Liquid supply unit, and substrate treating apparatus including the same
US-12521771-B2 · Jan 13, 2026 · US
US2025067470A1 · US · A1
| Field | Value |
|---|---|
| Publication number | US-2025067470-A1 |
| Application number | US-202218726468-A |
| Country | US |
| Kind code | A1 |
| Filing date | Nov 30, 2022 |
| Priority date | Jan 5, 2022 |
| Publication date | Feb 27, 2025 |
| Grant date | — |
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The invention relates to an arrangement for heating a liquid. An energy unit ( 1 ) supplies a heat exchanger ( 2 ) with thermal energy. The heat exchanger ( 2 ) transfers the thermal energy to the liquid which is received by a container ( 3 ). The container ( 3 ) has an opening ( 21 ). A pump ( 20 ) is connected to the opening ( 21 ) of the container ( 3 ) and to the heat exchanger ( 2 ) so as to deliver liquid from the opening ( 21 ) and/or from the heat exchanger ( 2 ).
Opening claim text (preview).
1 - 8 . (canceled) 9 . An arrangement for heating a liquid, comprising: an energy unit; a heat exchanger; a container; and a pump, wherein the energy unit is configured to supply the heat exchanger with thermal energy, wherein the heat exchanger is configured to transfer the thermal energy to the liquid, wherein the container is configured to receive the liquid, wherein the container has an opening, wherein the pump is connected to the opening of the container and to the heat exchanger, wherein the pump is configured to deliver liquid from the opening and/or from the heat exchanger. 10 . The arrangement of claim 9 , further comprising: an additional pump configured to deliver the liquid to be heated through the heat exchanger, wherein the opening of the container is arranged between the heat exchanger and the pump. 11 . The arrangement of claim 10 , further comprising: a temperature sensor configured to measure a temperature of the liquid heated by the heat exchanger; and a control device configured to receive measured values of the temperature sensor and use the measured values for controlling the additional pump. 12 . The arrangement of claim 10 , further comprising: an aeration/ventilation valve configured to allow air to be discharged from the arrangement; and a ventilation pump configured to discharge air and liquid through a return line, wherein the return line opens upstream of the aeration/ventilation valve and upstream of the additional pump. 13 . The arrangement of claim 12 , further comprising: a component located between the aeration/ventilation valve and the ventilation pump, wherein the component is configured to open when a predetermined pressure difference is exceeded such that the liquid can flow in a direction of the ventilation pump. 14 . The arrangement of claim 12 , wherein the additional pump is configured to deliver air through the heat exchanger in one delivery direction and deliver liquid through the heat exchanger in another delivery direction. 15 . The arrangement of claim 12 , further comprising: a descaling device arranged along the return line and configured to add a descaling agent to the liquid delivered by the ventilation pump. 16 . The arrangement of claim 9 , further comprising: a mixing section; a cold water path open onto the mixing section; a mixed temperature sensor configured to measure a temperature of the liquid in the mixing section; and a control device configured to control the pump and/or a cold water path pump for delivering the liquid in the cold water path based on measured values of the mixed temperature sensor and a predetermined temperature range, wherein the pump is configured to deliver heated liquid to the mixing section.
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