Method for cleaning an apparatus for a tin compound and the cleaned apparatus obtained thereby

Patent metadata

Field	Value
Publication number	US-2025222496-A1
Application number	US-202419000257-A
Country	US
Kind code	A1
Filing date	Dec 23, 2024
Priority date	Jan 5, 2024
Publication date	Jul 10, 2025
Grant date	—

Abstract

A method for efficiently and safely cleaning an apparatus for tin compound and a highly purified tin compound apparatus are provided. A cleaning method for an apparatus that has been in contact with a tin compound having formula (1) below includes at least steps (A) to (C), in which step (B) is performed after step (A), and step (C) is performed after step (B):
(A) a step of cleaning the apparatus with a non-protic solvent, (B) a step of cleaning the apparatus with alcohol, and (C) a step of cleaning the apparatus with ultrapure water having a resistivity value of 17 MΩ·cm at 25° C.

R p SnX m   (1)

In formula (1), R is a hydrocarbon group, p is an integer from 1 to 3, X is a hydrolyzable substituent, and m=4−p.

First claim

We claim:

1 . A method for cleaning an apparatus that has come into contact with a tin compound having formula (1), the method comprising at least steps (A) to (C), wherein step (B) is performed after step (A), and step (C) is performed after step (B):
(A) a step of cleaning the apparatus with a non-polar solvent, (B) a step of cleaning the apparatus with an alcohol, and (C) a step of cleaning the apparatus with ultrapure water having a resistivity of 17 MΩ·cm at 25° C.;
R p SnX m   (1)

wherein R is a hydrocarbon group, p is an integer from 1 to 3, X is a hydrolysable substituent group, and m=4−p.

2 . The method for cleaning an apparatus according to claim 1 , further comprising a step of cleaning the device with an acidic aqueous solution following the step of cleaning with an alcohol.

3 . The method for cleaning an apparatus according to claim 1 , wherein the non-polar solvent comprises at least one solvent selected from the group consisting of aromatic hydrocarbons, aliphatic hydrocarbons, saturated cyclic hydrocarbons, esters, linear ethers, and cyclic ethers.

4 . The method for cleaning an apparatus according to claim 1 , wherein the number of carbon atoms in the alcohol is 1 to 12.

5 . The method for cleaning an apparatus according to claim 2 , wherein the acidic aqueous solution is at least one solution selected from the group consisting of a hydrofluoric acid aqueous solution and a nitric acid aqueous solution.

6 . The method for cleaning an apparatus according to claim 1 , further comprising a drying step after the step of cleaning with ultrapure water.

7 . The method for cleaning an apparatus according to claim 1 , wherein the tin compound having formula (1) is t-butyltris(dimethylamino)tin, n-butyltris (dimethylamino)tin, t-butyltris(diethylamino)tin, di-t-butylbis (dimethylamino)tin, sec-butyltris (dimethylamino)tin, n-pentyltris (dimethylamino)tin, isobutyltris (dimethylamino)tin, isopropyltris (dimethylamino)tin, t-butyltri-t-butoxytin, n-butyltri-t-butoxytin, isopropyltri-t-butoxytin, isopropyltri-t-amyloxytin, t-butyltri-t-amyloxytin, 1-methyl-1-cyclopentyltris (dimethylamino)tin, or 1-methyl-1-cyclopentyltri-t-butoxytin.

8 . An apparatus that has come into contact with the tin compound having formula (1) and has been cleaned by the method according to claim 1 .

9 . The apparatus according to claim 8 , wherein when ultrapure water with a resistivity of 17 MΩ·cm at 25° C. is filled into the apparatus and left at 25° C. for 1 hour, an increase in the amount of dissolved halogen ions in the water is 100 mass ppb or less, an increase in the amount of each metal element sodium, potassium, magnesium, iron, chromium, and nickel is 1.5 mass ppb or less, and an increase in the amount of particles with a diameter of 0.5 μm or more is 100 particles/mL or less.

10 . The apparatus according to claim 8 , wherein when the tin compound having formula (1) is placed in the apparatus, sealed under an inert gas atmosphere, and stored at 25° C. for 3 months, a decrease in the purity of the tin compound is 0.1 mass % or less.

11 . The apparatus according to claim 8 , wherein the apparatus is a container for storing a tin compound.

12 . The apparatus according to claim 8 , wherein when the apparatus vacuum-dried and then filled with a gas with a pressure of 10 kPa, a valve seat leakage at a joint part measured by a gas detection device is 5×10 −9 Pa·m 3 /s or less.

13 . An apparatus for a tin compound, wherein when ultrapure water with a resistivity of 17 MΩ·cm at 25° C. is filled into the apparatus and left at 25° C. for 1 hour, an increase in an amount of dissolved halogen ions in the water is 100 mass ppb or less, and a content of metal elements other than tin is 1.5 mass ppb or less.

14 . An apparatus for a tin compound, wherein when ultrapure water with a resistivity of 17 MΩ·cm at 25° C. is filled into the apparatus and left at 25° C. for 1 hour an increase in the amount of particles with a diameter of 0.5 μm or more is 100 particles/mL or less.

Assignees

• Mitsubishi Chem Corp
• Gelest Inc
• Taiyo Nippon Sanso Corp

Inventors

• Ishii Koki
• Fukui Hiroshi
• Kameoka Takashi
• Yang Li

Classifications

• C11D7/5027

  Hydrocarbons · CPC title

• C11D7/5022

  containing oxygen · CPC title

• C11D7/08

  Acids · CPC title

• B08B2209/08

  Details of machines or methods for cleaning containers, e.g. tanks · CPC title

• G03F7/0012

  Processes making use of the tackiness of the photolithographic materials, e.g. for mounting; Packaging for photolithographic material; Packages obtained by processing photolithographic materials · CPC title