Fluorinated cleaning fluid mixtures

Patent metadata

Field	Value
Publication number	US-2025051695-A1
Application number	US-202218719693-A
Country	US
Kind code	A1
Filing date	Dec 14, 2022
Priority date	Dec 27, 2021
Publication date	Feb 13, 2025
Grant date	—

Abstract

Cleaning fluids include at least two fluid components. The first fluid component is a hydrofluorothioether or a chlorinated hydrofluoroolefin, or at least one of the isomers of a hydrochlorofluoroolefin, and the second fluid component is an alcohol with 1-5 carbon atoms. The cleaning fluid provides enhanced removal of particulate contamination, improved reduction of particle reattachment, or a combination thereof when compared to a cleaning fluid comprising a fluorinated fluid.

First claim

What is claimed is:

1 . A cleaning fluid comprising:
a first fluid component comprising a hydrofluorothioether of Structure 1:
R 1 —S—R f 1    Structure 1

wherein R 1 is a nonfluorinated alkyl group with 1-3 carbon atoms;
R f 1 is a fluorinated or perfluorinated group containing 2-6 carbon atoms and optionally comprises one or more catenated heteroatoms; or a chlorinated hydrofluoroolefin of Structure 2
cis-(CF 3 )HC═CHCl;   Structure 2; or

at least one of the two isomers of hydrochlorofluoroolefin of Structure 3,
HClC=CF(CF 2 H)   Structure 3

at least one of the two isomers of hydrochlorofluoroolefin of Structure 4,
FClC═CH(CF 2 H)   Structure 4

or a mixture thereof, and
a second fluid component comprising at least one alcohol comprising structure 5:
R 2 —OH   Structure 5

wherein R 2 is an alkyl group with 1-5 carbon atoms,

wherein the cleaning fluid provides enhanced removal of particulate contamination, improved reduction of particle reattachment, or a combination thereof when compared to a cleaning fluid comprising a fluorinated fluid.

2 . The cleaning fluid of claim 1 , wherein the first fluid component comprises a hydrofluorothioether of Structure 1:
wherein R 1 is an alkyl group with 1 carbon atom; and R f 1 is a —CR f 3 R f 4 F group wherein R f 3 and R f 4 are independently perfluorinated alkyl groups with 1-3 carbon atoms.

3 . The cleaning fluid of claim 2 , wherein R f 3 and R f 4 are perfluorinated alkyl groups with 1 carbon atom.

4 . The cleaning fluid of claim 1 , wherein the first fluid component comprises 85-99.9% by weight of cleaning fluid.

5 . The cleaning fluid of claim 1 , wherein the second fluid component comprises an alcohol where R 2 is an alkyl group with 1-4 carbon atoms.

6 . The cleaning fluid of claim 5 , wherein the second fluid component comprises an alcohol where R 2 is an alkyl group with 2-3 carbon atoms.

7 . The cleaning fluid of claim 6 , wherein the second fluid component comprises iso-propanol, and wherein the cleaning fluid provides improved particle removal when compared to cleaning fluid comprising a fluorinated fluid.

8 . The cleaning fluid of claim 7 , further comprising at least a third fluid component, wherein the third fluid component comprises an alcohol.

9 . The cleaning fluid of claim 1 , wherein the second fluid component comprises an alcohol where R 2 is an alkyl group with 4 carbon atoms.

10 . The cleaning fluid of claim 1 , wherein the second fluid component comprises butanol, and wherein the cleaning fluid provides an improved reduction of particle re-attachment when compared to cleaning fluid comprising a fluorinated fluid.

11 . The cleaning fluid of claim 10 , further comprising at least a third fluid component, wherein the third fluid component comprises an alcohol.

12 . The cleaning fluid of claim 1 , wherein the cleaning fluid is non-flammable.

13 . A method of cleaning an article comprising:
providing an article to be cleaned comprising at least one surface that comprises at least one contaminant; providing a cleaning fluid comprising:
a first fluid component comprising a hydrofluorothioether of Structure 1:
R 1 —S—R f 1    Structure 1

wherein R 1 is a nonfluorinated alkyl group with 1-3 carbon atoms;
R f 1 is a fluorinated or perfluorinated group containing 2-6 carbon atoms and optionally comprises one or more catenated heteroatoms; or a chlorinated hydrofluoroolefin of Structure 2
cis-(CF 3 )HC═CHCl;   Structure 2; or

at least one of the two isomers of hydrochlorofluoroolefin of Structure 3,
HClC=CF(CF 2 H)   Structure 3

at least one of the two isomers of hydrochlorofluoroolefin of Structure 4,
FClC═CH(CF 2 H)   Structure 4

or a mixture thereof, and
a second fluid component comprising at least one alcohol comprising structure 5:
R 2 —OH   Structure 5

wherein R 2 is an alkyl group with 1-5 carbon atoms; and
contacting the substrate surface with the cleaning fluid.

14 . The method of claim 13 , wherein contacting the substrate surface with the cleaning fluid comprises applying the cleaning fluid by brushing, spraying, or spin coating.

15 . The method of claim 13 , wherein contacting the substrate surface with the cleaning fluid comprises immersion of the substrate in the cleaning fluid.

16 . The method of claim 13 , further comprising removing the cleaning fluid from the substrate surface.

17 . The method of claim 16 , wherein removing the cleaning fluid from the substrate surface comprises evaporating the cleaning fluid or removing the substrate from immersion in the cleaning fluid.

Assignees

• 3M Innovative Properties Company

Inventors

• Kimura Tamami
• Ng Liping Claryn
• Ando Nobuaki

Classifications

• H10P70/20

  Cleaning during device manufacture · CPC title

• C11D7/5022

  containing oxygen · CPC title

• C11D7/5018

  Halogenated solvents · CPC title

• C11D2111/22

  Electronic devices, e.g. PCBs or semiconductors · CPC title

• C11D7/261

  Alcohols; Phenols · CPC title