Methods and apparatus for vapor pressure monitoring

Patent metadata

Field	Value
Publication number	US-2025189396-A1
Application number	US-202418744884-A
Country	US
Kind code	A1
Filing date	Jun 17, 2024
Priority date	Jun 20, 2023
Publication date	Jun 12, 2025
Grant date	—

Abstract

Various embodiments of the present technology may provide methods and apparatus for vapor pressure monitoring in a semiconductor manufacturing tool. The apparatus may include a vessel containing a chemistry and a outlet connected to a gas line, wherein the gas line includes a first section that is connected to a reactor and second section that is connected an exhaust port. The gas line may also include a third section connected to a pressure sensor.

First claim

What is claimed is:

1 . An apparatus, comprising:
a gas line; a metal body surrounding a segment of the gas line, wherein the metal body comprises:
a heater rod embedded within the metal body; and
a first thermocouple connected to the metal body; and
an insulator surrounding a portion of the metal body.

2 . The apparatus according to claim 1 , wherein a portion of the heater rod extends outside the metal body.

3 . The apparatus according to claim 2 , wherein the insulator surrounds the portion of the heater rod that extends outside the metal body.

4 . The apparatus according to claim 1 , wherein the insulator is separated from the metal body by an air gap.

5 . The apparatus according to claim 1 , wherein the gas line extends through the insulator.

6 . The apparatus according to claim 1 , wherein the metal body is formed from stainless steel.

7 . The apparatus according to claim 1 , wherein the metal body further comprises a second thermocouple.

8 . The apparatus according to claim 1 , wherein the metal body further comprises a second thermocouple and wherein the first thermocouple is arranged at a first side of the metal body and the second thermocouple is arranged at a second side of the metal body, opposite the first side.

9 . An apparatus, comprising:
a first cabinet comprising a first wall having a first through-hole; a second cabinet disposed within the first cabinet and comprising a second wall in parallel with the first wall, wherein the second wall comprises a second through-hole aligned with the first through-hole; a gas line system comprising a feedthrough device disposed and extending through the first and second through-holes, the feedthrough device comprising:
a gas line;
a metal body surrounding a segment of the gas line, wherein the metal body comprises:
a heater rod comprising a first section embedded within the metal body and a second section extending outside the metal body; and
a first thermocouple connected to the metal body; and

an insulator surrounding a portion of the metal body and the second section of the heater rod.

10 . The apparatus according to claim 9 , wherein the metal body further comprises a second thermocouple.

11 . The apparatus according to claim 9 , wherein the metal body is formed from stainless steel.

12 . The apparatus according to claim 9 , wherein the insulator comprises polyether ether ketone (PEEK).

13 . The apparatus according to claim 9 , wherein the second cabinet is separated from the first cabinet by an air gap.

14 . The apparatus according to claim 9 , further comprising a pressure sensor coupled to the gas line and disposed outside of the first cabinet.

15 . A system, comprising:
a reactor; a first cabinet comprising a first wall having a first through-hole; a second cabinet disposed within the first cabinet and comprising a second wall in parallel with the first wall, wherein the second wall comprises a second through-hole aligned with the first through-hole, wherein the second cabinet is separated from the first cabinet by an air gap; a vessel disposed within the second cabinet; and a gas line connected to the vessel and disposed within the first and second through-holes comprising:
a first section connected to the reactor;
a second section connected to an exhaust port; and
a third section connected to a pressure sensor, wherein the third section extends through the first and second enclosures, and the pressure sensor is disposed outside of the second enclosure.

16 . The system according to claim 15 , wherein the third section comprises a feedthrough device disposed and extending through the first and second through-holes, the feedthrough device comprising:
a gas line; and a metal body surrounding a segment of the gas line.

17 . The system according to claim 16 , wherein the metal body comprises:
a heater rod comprising a first section embedded within the metal body and a second section extending outside the metal body; and a first thermocouple connected to the metal body.

18 . The system according to claim 17 , further comprising an insulator surrounding a portion of the metal body and the second section of the heater rod, wherein the insulator comprises polyether ether ketone.

19 . The system according to claim 17 , wherein the metal body further comprises a second thermocouple opposite the first thermocouple.

20 . The system according to claim 15 , wherein the metal body is formed from stainless steel.

Assignees

• Asm Ip Holding Bv

Inventors

• Waykole Nirmal Gokuldas
• Qi Qi
• Kedia Shreyans

Classifications

• G01L19/0038 Primary

  being part of the housing (other details about the housing G01L19/14) · CPC title

• G01L2019/0053

  Pressure sensors associated with other sensors, e.g. for measuring acceleration, temperature · CPC title

• G01L23/26 Primary

  Details or accessories · CPC title

• G01L21/14

  using thermocouples · CPC title

• G01L19/0007

  Fluidic connecting means · CPC title