Electrostatic chuck
US-2023142870-A1 · May 11, 2023 · US
Electrostatic chuck
US2025174484A1 · US · A1
| Field | Value |
|---|---|
| Publication number | US-2025174484-A1 |
| Application number | US-202418955571-A |
| Country | US |
| Kind code | A1 |
| Filing date | Nov 21, 2024 |
| Priority date | Nov 27, 2023 |
| Publication date | May 29, 2025 |
| Grant date | — |
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- Title
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- Abstract
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Abstract
Official abstract text for this publication.
An electrostatic chuck 10 includes a dielectric substrate 100 , a base plate 200 which supports the dielectric substrate 100 , and a joining layer 300 which joins the dielectric substrate 100 and the base plate 200 . A value of a dielectric tangent of the joining layer 300 when a temperature of the joining layer 300 is 20° C. is set as a reference value. In the electrostatic chuck 10 , when the temperature of the joining layer 300 has changed from 20° C. to −60° C., a range in which the value of the dielectric tangent of the joining layer 300 fluctuates falls within a range from 50% to 200% of the reference value.
First claim
Opening claim text (preview).
1 . An electrostatic chuck comprising: a dielectric substrate; a base plate which supports the dielectric substrate; and a joining layer which joins the dielectric substrate and the base plate, wherein in a case where a value of a dielectric tangent of the joining layer when a temperature of the joining layer is 20° C. is set as a reference value, when the temperature of the joining layer has changed from 20° C. to −60° C., a range in which the value of the dielectric tangent of the joining layer fluctuates falls within a range from 50% to 200% of the reference value. 2 . The electrostatic chuck according to claim 1 , wherein when the temperature of the joining layer has changed from 20° C. to −60° C., the range in which the value of the dielectric tangent of the joining layer fluctuates falls within a range from 90% to 110% of the reference value. 3 . The electrostatic chuck according to claim 1 , wherein when the temperature of the joining layer is within a range from 20° C. to −60° C., the value of the dielectric tangent of the joining layer is lower than 0.0008. 4 - 11 . (canceled)
Assignees
Inventors
Classifications
- H10P72/722Primary
Details of electrostatic chucks · CPC title
characterised by a coating, a hardness or a material · CPC title
using electrostatic chucks · CPC title
mainly by convection · CPC title
for etching · CPC title
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Frequently asked questions
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- What does patent US2025174484A1 cover?
- An electrostatic chuck 10 includes a dielectric substrate 100 , a base plate 200 which supports the dielectric substrate 100 , and a joining layer 300 which joins the dielectric substrate 100 and the base plate 200 . A value of a dielectric tangent of the joining layer 300 when a temperature of the joining layer 300 is 20° C. is set as a reference value. In the electrostatic chuc…
- Who is the assignee on this patent?
- Toto Ltd
- What technology area does this patent fall under?
- Primary CPC classification H10P72/722. Mapped technology areas include Electricity.
- When was this patent published?
- Publication date Thu May 29 2025 00:00:00 GMT+0000 (Coordinated Universal Time) (A1). Legal status and post-grant events are not shown on this page.
- What related patents are in patentsdb?
- We list 4 related publications on this page (citations in our corpus or others sharing the same primary CPC).