Stabilized interfaces of inorganic radiation patterning compositions on substrates

Patent metadata

Field	Value
Publication number	US-2025298317-A1
Application number	US-202519229740-A
Country	US
Kind code	A1
Filing date	Jun 5, 2025
Priority date	Jul 12, 2019
Publication date	Sep 25, 2025
Grant date	—

Abstract

A method is described for stabilizing organometallic coating interfaces through the use of multilayer structures that incorporate an underlayer coating. The underlayer is composed of an organic polymer that has crosslinking and adhesion-promoting functional groups. The underlayer composition may include photoacid generators. Multilayer structures for patterning are described based on organometallic radiation sensitive patterning compositions, such as alkyl tin oxo hydroxo compositions, which are placed over a polymer underlayer.

First claim

What is claimed is:

1 . A method of improving the adhesion between a substrate and an organometallic resist coating that is radiation sensitive, the method comprising:
depositing an organometallic radiation sensitive coating comprising a radiation sensitive ligand bonded to a tin atom onto a surface of a structure to cover at least a portion of the surface, wherein the structure comprises a substrate and a stabilization coating on the substrate, wherein at least a portion of the surface is formed by the stabilization coating, and wherein the stabilization coating comprises a polymer composition comprising repeat units, wherein the repeat units comprise adhesion-promoting moieties having adhesion-promoting side chains.

2 . The method of claim 1 wherein the radiation sensitive ligand comprises a carbon atom bonded to the tin.

3 . The method of claim 1 wherein the stabilization coating has an average thickness from about 1 nm to about 50 nm.

4 . The method of claim 3 wherein the thickness of the stabilization coating varies less than about 25% from the average thickness of the stabilization coating.

5 . The method of claim 1 wherein the repeat units are formed from monomers comprising functionalized styrenes, functionalized acrylates, functionalized vinyl ketones, functionalized acrylamides, functionalized urethane acrylates, functionalized phenolic resins, or from other functionalized vinyl monomers, or combinations thereof, wherein the adhesion-promoting side chains are terminally functionalized with an amine, an imine, an imide, an oxime, a carboxylic amide, a carboxylic acid, a thiol, a thiocarboxylic acid, a dithiocarboxylic acid, a sulfonium salt, a photolabile moiety, or combinations thereof.

6 . The method of claim 1 wherein the polymer composition is crosslinked.

7 . The method of claim 1 wherein the polymer composition further comprises crosslinking-promoting repeat units with side-chain crosslinking moieties and/or polymers with end-chain crosslinking moieties, wherein the crosslinking-promoting repeat units are formed from monomers comprising functionalized acrylates, functionalized vinyl ketones, functionalized acrylamides, or from other functionalized vinyl monomers, or mixtures thereof, wherein the side-chain crosslinking moieties may be terminally functionalized with a hydroxide, an ether, a glycidyl, an epoxide, a methoxymethyl urea, an acrylate, or combinations thereof.

8 . The method of claim 1 further comprising exposing the multilayer structure to a dose of radiation according to a selected pattern, wherein the adhesion-promoting moieties comprise photolabile moieties.

9 . The method of claim 1 wherein the multilayer structure is exposed to extreme ultraviolet radiation at a dose of radiation of no more than 100 mJ/cm 2 or with an electron beam at a dose of no more than 2 mC/cm 2 at 30 kV.

10 . The method of claim 1 wherein there are regions of lower adhesion and regions of higher adhesion according to a selected pattern.

11 . The method of claim 1 wherein the depositing comprises vapor deposition.

12 . The method of claim 1 wherein the depositing comprises solution deposition.

13 . The method of claim 1 further comprising heat treating the as deposited coating in an atmosphere with a source compound to hydrolyze the as deposited coating to form an oxo-hydroxo network.

14 . The method of claim 13 wherein the oxo-hydroxo network comprises an organotin oxide hydroxide, approximately represented by the formula R z SnO (2-z/2-x/2) (OH) x , where 0<x<3, 0<z≤2, x+z≤4, and R is a hydrocarbyl group forming a carbon bond with the tin atom.

15 . The method of claim 1 wherein the substrate comprises a silicon wafer, silica substrate, other inorganic material, a polymer sheet, and combinations thereof.

16 . A method for forming a patterned coating material, the method comprising:
developing a multilayer coating to remove a first portion of a radiation patterned resist coating comprising metal atoms with a conjugate portion of the radiation patterned resist coating remaining after removal of the first portion, wherein the conjugate portion is located at least in part over a stabilization coating comprising repeat units, wherein the repeat units comprise adhesion-promoting moieties having adhesion-promoting side chains providing desired adhesion interactions with the conjugate portion of the radiation patterned resist coating.

17 . The method of claim 16 wherein the repeat units are formed from monomers comprising functionalized styrenes, functionalized acrylates, functionalized vinyl ketones, functionalized acrylamides, functionalized urethane acrylates, functionalized phenolic resins, or from other functionalized vinyl monomers, or combinations thereof, and wherein the adhesion-promoting side-chains are terminally functionalized with an amine, an imine, an imide, an oxime, a carboxylic amide, a carboxylic acid, a thiol, a thiocarboxylic acid, a dithiocarboxylic acid, a sulfonium salt, a photolabile moiety, or combinations thereof.

18 . The method of claim 17 wherein the photolabile moiety comprises sulfonium sulfonate, iodonium sulfonate, N-sulfonic imide, or N-sulfonic imine, or combinations thereof.

19 . The method of claim 16 wherein the developing step comprises simultaneously removing a portion of the stabilization coating corresponding with the removed first portion of the radiation patterned resist coating.

20 . The method of claim 16 further comprising removing a portion of the stabilization coating corresponding to the removed first portion of the radiation patterned resist coating after the developing step.

21 . The method of claim 16 wherein the first portion of the radiation patterned resist coating comprises irradiated material and wherein the adhesion-promoting side-chains comprise a photolabile moiety.

22 . The method of claim 16 further comprising forming the multilayer coating prior to the developing step, wherein the forming comprises depositing an organometallic radiation sensitive coating comprising a radiation sensitive ligand bonded to a tin atom onto a surface of a structure to cover at least a portion of the surface, wherein the structure comprises a substrate and a stabilization coating on the substrate, wherein at least a portion of the surface is formed by the stabilization coating, and wherein the stabilization coating comprises a polymer composition comprising repeat units, wherein the repeat units comprise adhesion-promoting moieties having adhesion-promoting side chains.

Assignees

• Inpria Corp

Inventors

• Cardineau Brian J
• Chang Shu-Hao
• Stowers Jason K
• Kocsis Michael
• De Schepper Peter

Classifications

• G03F7/2004

  characterised by the use of a particular light source, e.g. fluorescent lamps or deep UV light · CPC title

• G03F7/167

  from the gas phase, by plasma deposition (G03F7/2035 takes precedence) · CPC title

• G03F7/2037

  Exposure with X-ray radiation or corpuscular radiation, through a mask with a pattern opaque to that radiation · CPC title

• G03F7/322

  Aqueous alkaline compositions · CPC title

• G03F7/168

  Finishing the coated layer, e.g. drying, baking, soaking · CPC title