 HN 3 − ), tetracyanoborate (B(CN) 4 − ), trifluoromethane sulfonate (CF 3 O 3 S − ), bis((trifluoromethyl)sulfonyl)imdide ([(CF 3 SO 2 ) 2 N]—), tetrachloroaluminate ([AlCl 4 ]—), heptachlorodialuminate ([Al 2 Cl 7 ]—), decachlorotrialuminate ([Al 3 Cl 10 ]—), tridecachlorotetraaluminate ([Al 4 Cl 13 ]—), tetrachloroferrate (Cl 4 Fe—), trichlorostannate ([SnCl 3 ]—), pentachlorodistannate ([Sn 2 Cl 5 ]—), tetrachloroindate ([InCl 4 ]—), nonachlorodititanate ([Ti 2 Cl 9 ]—), nonachlorodizirconate ([Zr 2 Cl 9 ]—), nonachlorodihafnate ([Hf 2 Cl 9 ]—), tetrachloroaurate ([AuCl 4 ]—), tetrachlorogallate ([GaCl 4 ]—), heptachlorodigallate ([Ga 2 Cl 7 ]—), decachlorotrigallate ([Ga 3 Cl 10 ]—), trichloroplumbate ([PbCl 3 ]—), pentachloridoindate ([InCl 5 ] 2− ), tetrachlorozincate ([ZnCl 4 ] 2− ), hexachlorodizincate ([Zn 2 Cl 6 ] 2− ), hexachlorotitanate ([TiCl 6 ] 2− ), hexachlorozirconate ([ZrCl 6 ] 2− ), decachlorodizirconate ([Zr 2 Cl 10 ] 2− ), hexachlorohafnate ([HfCl 6 ] 2− ), decachlorodihafnate ([Hf 2 Cl 10 ] 2− ), tetrachloromanganate ([MnCl 4 ] 2− ), tetrachloroferrate ([FeCl 4 ] 2− ), tetrachlorocobaltate ([CoCl 4 ] 2− ), tetrachloronicklate ([NiCl 4 ] 2− ), tetrachloropaladate ([PdCl 4 ] 2− ), tetrachloroplatinate ([PtCl 4 ] 2− ), tetrachlorocuprate ([CuCl 4 ] 2− ), octachlorotrizincate ([Zn 3 Cl 8 ] 2− ), decachlorotetrazincate ([Zn 4 Cl 10 ] 2− ), tetrachlorocadmate ([CdCl 4 ] 2− ), hexachlorodicadmate ([Cd 2 Cl 6 ] 2− ), tetrachloromercurate ([HgCl 4 ] 2− ), or tetrachloroplumbate ([PbCl 4 ] 2− ).

6 . The method of claim 3 , wherein said controlling the phase of the ordered structure comprises replacing the hydrogen (H) atoms with methyl (CH 3 ) groups prior to depositing the solution onto the surface of the substrate.

7 . The method of claim 6 , wherein said replacing the hydrogen (H) atoms with the methyl (CH 3 ) groups changes the phase of the ordered structure by: (a) increasing a separation between the alkyl tail groups in the tail groups of the ordered structure, and (b) changing an orientation of the alkyl tail groups in the tail groups of the ordered structure.

8 . The method of claim 7 , wherein the ILCs self-assemble on the surface of the substrate to form a nanopore/rod structure having alternating head groups and tail groups, wherein the cation head groups and the anions segregate to the head groups to form a plurality of rods within the nanopore/rod structure, with the alkyl tail groups oriented around the plurality of rods.

9 . The method of claim 8 , wherein the plurality of rods are evenly distributed within the nanopore/rod structure with equal spacing between each of the plurality of rods.

10 . A method to form a self-assembled ionic liquid crystal (ILC) structure on a substrate, the method comprising:
providing a solution comprising ionic liquid crystals (ILCs) having imidazolium-based cation head groups, anions and alkyl tail groups, each alkyl tail group comprising a chain of hydrocarbons, and wherein each hydrocarbon in the chain of hydrocarbons comprises a plurality of methyl groups (CH 3 ) bound to a carbon (C) atom; and depositing the solution onto a surface of the substrate, wherein the ILCs self-assemble on the surface of the substrate to form a nanopore/rod structure having alternating head groups and tail groups, wherein the imidazolium-based cation head groups and the anions of the ILCs segregate to the head groups to form a plurality of rods within the nanopore/rod structure, with the alkyl tail groups oriented around the plurality of rods.

11 . The method of claim 10 , wherein the imidazolium-based cation head groups are of the form: 1-R 1 -3-R 2 -imidazolium, where R 1 is an alkyl chain with a chain length ranging from 8-18 hydrocarbons, and R 2 is a hydrogen, methyl, ethyl, propyl, butyl, substituted or unsubstituted phenyl, or other hydrocarbon group.

12 . The method of claim 10 , wherein the imidazolium-based cation head groups comprise 1-dodecyl-3-methylimidazolium.

13 . The method of claim 10 , wherein the anions comprise tetrafluoroborate (BF 4 − ), chloride (Cl − ), acetate (CH 3 COO − ), hexafluorophosphate (PF 6 − ), trifluoromethyl acetate (C 3 H 3 F 3 O 2 ), nitrate (NO 3 − ), dicyanamide (C 2 HN 3 − ), tetracyanoborate(B(CN) 4 − ), trifluoromethane sulfonate (CF 3 O 3 S − ), bis((trifluoromethyl)sulfonyl)imdide ([(CF 3 SO 2 ) 2 N] − ), tetrachloroaluminate ([AlCl 4 ] − ), heptachlorodialuminate ([Al 2 Cl 7 ] − ), decachlorotrialuminate ([Al 3 Cl 10 ] − ), tridecachlorotetraaluminate ([Al 4 Cl 13 ] − ), tetrachloroferrate (Cl 4 Fe − ), trichlorostannate ([SnCl 3 ]—), pentachlorodistannate ([Sn 2 Cl 5 ] − ), tetrachloroindate ([InCl 4 ]—), nonachlorodititanate ([Ti 2 Cl 9 ]—), nonachlorodizirconate ([Zr 2 Cl 9 ]—), nonachlorodihafnate ([Hf 2 Cl 9 ]—), tetrachloroaurate ([AuCl 4 ]—), tetrachlorogallate ([GaCl 4 ]—), heptachlorodigallate ([Ga 2 Cl 7 ]—), decachlorotrigallate ([Ga 3 Cl 10 ]—), trichloroplumbate ([PbCl 3 ]—), pentachloridoindate ([InCl 5 ] 2− ), tetrachlorozincate ([ZnCl 4 ] 2− ), hexachlorodizincate ([Zn 2 Cl 6 ] 2− ), hexachlorotitanate ([TiCl 6 ] 2− ), hexachlorozirconate ([ZrCl 6 ] 2− ), decachlorodizirconate ([Zr 2 Cl 10 ] 2− ), hexachlorohafnate ([HfCl 6 ] 2− ), decachlorodihafnate ([Hf 2 Cl 10 ] 2− ), tetrachloromanganate ([MnCl 4 ] 2− ), tetrachloroferrate ([FeCl 4 ] 2− ), tetrachlorocobaltate ([CoCl 4 ] 2− ), tetrachloronicklate ([NiCl 4 ] 2− ), tetrachloropaladate ([PdCl 4 ] 2− ), tetrachloroplatinate ([PtCl 4 ] 2− ), tetrachlorocuprate ([CuCl 4 ] 2− ), octachlorotrizincate ([Zn 3 Cl 8 ] 2− ), decachlorotetrazincate ([Zn 4 Cl 10 ] 2− ), tetrachlorocadmate ([CdCl 4 ] 2− ), hexachlorodicadmate ([Cd 2 Cl 6 ] 2− ), tetrachloromercurate ([HgCl 4 ] 2− ), or tetrachloroplumbate ([PbCl 4 ] 2− ).

14 . The method of claim 10 , wherein the ILCs comprise 1-dodecyl-3-methylimidazolium tetrafluoroborate.

Assignees

• Tokyo Electron Ltd

Inventors

• Aryal Dipak
• Abel Kate
• Rotondaro Antonio Luis Pacheco
• Nakano Takeo
• Morimoto Tamotsu

Classifications

• B82Y20/00

  Nanooptics, e.g. quantum optics or photonic crystals · CPC title

• B82Y30/00

  Nanotechnology for materials or surface science, e.g. nanocomposites · CPC title

• G02F1/13613

  the semiconductor element being formed on a first substrate and thereafter transferred to the final cell substrate · CPC title

• C09K2019/0414

  containing a heterocyclic ring · CPC title

• C09K19/404 Primary

  containing boron or phosphorus · CPC title