Deposition source evaporating apparatus and manufacturing method thereof
US-2025084525-A1 · Mar 13, 2025 · US
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Patent family 69740289
This patent family groups 3 related publications across US. Members often share priority claims or equivalent filings in different countries.
| Field | Value |
|---|---|
| Family ID | 69740289 |
| Family type | — |
| Earliest priority | Feb 27, 2019 |
| First filing country | US |
| Member publications | 3 |
| Countries | US |
| Representative publication | US2025084525A1 — Deposition source evaporating apparatus and manufacturing method thereof |
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US2025084525A1 — Deposition source evaporating apparatus and manufacturing method thereof (published Mar 13, 2025)
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