Substrate processing apparatus including substrate support unit

Patent metadata

Field	Value
Publication number	US-2025140531-A1
Application number	US-202418826134-A
Country	US
Kind code	A1
Filing date	Sep 5, 2024
Priority date	Oct 26, 2023
Publication date	May 1, 2025
Grant date	—

Abstract

Disclosed is a substrate processing apparatus including a substrate support unit. The substrate support unit supports a substrate, has at least one pin hole formed vertically therethrough, and accommodates a lift pin therein so as to allow the lift pin to ascend and descend through the pin hole. The substrate support unit includes a ceramic puck on which the substrate is seated, a base plate configured to support the ceramic puck, an adhesive layer for coupling between the ceramic puck and the base plate, and a bush provided around the pin hole. The bush includes a first bush having a tube shape and a second bush coupled to an outer peripheral surface of the first bush, and the first bush includes a protruding portion formed on an upper surface thereof.

First claim

What is claimed is:

1 . A substrate support unit for supporting a substrate, the substrate support unit including at least one pin hole formed vertically therethrough and accommodating a lift pin therein so as to allow the lift pin to ascend and descend through the at least one pin hole, the substrate support unit comprising:
a ceramic puck configured to allow the substrate to be seated thereon; a base plate configured to support the ceramic puck; an adhesive layer for coupling between the ceramic puck and the base plate; and a bush provided around the at least one pin hole, wherein the bush comprises: a first bush having a tube shape; and a second bush coupled to an outer peripheral surface of the first bush, and wherein the first bush comprises a protruding portion formed on an upper surface of the first bush.

2 . The substrate support unit according to claim 1 , wherein the protruding portion protrudes from the upper surface of the first bush to a predetermined height in a longitudinal direction of the first bush, and is coupled to a concave portion formed in a lower surface of the ceramic puck.

3 . The substrate support unit according to claim 1 , further comprising a bonding layer to couple the bush to the substrate support unit.

4 . The substrate support unit according to claim 1 , further comprising a coating layer formed between the adhesive layer and the base plate.

5 . The substrate support unit according to claim 1 , wherein the second bush is coupled to the base plate and the first bush in a state of being inserted into a recess formed in the base plate.

6 . The substrate support unit according to claim 1 , wherein the second bush is not exposed to the at least one pin hole.

7 . The substrate support unit according to claim 1 , wherein the first bush comprises a lower region and an upper region formed on the lower region, and
wherein the second bush is coupled to the lower region of the first bush in a fit manner.

8 . The substrate support unit according to claim 3 , wherein the bonding layer is formed on an upper surface of the first bush, the outer peripheral surface of the first bush, and an upper surface of the second bush coupled to the first bush.

9 . A substrate processing apparatus comprising:
a chamber comprising a processing space defined therein; a substrate support unit disposed in the processing space to support a substrate, the substrate support unit comprising at least one pin hole formed vertically therethrough and accommodating a lift pin therein so as to allow the lift pin to ascend and descend through the at least one pin hole; a gas supply unit configured to supply gas to the processing space; a plasma generation unit configured to convert the supplied gas into plasma; and a controller configured to control the gas supply unit and the plasma generation unit, wherein the substrate support unit comprises: a ceramic puck configured to allow the substrate to be seated thereon; a base plate configured to support the ceramic puck; an adhesive layer for coupling between the ceramic puck and the base plate; and a bush provided around the at least one pin hole, wherein the bush comprises: a first bush having a tube shape; and a second bush coupled to an outer peripheral surface of the first bush, and wherein the first bush comprises a protruding portion formed on an upper surface of the first bush.

10 . The substrate processing apparatus according to claim 9 , wherein the protruding portion protrudes from the upper surface of the first bush to a predetermined height in a longitudinal direction of the first bush, and is coupled to a concave portion formed in a lower surface of the ceramic puck.

11 . The substrate processing apparatus according to claim 9 , wherein the substrate support unit further comprises a bonding layer to couple the bush to the substrate support unit.

12 . The substrate processing apparatus according to claim 9 , further comprising a coating layer formed between the adhesive layer and the base plate.

13 . The substrate processing apparatus according to claim 9 , wherein the second bush is coupled to the base plate and the first bush in a state of being inserted into a recess formed in the base plate.

14 . The substrate processing apparatus according to claim 9 , wherein the second bush is not exposed to the at least one pin hole.

15 . The substrate processing apparatus according to claim 11 , wherein the bonding layer is formed on the upper surface of the first bush, an outer peripheral surface of the first bush, and an upper surface of the second bush coupled to the first bush.

16 . A substrate processing apparatus comprising:
a chamber comprising a processing space defined therein; a substrate support unit disposed in the processing space to support a substrate, the substrate support unit comprising at least one pin hole formed vertically therethrough and accommodating a lift pin therein so as to allow the lift pin to ascend and descend through the at least one pin hole; a gas supply unit configured to supply gas to the processing space; a plasma generation unit configured to convert the supplied gas into plasma; and a controller configured to control the gas supply unit and the plasma generation unit, wherein the substrate support unit comprises: a ceramic puck configured to allow the substrate to be seated thereon; a base plate configured to support the ceramic puck; an adhesive layer for coupling between the ceramic puck and the base plate; and a bush provided around the at least one pin hole, wherein the bush comprises: a first bush having a tube shape, the first bush being coupled to the ceramic puck, the adhesive layer, and the base plate; and a second bush coupled to an outer peripheral surface of the first bush and the base plate, wherein the first bush comprises: a lower region; an upper region formed on the lower region; and a protruding portion formed on an upper surface of the upper region, and wherein the first bush is integrally coupled to the ceramic puck in such a manner that the protruding portion is inserted into a concave portion formed in a lower surface of the ceramic puck.

17 . The substrate processing apparatus according to claim 16 , wherein the substrate support unit further comprises a bonding layer to couple the bush to the substrate support unit.

18 . The substrate processing apparatus according to claim 16 , further comprising a coating layer formed between the adhesive layer and the base plate.

19 . The substrate processing apparatus according to claim 16 , wherein the second bush is coupled to the base plate and the first bush in a state of being inserted into a recess formed in the base plate.

20 . The substrate processing apparatus according to claim 19 , wherein the second bush has an annular ring shape, and is coupled to an outer peripheral surface of the lower region of the first bush in a fit manner.

Assignees

• Semes Co Ltd

Inventors

• Kim Sang Woo
• Lee Jae Kyung
• Jang Ju Yong

Classifications

• H10P72/7624 Primary

  characterised by the mechanical construction of the susceptor, stage or support · CPC title

• H10P72/7612

  characterised by lifting arrangements, e.g. lift pins · CPC title

• H10P72/0402

  Apparatus for fluid treatment (H10P72/0441, H10P72/0448 take precedence) · CPC title

• H10P72/0421

  for drying etching · CPC title

• H10P72/722 Primary

  Details of electrostatic chucks · CPC title