Chemically amplified positive resist composition and resist pattern forming process
US-12164231-B2 · Dec 10, 2024 · US
US2025034289A1 · US · A1
| Field | Value |
|---|---|
| Publication number | US-2025034289-A1 |
| Application number | US-202218714159-A |
| Country | US |
| Kind code | A1 |
| Filing date | Nov 22, 2022 |
| Priority date | Mar 2, 2022 |
| Publication date | Jan 30, 2025 |
| Grant date | — |
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Polymerizable compositions are provided, including a polymerizable component and a redox initiation system. The redox initiation system includes a transition metal complex that participates in a redox cycle; an oxidizing agent; and a photolabile reducing agent containing a benzophenone moiety. On exposure to actinic radiation, such as UV, the photolabile reducing agent photolyzes, releasing the reducing agent and initiating the redox-initiated polymerization of the polymerizable component. Also provided is a photolabile reducing agent.
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1 . A polymerizable composition comprising a polymerizable component, and a redox initiation system comprising: a transition metal complex that participates in a redox cycle; an oxidizing agent; and a photolabile reducing agent of the Formula I: wherein R 1 is of Formula II, Formula III, Formula IV, or Formula V; wherein Y is H or methyl; and wherein each of R 2 , R 3 , R 4 , R 5 , R 6 , R 7 , R 8 , R 9 , and R 10 is independently H, an alkyl, an alkoxy, or an aryl; wherein: R 12 is a covalent bond to Formula I at the R 1 position; R 11 is H, an alkyl, an aryl, or a covalent bond to a second group of Formula I at the R 1 position; each of R 13 and R 14 independently, in combination with the attached O, comprises an alcohol, an alkoxy, an aryloxy, an ester, an ether, a urethane, or a carbonate functional group, or taken together form a 5- or 6-membered ring; each of R 15 and R 16 is independently an optionally substituted 1-18C hydrocarbyl; R 17 is H or an optionally substituted 1-18C hydrocarbyl, wherein R 15 +R 16 , or R 15 +R 17 , or R 16 +R 17 are optionally taken together to form a 5- or 6-membered ring; R 18 is a covalent bond to Formula I at the R 1 position; each of R 19 , R 20 , and R 21 is H or an optionally substituted 1-18C hydrocarbyl; and each of X 1 and X 2 is independently a covalent bond, O, S, —N(R 22 )—, —[C(R 22 ) 2 ] y=1,2,3 —, —CO— or —CO—O—; wherein R 2 is H or a 1-18C alkyl. 2 . The polymerizable composition of claim 1 , wherein each of R 2 , R 3 , R 4 , R 5 , R 6 , R 7 , R 8 , R 9 , and R 10 is H. 3 . The polymerizable composition of claim 1 , wherein the transition metal complex is of the formula [ML p ] n+ [A m− ] q , wherein M is a transition metal selected from groups 5 to 11 in the Periodic Table of the Elements that participates in a redox cycle, L is a ligand, A m− is an anion having a negative charge of m−; m and n are independently integers from 1 to 7; p is an integer from 1 to 9; and q is a whole number selected such that m·q=n. 4 . The polymerizable composition of claim 1 , wherein M is selected from the group consisting of Cu, Fe, Ru, Cr, Mo, Pd, Ni, Pt, Mn, Rh, Re, Co, V, Au, Nb, and Ag. 5 . The polymerizable composition of claim 3 , wherein the transition metal complex is a first transition metal complex and the polymerizable composition further comprises a second transition metal complex, and wherein the M of the first transition metal complex is different than the M of the second transition metal complex. 6 . The polymerizable composition of claim 1 , wherein the redox initiator system is present in the composition in an amount of from 0.05 to about 10 parts by weight, based on 100 parts by weight of the polymerizable component of the polymerizable composition. 7 . The polymerizable composition of claim 1 , wherein the polymerizable component comprises at least one ethylenically unsaturated monomer. 8 . The polymerizable composition of claim 1 , wherein the polymerizable component comprises at least one vinyl monomer or (meth)acrylate monomer or oligomer. 9 . The polymerizable composition of claim 1 , wherein R 1 of Formula I is of Formula II. 10 . The polymerizable composition of claim 1 , wherein R 1 of Formula I is of Formula III. 11 . The polymerizable composition of claim 1 , wherein R 1 of Formula I is of Formula IV. 12 . The polymerizable composition of claim 1 , wherein R 1 of Formula I is of Formula V. 13 . The polymerizable composition of claim 1 , wherein the oxidizing agent comprises at least one of an organic peroxide, an organic hydroperoxide, or an inorganic peroxide. 14 . The polymerizable composition of claim 1 , further comprising a quaternary ammonium halide or a tertiary ammonium halide. 15 . A photolabile reducing agent of the Formula I: wherein R 1 is of Formula II, Formula III, Formula IV, or Formula V; wherein Y is H or methyl; and wherein each of R 2 , R 3 , R 4 , R 5 , R 6 , R 7 , R 8 , R 9 , and R 10 is independently H, an alkyl, an alkoxy, or an aryl; wherein: R 12 is a covalent bond to Formula I at the R 1 position; R 11 is H, an alkyl, an aryl, or a covalent bond to a second group of Formula I at the R 1 position; each of R 13 and R 14 independently, in combination with the attached O, comprises an alcohol, an alkoxy, an aryloxy, an ester, an ether, a urethane, or a carbonate functional group, or taken together form a 5- or 6-membered ring; each of R 15 and R 16 is independently an optionally substituted 1-18C hydrocarbyl; R 17 is H or an optionally substituted 1-18C hydrocarbyl, wherein R 15 +R 16 , or R 15 +R 17 , or R 16 +R 17 are optionally taken together to form a 5- or 6-membered ring; R 18 is a covalent bond to Formula I at the R 1 position; each of R 19 , R 20 , and R 21 is H or an optionally substituted 1-18C hydrocarbyl; each of X 1 and X 2 is independently a covalent bond, O, S, —N(R 22 )—, —[C(R 22 ) 2 ] y=1,2,3 -, —CO— or —CO—O—; wherein R 22 is H or a 1-18C alkyl. 16 . The photolabile reducing agent of claim 15 , wherein each of R 2 , R 3 , R 4 , R 5 , R 6 , R 7 , R 8 , R 9 , and R 10 is H. 17 . The photolabile reducing agent of claim 15 , wherein R 1 of Formula I is of Formula II. 18 . The photolabile reducing agent of claim 15 , wherein R 1 of Formula I is of Formula III. 19 . The photolabile reducing agent of claim 15 , wherein R 1 of Formula I is of Formula IV. 20 . The photolabile reducing agent of claim 15 , wherein R 1 of Formula I is of Formula V.
directly linked by a ring-member-to-ring-member bond · CPC title
Three oxygen atoms, e.g. ascorbic acid · CPC title
Barbituric acids · CPC title
containing ether groups, [IMAGE cpc-sch-C07C-0958.gif] groups,[IMAGE cpc-sch-C07C-0959.gif] groups, or[IMAGE cpc-sch-C07C-0960.gif] groups · CPC title
the ring being unsaturated · CPC title
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