Diagnostic device, semiconductor manufacturing equipment system, semiconductor equipment manufacturing system, and diagnostic method
US-2024321608-A1 · Sep 26, 2024 · US
US2025052707A1 · US · A1
| Field | Value |
|---|---|
| Publication number | US-2025052707-A1 |
| Application number | US-202418798948-A |
| Country | US |
| Kind code | A1 |
| Filing date | Aug 9, 2024 |
| Priority date | Aug 10, 2023 |
| Publication date | Feb 13, 2025 |
| Grant date | — |
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A monitoring system (100) with a gas measuring device (72) as well as to a process for operating a monitoring system (100). The monitoring system (100) is used to monitor the breathing gas supply of an airplane pilot in an aircraft. The principal components in the breathing gas (10) are formed by air (5), i.e., essentially defined quantities of oxygen, carbon dioxide, nitrogen and moisture or water vapor. On the one hand, information on the exact quantity of oxygen and carbon dioxide in the breathing gas mixture is essential to assess whether a breathing gas mixture for an airplane pilot meets specific requirements. The monitoring system (100) with the gas measuring device (72) offers possibilities for obtaining indications or estimates (44) in respect to possible contaminations by additional components in the breathing gas supply of an airplane pilot.
Opening claim text (preview).
What is claimed is: 1 . A monitoring system for monitoring a gas composition of a breathing gas supply of an airplane pilot in airplanes or aircraft, the monitoring system comprising: a measuring line from a measuring location through a gas inlet at the monitoring system for a breathing gas mixture; a gas transport module configured to feed defined quantities of the breathing gas mixture via the measuring line, from the measuring location through the gas inlet at the monitoring system; a gas measuring device, the gas measuring device comprising: a moisture sensor configured to determine a moisture content in the breathing gas mixture; a pressure sensor configured to determine a pressure level in the breathing gas mixture; a temperature sensor configured to determine a temperature of the breathing gas mixture; a thermoelectric device comprising thermocouples or thermopiles; an electromagnetic device comprising coils and magnetically conductive materials and arranged at the thermoelectric device; an infrared optical device comprising a radiation source, a measuring element and a reference element; a control and analysis unit configured to organize, to check, to control or to regulate a course of a measurement-based monitoring of the breathing gas supply, wherein the moisture sensor is configured with the control and analysis unit to determine a value that indicates a moisture content or a water content in the breathing gas mixture, wherein the pressure sensor is configured in combination with the control and analysis unit to determine a value that indicates a pressure level of the breathing gas mixture, wherein the temperature sensor is configured in combination with the control and analysis unit to determine a value, which indicates a temperature of the breathing gas mixture, wherein the electromagnetic device is configured in combination with the control and analysis unit to allow a magnetic field to act cyclically on the thermocouples or on the thermopiles, wherein the thermoelectric device is configured in combination with the control and analysis unit to carry out a determination of a thermal conductivity of the breathing gas and to determine a value that indicates situations of the thermal conductivity as a function of or without effect of the magnetic field on the quantities of breathing gas mixture fed by the gas transport module, wherein the infrared optical device is configured in combination with the control and analysis unit to carry out a measurement of an absorption of infrared radiation in the breathing gas mixture and to determine a value, which indicates situations of IR absorption in the breathing gas mixture; a memory configured to store properties of different gases or gas mixtures, the memory being connected to the control and analysis unit, wherein at least one data set of data, which indicates properties of different gases, gas mixtures or vapors, is stored in the memory, wherein at least one of the properties from the group of properties comprising: thermal conductivity; pressure dependence of the thermal conductivity; and temperature dependence of the thermal conductivity, is stored in the at least one data set at least for moisture contents in the breathing gas mixture and contents of the gases nitrogen, oxygen, carbon dioxide in the breathing gas mixture, wherein the control and analysis unit is configured to identify, based on the determined values, which indicate a moisture content or a water content in the breathing gas mixture, a temperature of the breathing gas mixture, a pressure level of the breathing gas mixture, situations of the thermal conductivity in the breathing gas mixture and situations of the IR absorption in the breathing gas mixture, and based on the properties of different gases, gas mixtures or vapors, which properties are stored in the memory, a special state in the breathing gas supply of the airplane pilot, in which special state there is at least one quantity of an additional gas component different from carbon dioxide, nitrogen, water vapor, moisture or oxygen present in the breathing gas mixture, and wherein the control and analysis unit is configured to provide an output signal which indicates the special state that at least one quantity of an additional gas component different from carbon dioxide, nitrogen, water vapor, moisture and oxygen is present in the breathing gas mixture. 2 . A monitoring system in accordance with claim 1 , wherein different properties of different additional fluids, gases or gas mixtures are stored in the memory. 3 . A monitoring system in accordance with claim 1 , further comprising a velocity sensor mechanism; an acceleration sensor mechanism; or an altitude sensor mechanism. 4 . A monitoring system in accordance with claim 1 , wherein additional data are stored in the memory, which indicate different properties of different fluids, gases, gas mixtures or vapors, the additional data comprising at least one of the following properties: heat capacity; pressure dependence of the heat capacity; temperature dependence of the heat capacity; density; pressure dependence of the density; temperature dependence of the density; ignitability or explosiveness; pressure dependence of the ignitability or explosiveness; temperature dependence of the ignitability or explosiveness; viscosity; vapor pressure; boiling point; pressure dependence of the viscosity; temperature dependence of the viscosity; properties that are harmful for health including toxicity and or carcinogenicity. 5 . A monitoring system in accordance with claim 1 , further comprising an input interface or an input unit configured to input or select from among predefined situations or states of gases, gas mixtures or vapors in the breathing gas mixture, wherein an input or a selection from among predefined situations or states at the input unit comprises a presence of at least one additional gas different from carbon dioxide, nitrogen, water vapor and/or oxygen in the gas mixture of the breathing gas supply, and wherein the control and analysis unit is configured to include the selected situations or states and the data stored in the memory in controlling and/or operating the monitoring system during the application of upper and/or lower limit values, threshold values or alarm limits for situations that indicate the thermal conductivity and/or for situations of the IR absorption to quantities in the breathing gas mixture. 6 . A monitoring system in accordance with claim 1 , further comprising an output unit configured to provide or to indicate the output signal and/or the states. 7 . A monitoring system in accordance with claim 1 , wherein the control and analysis unit is configured to determine an oxygen concentration as a function of the effect of the magnetic field from the situation of the thermal conductivity in the breathing gas mixture and to make the determines oxygen concentration available as an additional output signal; and/or wherein the control and analysis unit is configured to determine a carbon dioxide concentration from the situation of the IR absorption in the breathing gas mixture and to make the situation of the IR absorption available as an additional output signal. 8 . A process for monitoring a gas composition of a pilot's breathing gas supply of an airplane pilot in airplanes or aircraft with determination of a special state in which foreign gas components are present in a pilot's breathing gas mixture of the pilot's breathing gas supply, the process comprising the steps of: detecting a current temperature level and a current moisture content in the pilot's breathing gas mixture; detecting a current pressure level in the pilot's breathing gas m
for analysing gases, e.g. multi-gas analysis · CPC title
of gaseous biological material, e.g. breath · CPC title
CO or CO2 · CPC title
by investigating thermal conductivity (by calorimetry G01N25/20; by measuring change of resistance of an electrically-heated body G01N27/18) · CPC title
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