Charged Particle Beam System

Patent metadata

Field	Value
Publication number	US-2025253116-A1
Application number	US-202519046859-A
Country	US
Kind code	A1
Filing date	Feb 6, 2025
Priority date	Feb 7, 2024
Publication date	Aug 7, 2025
Grant date	—

Abstract

There is provided a charged particle beam system into which a sample can be easily introduced. The charged particle beam system includes a sample holder for holding the sample; a body portion equipped both with an optical system for irradiating the sample with a charged particle beam and with a holder support portion having an insertion port into/from which the sample holder can be inserted and removed; and a housing containing the body portion. The housing is provided both with a recessed portion and with an opening portion permitting the sample holder to gain access to the insertion port, the recessed portion having a bottom where the opening portion is formed. The housing also has a lighting device for illuminating the bottom of the recessed portion.

First claim

What is claimed is:

1 . A charged particle beam system comprising;
a sample holder for holding a sample; a body portion equipped both with an optical system for irradiating the sample with a charged particle beam and with a holder support portion having an insertion port into/from which the sample holder can be inserted and removed; and a housing containing the body portion; wherein the housing is provided both with a recessed portion and with an opening portion permitting the sample holder to gain access to the insertion port, the recessed portion having a bottom where the opening portion is formed; and wherein the housing has a lighting device for illuminating the bottom of the recessed portion.

2 . The charged particle beam system as set forth in claim 1 , wherein said recessed portion is shaped in the form of a truncated cone which increases in cross-sectional area from the bottom of the recessed portion toward the opening portion of the recessed portion.

3 . The charged particle beam system as set forth in claim 1 ,
wherein said housing comprises both a first member defining a side surface of said recessed portion and a second member defining the bottom of the recessed portion and provided with said opening portion, a clearance being formed between the first member and the second member; and wherein the bottom of the recessed portion is illuminated with light leaking from the clearance.

4 . The charged particle beam system as set forth in claim 3 , wherein said lighting device comprises a plurality of light-emitting devices whose output light is made to impinge on the bottom of said recessed portion through said clearance.

5 . The charged particle beam system as set forth in claim 1 , wherein said lighting device comprises a plurality of light-emitting devices which are arranged around the bottom of said recessed portion.

6 . The charged particle beam system as set forth in claim 1 , wherein said lighting device comprises a first light-emitting device and a second light-emitting device between which the bottom of said recessed portion is located.

7 . The charged particle beam system as set forth in claim 1 , wherein said lighting device comprises a plurality of light-emitting devices, and wherein said housing comprises a shielding member that shields the plurality of light-emitting devices.

8 . The charged particle beam system as set forth in claim 1 , further comprising a controller for controlling said lighting device based on a manner in which said sample holder has been inserted.

9 . The charged particle beam system as set forth in claim 8 , wherein said controller controls at least one of color and intensity of light emitted by said lighting device based on the manner in which said sample holder has been inserted.

10 . The charged particle beam system as set forth in claim 9 , wherein when pre-evacuation in preparation for introduction of said sample into the sample chamber is completed, said controller varies at least one of the color and intensity of the light emitted by said lighting device.

11 . The charged particle beam system as set forth in claim 1 , further comprising a controller for controlling said lighting device based on the state of said body portion.

12 . The charged particle beam system as set forth in claim 1 , wherein said housing comprises a touch panel responsive to manipulations by a user, and wherein the touch panel is mounted on a side surface of the housing where said recessed portion is formed.

Assignees

• Jeol Ltd

Inventors

• Ikeda Yuta
• Matsuzaki Mizuki
• Yamazaki Yuji
• Yamada Shota
• Oyama Yoshiki

Classifications

• H01J2237/2007

  Holding mechanisms · CPC title

• H01J2237/2002

  Controlling environment of sample · CPC title

• H01J37/16 Primary

  Vessels; Containers · CPC title