Holding device, method of determining attraction abnormality in holding device, lithography apparatus, and method of manufacturing article
US-2024393682-A1 · Nov 28, 2024 · US
US2024402595A1 · US · A1
| Field | Value |
|---|---|
| Publication number | US-2024402595-A1 |
| Application number | US-202418800476-A |
| Country | US |
| Kind code | A1 |
| Filing date | Aug 12, 2024 |
| Priority date | Jan 28, 2021 |
| Publication date | Dec 5, 2024 |
| Grant date | — |
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A photocurable composition can comprise a polymerizable material, an organic ionic compound and a photoinitiator, wherein an amount of the organic ionic compound may be not greater than 1.5 wt %, the organic ionic compound comprises an organic cation, and a conductivity of the photocurable composition can be at least 20 μS/cm. The photocurable composition can have an improved drop spreading and merging of drops in comparison to the same composition but not including the organic ionic compound.
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What is claimed is: 1 . A photocurable composition comprising a polymerizable material, an organic ionic compound and a photoinitiator, wherein an amount of the organic ionic compound is at least 0.05 wt % and not greater than 1.5 wt %; the organic ionic compound comprises an organic cation, the organic cation comprising an imidazole ring, or a functional group which can participate in a polymerization reaction of the polymerizable material, or a combination thereof; an amount of the polymerizable material is at least 80 wt % based on the total weight of the photocurable composition; a conductivity of the photocurable composition is at least 20 μS/cm; and a viscosity of the photocurable composition is not greater than 25 mPa s. 2 . The photocurable composition of claim 1 , wherein the amount of the organic ionic compound is at least 0.05 wt % and not greater than 1.2 wt %. 3 . The photocurable composition of claim 1 , wherein the functional group of the organic cation is a vinyl group. 4 . The photocurable composition of claim 1 , wherein the organic cation comprises not more than 20 carbon atoms. 5 . The photocurable composition of claim 4 , wherein the organic cation comprises not more than 10 carbon atoms. 6 . The photocurable composition of claim 4 , wherein the organic ionic compound includes diphenyliodonium hexafluorophosphate, 1-ethyl-3-methylimidazolium dicyanamide, 1-allyl-3-methylimidazolium dicyanamide, or any combination thereof. 7 . The photocurable composition of claim 1 , wherein the conductivity of the photocurable composition is at least 50 μS/cm. 8 . The photocurable composition of claim 1 , wherein the amount of the polymerizable material is at least 90 wt % based on the total weight of the photocurable composition. 9 . The photocurable composition of claim 1 , wherein the photocurable composition is free of a solvent. 10 . The photocurable composition of claim 1 , wherein the organic ionic compound is dissolved in the polymerizable material. 11 . The photocurable composition of claim 1 , wherein the polymerizable material comprises at least one mono-functional acrylate monomer and at least one multi-functional acrylate monomer. 12 . The photocurable composition of claim 1 , wherein the photocurable composition is adapted for inkjet adaptive planarization (IAP) or nanoimprint lithography (NIL) processing. 13 . The photocurable composition of claim 1 , wherein the photocurable composition is adapted that a storage modulus after UV curing the photocurable composition is maintained in comparison to a storage modulus obtained after UV curing of a same photocurable composition but not including the organic ionic compound, wherein a variation of the storage modulus is not greater than 1.6 percent. 14 . The photocurable composition of claim 1 , wherein the photocurable composition is adapted that a glass transition temperature after UV curing of the photocurable composition is increased in comparison to a glass transition temperature after UV curing of a same photocurable composition but not including the organic ionic compound.
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