Semiconductor processing tool and methods of operation

Patent metadata

Field	Value
Publication number	US-2025364222-A1
Application number	US-202519293135-A
Country	US
Kind code	A1
Filing date	Aug 7, 2025
Priority date	Apr 21, 2022
Publication date	Nov 27, 2025
Grant date	—

Abstract

Some implementations described herein provide techniques and apparatuses for overcoming forces that may deflect an end portion of an injector nozzle into an interior wall of a thin-film furnace. The implementations include a fixture that is coupled to the end portion of the injector nozzle. The fixture is configurable to lock to a selected property of the end portion to maintain, between the end portion and the interior wall, a gap. In this way, the end portion is prevented from colliding with the interior wall and dislodging particulates that may contaminate semiconductor product fabricated using the thin-film furnace.

First claim

What is claimed is:

1 . A device, comprising:
a first blade region comprising a first cavity having a first shape; a second blade region comprising a second cavity having a second shape,
wherein the second cavity faces the first cavity; and
a locking component to lock at a dimension of an end portion of an injector nozzle of a processing chamber of a deposition tool,
wherein the processing chamber comprises an interior wall and a gas inlet passing through the interior wall, and
wherein the injector nozzle extends from the gas inlet along a path that is approximately parallel to the interior wall.

2 . The device of claim 1 , wherein the device maintains a gap between the end portion and the interior wall.

3 . The device of claim 1 , wherein the dimension is a diameter of a cross-section of the end portion of the injector nozzle.

4 . The device of claim 1 , wherein the dimension is equal to a distance from a first apex of the first cavity to a second apex of the second cavity.

5 . The device of claim 1 , further comprising:
a forcing component to create a force that compresses the end portion between the first cavity and the second cavity.

6 . The device of claim 5 , wherein the forcing component comprises an elastic forcing component.

7 . The device of claim 5 , wherein the forcing component comprises a pneumatic cylinder.

8 . A device, comprising:
a first arm comprising a first blade region,
wherein the first blade region comprises a first cavity having a first shape that approximates a first portion of an exterior surface of an injector nozzle for a deposition tool;
a second arm comprising a second blade region,
wherein the second blade region comprises a second cavity having a second shape that approximates a second portion of the exterior surface of the injector nozzle for the deposition tool, and
wherein the second blade region and the second cavity oppose the first blade region and the first cavity;
a fulcrum connecting the first arm to the second arm; and a locking component to fix a distance between the first cavity and the second cavity.

9 . The device of claim 8 , wherein the first shape of the first cavity comprises one or more curved portions.

10 . The device of claim 8 , wherein the first shape of the first cavity comprises one or more linear portions.

11 . The device of claim 8 , wherein the locking component comprises a buckle component, and
wherein the buckle component fixes the distance between the first cavity and the second cavity.

12 . The device of claim 11 , further comprising a capture pin,
wherein the buckle component comprises one or more crenulations configured to be captured by the capture pin.

13 . The device of claim 12 , wherein the one or more crenulations comprise a plurality of crenulations spaced apart from each other at a same pitch.

14 . The device of claim 12 , wherein the one or more crenulations comprise a plurality of crenulations spaced apart from each other at different pitches.

15 . The device of claim 8 , further comprising
an elastic forcing component to create, in the first arm and the second arm, respective moment forces about the fulcrum,
wherein the respective moment forces translate into a clamping force between the first cavity and the second cavity.

16 . A device, comprising:
a portion that engages with an injector nozzle of a processing chamber of a deposition tool; and a locking component configured to lock the portion at a dimension of the injector nozzle to maintain a gap between the injector nozzle and an interior wall of the processing chamber.

17 . The device of claim 16 , wherein the portion that engages with the injector nozzle comprises:
a first blade region comprising a first cavity; and a second blade region comprising a second cavity.

18 . The device of claim 17 , wherein the dimension is equal to a distance from a first apex of the first cavity to a second apex of the second cavity.

19 . The device of claim 16 , wherein the locking component comprises:
a capture pin; and one or more crenulations configured to receive the capture pin.

20 . The device of claim 19 , wherein the one or more crenulations comprise a plurality of crenulations spaced apart from each other at different pitches.

Assignees

• Taiwan Semiconductor Mfg Co Ltd

Inventors

• Ho Yi Chen
• Liao Chih Ping
• Yang Shih Hao
• Wang Wei-Ming
• Lin Chien Ting
• Yang Jie-Ying
• Tang Chih-Che
• Teng Kuo Kang
• Yu Ming-Hui
• Liao Ker-Hsun
• Lin Chi-Hsun

Classifications

• C23C16/52

  Controlling or regulating the coating process {(C23C16/45557, C23C16/279 take precedence)} · CPC title

• C23C16/45591

  Fixed means, e.g. wings, baffles · CPC title

• H01J2237/3321

  CVD [Chemical Vapor Deposition] · CPC title

• C23C16/45578

  Elongated nozzles, tubes with holes · CPC title

• H01J37/32449 Primary

  Gas control, e.g. control of the gas flow · CPC title