Injector mounting apparatus of furnace

Patent metadata

Field	Value
Publication number	US-2025075976-A1
Application number	US-202418631177-A
Country	US
Kind code	A1
Filing date	Apr 10, 2024
Priority date	Aug 30, 2023
Publication date	Mar 6, 2025
Grant date	—

Abstract

The present application provides an injector mounting apparatus of a furnace, wherein a first injector in the furnace has a main injector pipe. The injector mounting apparatus includes a first mounting component. The first mounting component has an injector mounting hole for the first injector to pass through and be disposed therein, a first edge on a side of the main injector pipe close to the inner side surface of the process tube abuts on a second edge on a side of the injector mounting hole close to the inner side surface of the process tube, and there is a first spacing between the second edge and an outer side face of the first mounting component. A flange is disposed at the bottom of the process tube, and the first mounting component is mounted on the flange by means of a first fixing member.

First claim

What is claimed is:

1 . An injector mounting apparatus of a furnace, wherein a process tube and a plurality of first injectors are disposed in the furnace;
an internal space of the process tube is cylindrical in shape; each of the first injectors has a main injector pipe, which is located inside an inner side surface of the process tube and extends from the bottom to the top along the inner side surface of the process tube; the injector mounting apparatus comprises a first mounting component; the first mounting component has an injector mounting hole for the first injector to pass through and be disposed therein, a first edge on a side of the main injector pipe of the first injector close to the inner side surface of the process tube abuts on a second edge on a side of the injector mounting hole close to the inner side surface of the process tube, there is a first spacing between the second edge and an outer side face of the first mounting component, and the outer side face of the first mounting component is a side face close to the inner side surface of the process tube; a flange is disposed at the bottom of the process tube, and the first mounting component is mounted on the flange by means of a first fixing member; and the outer side face of the first mounting component is located on an inner side of the inner side surface of the process tube or aligned with the inner side surface of the process tube, and a distance between the first edge and the inner side surface of the process tube is greater than or equal to the first spacing.

2 . The injector mounting apparatus of the furnace according to claim 1 , wherein the first injector further comprises a second transverse injector pipe, and the bottom of the main injector pipe and a first side of the second transverse injector pipe are connected together to form a communicating first elbow;
the injector mounting hole comprises a first vertical hole and a second transverse hole communicating with each other, and a second elbow is formed at a connection position between the first vertical hole and the second transverse hole; the main injector pipe passes through and is disposed in the first vertical hole, and the second transverse injector pipe passes through and is disposed in the second transverse hole; and the first elbow is located in the second elbow, and a second side of the second transverse injector pipe extends to the outside of the outer side face of the first mounting component.

3 . The injector mounting apparatus of the furnace according to claim 2 , further comprising a second mounting component; wherein:
an inner side face of the first mounting component is a side face away from the inner side surface of the process tube; and the second mounting component is mounted on the inner side face of the first mounting component by means of a second fixing member, and a first side face of the second mounting component is a side face in fixed contact with the inner side face of the first mounting component.

4 . The injector mounting apparatus of the furnace according to claim 3 , wherein the first vertical hole and the second elbow are formed by a combination of a first recess portion disposed on the inner side face of the first mounting component and a second recess portion disposed on the first side face of the second mounting component.

5 . The injector mounting apparatus of the furnace according to claim 1 , wherein a constituent material of the first injector comprises quartz.

6 . The injector mounting apparatus of the furnace according to claim 4 , wherein a second side of the second transverse injector pipe and a gas pipe are sealed and fixedly connected.

7 . The injector mounting apparatus of the furnace according to claim 6 , wherein the second side of the second transverse injector pipe and the gas pipe are sealed using a sealing ring.

8 . The injector mounting apparatus of the furnace according to claim 6 , wherein the second side of the second transverse injector pipe and the gas pipe are fixed using a top thread.

9 . The injector mounting apparatus of the furnace according to claim 1 , wherein the first fixing member comprises a first screw hole disposed on the flange, a first hole passing through the first mounting component, and a first screw, the first hole is aligned with the first screw hole, and the first screw passes through the first hole and is fastened in the first screw hole.

10 . The injector mounting apparatus of the furnace according to claim 9 , wherein a first extension portion is disposed on the first mounting component, and the first hole is disposed on and passes through the first extension portion.

11 . The injector mounting apparatus of the furnace according to claim 3 , wherein the second fixing member comprises a second screw hole disposed on the first mounting component, a second hole passing through the second mounting component, and a second screw, the second hole is aligned with the second screw hole, and the second screw passes through the second hole and is fastened in the second screw hole.

12 . The injector mounting apparatus of the furnace according to claim 1 , wherein a wafer boat is disposed in the process tube and used for placing wafers; and
a top surface of the main injector pipe is located above a top surface of a top one of the wafers in the wafer boat.

13 . The injector mounting apparatus of the furnace according to claim 12 , wherein a number of the first injectors is two.

14 . The injector mounting apparatus of the furnace according to claim 13 , wherein a second injector is also disposed in the furnace, and a length of the second injector is less than that of the first injector.

15 . The injector mounting apparatus of the furnace according to claim 14 , wherein the first injector and the second injector are each connected to a gas pipe

Assignees

• Shanghai Huali Microelect Corp

Inventors

• Wang Jianyong

Classifications

• H10P72/0434

  mainly by convection · CPC title

• H10P72/12

  Vertical boat type carrier whereby the substrates are horizontally supported, e.g. comprising rod-shaped elements · CPC title

• Y02P70/50

  Manufacturing or production processes characterised by the final manufactured product · CPC title

• C23C16/45578 Primary

  Elongated nozzles, tubes with holes · CPC title

• F27B5/16 Primary

  Arrangements of air or gas supply devices · CPC title