Monitoring electrolytes during electroplating
US-2016298256-A1 · Oct 13, 2016 · US
US2025027899A1 · US · A1
| Field | Value |
|---|---|
| Publication number | US-2025027899-A1 |
| Application number | US-202418778522-A |
| Country | US |
| Kind code | A1 |
| Filing date | Jul 19, 2024 |
| Priority date | Jul 21, 2023 |
| Publication date | Jan 23, 2025 |
| Grant date | — |
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A reference electrode assembly for electrochemistry microscopy samples includes a Micro-Electro-Mechanical Systems (MEMS) chip having a thin-film wire disposed on a surface thereof, a bridge electrode electrically connected to the thin-film wire through a Transmission Electron Microscope (TEM) holder, a portion of the bridge electrode disposed in contact with a sample solution contained within a vial and a standard reference electrode disposed within the vial and in contact with the sample solution, wherein the standard reference electrode electrically connects to a potentiostat maintaining the charge balance with a sample solution. The MEMS chip may be disposed within a holder tip connected with the TEM holder at an end thereof. A portion of the reference electrode assembly may be disposed within a Faraday cage to minimize the effect of noise on the reference potential.
Opening claim text (preview).
What is claimed is: 1 . A reference electrode assembly for electrochemistry microscopy samples, the reference electrode assembly comprising: at least one Micro-Electro-Mechanical Systems (MEMS) chip having a thin-film wire disposed on a surface thereof configured to act as a reference electrode; a bridge electrode comprising a metal wire, the bridge electrode electrically connected to the thin-film wire through a Transmission Electron Microscope (TEM) holder, wherein at least a portion of the bridge electrode is disposed in contact with a sample solution contained within a container; and a standard reference electrode having at least a portion thereof disposed within the container and in contact with the sample solution, wherein the standard reference electrode is electrically connected to a potentiostat. 2 . The reference electrode assembly of claim 1 , wherein the at least one MEMS chip is disposed within a holder tip connected with the TEM holder. 3 . The reference electrode assembly of claim 1 , wherein the thin-film wire disposed on the surface of the MEMS chip comprises platinum. 4 . The reference electrode assembly of claim 1 , wherein the thin-film wire disposed on the surface of the MEMS chip comprises one of carbon and gold. 5 . The reference electrode assembly of claim 1 , wherein the metal wire of the bridge electrode comprises platinum. 6 . The reference electrode assembly of claim 1 , wherein the metal wire of the bridge electrode comprises one of carbon and gold. 7 . The reference electrode assembly of claim 1 , wherein the at least one MEMS chip further comprises additional thin film metal elements configured to be each of a working electrode and a counter electrode. 8 . The reference electrode assembly of claim 7 , wherein the working electrode and counter electrode are electrically connected to the potentiostat. 9 . The reference electrode assembly of claim 1 , wherein the standard reference electrode comprises a silver-silver chloride (Ag/AgCl) electrode. 10 . The reference electrode assembly of claim 1 , wherein the standard reference electrode comprises a saturated calomel electrode. 11 . The reference electrode assembly of claim 1 , wherein the standard reference electrode comprises a copper-copper (II) sulfate electrode. 12 . The reference electrode assembly of claim 1 , wherein the portion of the bridge electrode and the standard reference electrode disposed within the container are sealed therein. 13 . The reference electrode assembly of claim 1 , further comprising a Faraday cage, wherein at least a portion of the bridge electrode, the standard reference electrode, and the container are disposed within the Faraday cage, configured to minimize noise effects on a reference potential. 14 . The reference electrode assembly of claim 13 , wherein the Faraday cage is affixed to a handle portion of the TEM holder. 15 . The reference electrode assembly of claim 14 , wherein the Faraday cage is removably affixed to a handle portion of the TEM holder. 16 . The reference electrode assembly of claim 13 , wherein Faraday cage is disposed within a handle portion of the TEM holder. 17 . The reference electrode assembly of claim 1 , wherein the container is disposed within a handle portion of the TEM holder. 18 . The reference electrode assembly of claim 1 , wherein the container is removably affixed to a handle portion of the TEM holder.
Reference electrodes · CPC title
Interconnects · CPC title
Sensors not provided for in B81B2201/0207 - B81B2201/0285 · CPC title
Electrodes · CPC title
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