Liquid supply unit, and substrate treating apparatus including the same

Patent metadata

Field	Value
Publication number	US-12521771-B2
Application number	US-202218058570-A
Country	US
Kind code	B2
Filing date	Nov 23, 2022
Priority date	Dec 1, 2021
Publication date	Jan 13, 2026
Grant date	Jan 13, 2026

Abstract

Provided is a liquid supply unit for supplying a treatment liquid to a nozzle that discharges the treatment liquid to a substrate, the liquid supply unit including: a tank for storing the treatment liquid; a main circulation line for supplying the treatment liquid from an internal space of the tank to the nozzle or for recovering the treatment liquid to the internal space of the tank; a supply line connected to the main circulation line to supply the treatment liquid to the nozzle; and a heater module installed in the main circulation line and heating the treatment liquid flowing through the main circulation line to a predetermined temperature, in which the heater module includes: a pipe in which the treatment liquid flows and which is made of a quartz material; and a heating element provided on a surface of the pipe.

First claim

What is claimed is:

1 . An apparatus for treating a substrate, the apparatus comprising:
a chamber having a processing space; a support unit configured to support and rotate the substrate in the processing space; a nozzle configured to supply a treatment liquid to the substrate supported by the support unit; and a liquid supply unit configured to supply the treatment liquid to the nozzle, wherein the liquid supply unit includes
a tank configured to store the treatment liquid,
a main circulation line configured to supply the treatment liquid from an internal space of the tank to the nozzle or to recover the treatment liquid to the internal space of the tank,
a connection line connected to the main circulation line and configured to supply the treatment liquid to the nozzle, and
a heater module configured to heat the treatment liquid to a temperature is in the main circulation line, the heater module including
a pipe configured to flow the treatment liquid therethrough and made of a quartz material, and
a heating element on a surface of the pipe,
wherein the heater module includes a conductor terminal on the surface of the pipe and a terminal block coupled onto the conductor terminal and configured to receive power from an outside, and at least a portion of the conductor terminal is in contact with the heating element, and wherein the heating element includes a first portion extending in a longitudinal direction of the pipe while being in contact with the surface of the pipe, a second portion extending upwardly from the first portion and including an upper end and a lower end, and a third portion extending in the longitudinal direction of the pipe from the upper end of the second portion, the second portion is in contact with one end of the conductor terminal, and the third portion is in contact with the surface of the conductor terminal.

2 . The apparatus of claim 1 , wherein the heating element is on the surface of the pipe in a printing manner.

3 . The apparatus of claim 1 , wherein the heater module includes the heating element and an insulator covering an exposed portion of the heating element.

4 . The apparatus of claim 1 , wherein the conductor terminal and the terminal block are electrically connected through a conductive adhesive.

5 . The apparatus of claim 4 , wherein the heating element and the conductor terminal are made of metal.

6 . The apparatus of claim 5 , wherein
the heating element is made of AgPd or graphite, the conductor terminal is made of with silver (Ag), and the conductive adhesive is provided as a silver paste (Ag sintering).

7 . The apparatus of claim 3 , wherein the insulator is made of silicon dioxide (SiO 2 ).

8 . The apparatus of claim 1 , wherein
the main circulation line includes a supply line configured to supply the treatment liquid stored in the internal space of the tank to the nozzle, and a recovery line configured to recover the treatment liquid from the nozzle to the tank, and the heater module is in the supply line.

9 . The apparatus of claim 1 , wherein the heater module includes a temperature sensor configured to measure a temperature of the heating element.

10 . The apparatus of claim 1 , wherein
the liquid supply unit includes an internal circulation line configured to circulate the treatment liquid stored in the internal space of the tank, and the heater module is in the internal circulation line.

11 . The apparatus of claim 1 , wherein the treatment liquid is isopropyl alcohol (IPA).

12 . A liquid supply unit for supplying a treatment liquid to a nozzle that discharges the treatment liquid to a substrate, the liquid supply unit comprising:
a tank configured to store the treatment liquid; a main circulation line configured to supply the treatment liquid from an internal space of the tank to the nozzle or to recover the treatment liquid to the internal space of the tank; a supply line connected to the main circulation line and configured to supply the treatment liquid to the nozzle; and a heater module in the main circulation line and configured to heat the treatment liquid flowing through the main circulation line to a temperature, wherein the heater module includes
a pipe configured to flow the treatment liquid therethrough and made of a quartz material, and
a heating element on a surface of the pipe,
wherein the heater module includes a conductor terminal on the surface of the pipe and a terminal block coupled onto the conductor terminal and configured to receive power from an outside, and at least a portion of the conductor terminal is in contact with the heating element, and wherein the heating element includes a first portion extending in a longitudinal direction of the pipe while being in contact with the surface of the pipe, a second portion extending upwardly from the first portion and including an upper end and a lower end, and a third portion extending in the longitudinal direction of the pipe from the upper end of the second portion, the second portion is in contact with one end of the conductor terminal, and the third portion is in contact with the surface of the conductor terminal.

13 . The liquid supply unit of claim 12 , wherein
the conductor terminal is on the surface of the pipe in a cylindrical printing manner, and the conductor terminal and the terminal block are electrically connected through a conductive adhesive.

14 . The liquid supply unit of claim 12 , wherein the heater module includes the heating element and an insulator covering a contact portion between the heating element and the conductor terminal.

15 . An apparatus for treating a substrate, the apparatus comprising:
a chamber having a processing space; a support unit configured to support and rotate the substrate in the processing space; a nozzle configured to supply a treatment liquid to the substrate supported by the support unit; and a liquid supply unit configured to supply the treatment liquid to the nozzle, wherein the liquid supply unit includes
a first tank and a second tank configured to store the treatment liquid,
a main circulation line configured to connect the first tank and the second tank, the main circulation line configured to supply the treatment liquid to the nozzle or recover the treatment liquid to an internal space of the first tank or an internal space of the second tank, and
an internal circulation line configured to comment the first tank and the second tank, the internal circulation line configured to heat the treatment liquid contained in the internal space of the first tank or the internal space of the second tank,
wherein the main circulation line includes a supply line branched from the main circulation line and configured to supply the treatment liquid to the nozzle, and a recovery line branched from the main circulation line and configured to recover the treatment liquid from the nozzle to the first tank or the second tank, the internal circulation line includes a lower circulation line connecting a lower wall of the first tank and a lower wall of the second tank, an upper circulation line connecting an upper wall of the first tank and an upper wall of the second tank, and a shared line connecting the lower circulation line and the upper circulation line, and a heater module configured to heat the treatment liquid flowing therein to a temperature is in each of the supply line of the main circulation line and the shared line of the internal circulation line, the heater module including
a pipe configured to flow the treatment liquid therethrough and made of a q

Assignees

• Semes Co Ltd

Inventors

• Song Jun Ho
• Cho Min Hee
• Kang Won Young

Classifications

• H10P72/0414

  using mainly spraying means, e.g. nozzles · CPC title

• H05B3/48

  heating conductor embedded in insulating material · CPC title

• H05B3/12

  characterised by the composition or nature of the conductive material · CPC title

• H05B2203/021

  Heaters specially adapted for heating liquids · CPC title

• H05B2203/016

  Heaters using particular connecting means · CPC title