Evaporation device

Patent metadata

Field	Value
Publication number	US-2025084524-A1
Application number	US-202418748652-A
Country	US
Kind code	A1
Filing date	Jun 20, 2024
Priority date	Sep 8, 2023
Publication date	Mar 13, 2025
Grant date	—

Abstract

An evaporation device includes a first deposition source, a second deposition source in a first direction together with the first deposition source, a body part spaced apart from the first and second deposition sources in a second direction intersecting the first direction and including a first portion and a second portion in the second direction, a nozzle body part on the body part, a first pipe connected to a side surface of the first deposition source facing the body part and the nozzle body part and a lower end of the first portion, a second pipe connected to a side surface of the second deposition source facing the body part and the nozzle body part and a lower end of the second portion, a first nozzle protruding upward from the nozzle body part, and a second nozzle protruding upward from the nozzle body part.

First claim

What is claimed is:

1 . An evaporation device comprising:
a first deposition source; a second deposition source disposed in a first direction together with the first deposition source; a body part spaced apart from the first deposition source and the second deposition source in a second direction intersecting the first direction, the body part including a first portion and a second portion disposed in the second direction; a nozzle body part disposed on the body part; a first pipe connected to a side surface of the first deposition source facing the body part and the nozzle body part and a lower end of the first portion; a second pipe connected to a side surface of the second deposition source facing the body part and the nozzle body part and a lower end of the second portion; a first nozzle protruding upward from the nozzle body part; and a second nozzle protruding upward from the nozzle body part.

2 . The evaporation device of claim 1 , wherein the first nozzle and the second nozzle are disposed in the first direction.

3 . The evaporation device of claim 1 , wherein
a first pipe passage is defined in the first pipe, and a first passage continuous with the first pipe passage is defined in the first portion, and a second pipe passage is defined in the second pipe, and a second passage continuous with the second pipe passage is defined in the second portion.

4 . The evaporation device of claim 3 , wherein
a first nozzle passage continuous with the first passage and a second nozzle passage continuous with the second passage are defined in the nozzle body part, and a first opening continuous with the first nozzle passage is defined in the first nozzle, and a second opening continuous with the second nozzle passage is defined in the second nozzle.

5 . The evaporation device of claim 1 , wherein
the first pipe includes:
a first-first pipe connected to an upper portion of the side surface of the first deposition source and extending downward; and
a first-second pipe connected to a lower portion of the first-first pipe and the lower end of the first portion, and
the second pipe includes:
a second-first pipe connected to an upper portion of the side surface of the second deposition source and extending downward; and
a second-second pipe connected to a lower portion of the second-first pipe and the lower end of the second portion.

6 . The evaporation device of claim 1 , further comprising:
a third deposition source; and a fourth deposition source disposed in the first direction together with the third deposition source, wherein the third deposition source and the fourth deposition source are spaced apart from the first deposition source and the second deposition source in the second direction, and the body part and the nozzle body part are disposed between the first deposition source and the second deposition source and the third deposition source and the fourth deposition source.

7 . The evaporation device of claim 6 , wherein different deposition materials are accommodated in the first deposition source, the second deposition source, the third deposition source, and the fourth deposition source, respectively.

8 . The evaporation device of claim 6 , further comprising:
a third pipe connected to a side surface of the third deposition source facing the body part and the nozzle body part and a lower end of the body part; a fourth pipe connected to a side surface of the fourth deposition source facing the body part and the nozzle body part and the lower end of the body part; a third nozzle protruding upward from the nozzle body part; and a fourth nozzle protruding upward from the nozzle body part.

9 . The evaporation device of claim 8 , wherein the third nozzle and the fourth nozzle are disposed in the first direction and disposed adjacent to the first nozzle and the second nozzle in the second direction, respectively.

10 . The evaporation device of claim 9 , wherein the third nozzle and the fourth nozzle directly contact the first nozzle and the second nozzle in the second direction, respectively.

11 . The evaporation device of claim 8 , wherein
the body part further includes a third portion and a fourth portion disposed in the second direction together with the first portion and the second portion, and the third pipe is connected to a lower end of the third portion, and the fourth pipe is connected to a lower end of the fourth portion.

12 . The evaporation device of claim 11 , wherein
a third pipe passage is defined in the third pipe, and a third passage continuous with the third pipe passage is defined in the third portion, a fourth pipe passage is defined in the fourth pipe, and a fourth passage continuous with the fourth pipe passage is defined in the fourth portion, a third nozzle passage continuous with the third passage and a fourth nozzle passage continuous with the fourth passage are defined in the nozzle body part, and a third opening continuous with the third nozzle passage is defined in the third nozzle, and a fourth opening continuous with the fourth nozzle passage is defined in the fourth nozzle.

13 . The evaporation device of claim 8 , wherein the first nozzle, the second nozzle, the third nozzle, and the fourth nozzle are disposed in the first direction.

14 . The evaporation device of claim 6 , further comprising:
a fifth deposition source spaced apart from the first deposition source and the second deposition source in the second direction; and a fifth nozzle connected to an upper end of the fifth deposition source, wherein the first deposition source and the second deposition source are disposed between the body part and the fifth deposition source.

15 . The evaporation device of claim 1 , further comprising:
a third deposition source disposed in the first direction together with the first deposition source and the second deposition source; a third pipe connected to the third deposition source and a third portion of the body part; a third nozzle protruding upward from the nozzle body part; a fourth deposition source spaced apart from the nozzle body part in the second direction; and a plurality of fourth nozzles connected to an upper end of the fourth deposition source and disposed in the first direction, wherein the body part is disposed between the first deposition source, the second deposition source, and the third deposition source and the fourth deposition source.

16 . The evaporation device of claim 15 , wherein
the first nozzle, the second nozzle, and the third nozzle are disposed in the first direction, and the plurality of fourth nozzles are obliquely disposed to face toward the first nozzle, the second nozzle, and the third nozzle.

17 . The evaporation device of claim 1 , further comprising:
a third deposition source; a fourth deposition source; a third pipe connected to the third deposition source and the body part; a fourth pipe connected to the fourth deposition source and the body part; a third nozzle protruding upward from the nozzle body part; and a fourth nozzle protruding upward from the nozzle body part, wherein the first deposition source, the second deposition source, the third deposition source, and the fourth deposition source are disposed in the first direction.

18 . The evaporation device of claim 1 , further comprising:
a third deposition source; a fourth deposition source disposed in the first direction together with the third deposition source; a third pipe connected to the third deposition source;

Assignees

• Samsung Display Co Ltd

Inventors

• Han Inae
• Han Jongbun
• Kim Hyunjae
• Kim Hundong

Classifications

• C23C14/24 Primary

  Vacuum evaporation · CPC title

• H10K71/164

  using vacuum deposition · CPC title

• H10K50/10

  OLEDs or polymer light-emitting diodes [PLED] · CPC title

• C23C14/228 Primary

  Gas flow assisted PVD deposition · CPC title

• H10K71/16

  using physical vapour deposition [PVD], e.g. vacuum deposition or sputtering · CPC title