Deposition source evaporating apparatus and manufacturing method thereof

Patent metadata

Field	Value
Publication number	US-2025084525-A1
Application number	US-202418957439-A
Country	US
Kind code	A1
Filing date	Nov 22, 2024
Priority date	Feb 27, 2019
Publication date	Mar 13, 2025
Grant date	—

Abstract

A deposition source evaporating apparatus includes a crucible set for accommodating a deposition source, a spray unit positioned on the crucible set, a heater positioned in the crucible set for heating the crucible set to evaporate the deposition source through the spray unit, and a heat radiation preventing plate surrounding the spray unit for blocking radiation of heat at a side of the spray unit. At least one of the crucible unit and the heat radiation preventing plate includes a carbon fiber composite material.

First claim

What is claimed is:

1 . A method of manufacturing a deposition source evaporating apparatus, the method comprising:
preparing a first crucible set for accommodating a deposition source; installing a spray unit on the first crucible set; installing a heater in the first crucible set; and installing a heat radiation preventing plate for blocking heat radiation at a side of the first crucible set, wherein any one of the first crucible set and the heat radiation preventing plate comprises a carbon fiber composite material, and the carbon fiber composite material is produced by mixing carbon fiber granules with a first carbon-based resin to produce a mixture and compressing and hardening the mixture.

2 . The method of claim 1 , wherein the carbon fiber granules are formed by any one of a process of chopping carbon fiber into fragments or a process of grinding the carbon fiber into powder.

3 . The method of claim 2 , wherein the carbon fiber granules are formed into a material in a paste state by mixing the chopped fragments or ground powder with the first carbon-based resin.

4 . The method of claim 1 , further comprising:
vacuum-treating the carbon fiber composite material to remove foreign substances from internal gaps of the carbon fiber composite material; filling a second carbon-based resin into the internal gaps of the carbon fiber composite material; and hardening the carbon fiber composite material filled with the second carbon-based resin.

5 . The method of claim 4 , wherein the second carbon-based resin is same as the first carbon-based resin.

6 . The method of claim 4 , wherein the second carbon-based resin is different from the first carbon-based resin.

7 . The method of claim 1 , wherein the heat radiation preventing plate is formed as a single body.

8 . The method of claim 1 , wherein the first crucible set comprises:
an inner crucible for accommodating the deposition source; an outer crucible accommodating the inner crucible and heated by the heater; a housing accommodating the outer crucible and the heater; and a cooling jacket accommodating the housing and including a coolant circulation unit, wherein any one of the inner crucible, the outer crucible, and the housing is formed as a single body comprising the carbon fiber composite material.

9 . The method of claim 8 , wherein the inner crucible is formed as a single body having a single accommodating space.

10 . The method of claim 8 , wherein a heat radiation plate formed of the carbon fiber composite material is installed on an inner wall of the housing.

11 . The method of claim 10 , wherein the housing, the heat radiation plate, and the outer crucible are an integral body of a same material.

12 . The method of claim 1 , further comprising:
installing a plurality of first spray units on the first crucible set; preparing a second crucible set; and installing a plurality of second spray units on the second crucible set, wherein the plurality of second spray units are a mirror image of the plurality of first spray units.

Assignees

• Samsung Display Co Ltd

Inventors

• An Byounggu
• Kim Kyunghan
• Cha Mincheol
• Park Jaemork
• Cho Wonseok
• Jung Kichae
• Cho Yunhyung

Classifications

• H10K71/164

  using vacuum deposition · CPC title

• C23C14/243 Primary

  Crucibles for source material (C23C14/28, C23C14/30 take precedence) · CPC title

• H10K71/60

  Forming conductive regions or layers, e.g. electrodes · CPC title

• H10K71/00

  Manufacture or treatment specially adapted for the organic devices covered by this subclass · CPC title

• C23C14/26

  by resistance or inductive heating of the source · CPC title