Method and apparatus for substrate cleaning in stack-die hybrid bonding process

Patent metadata

Field	Value
Publication number	US-2024390950-A1
Application number	US-202318200539-A
Country	US
Kind code	A1
Filing date	May 22, 2023
Priority date	May 22, 2023
Publication date	Nov 28, 2024
Grant date	—

Abstract

A brush box cleaning module is introduced as part of the pre-treatment process flow in an integrated hybrid bonding platform. It addresses the technical problem of achieving high cleanliness levels on die front-side and back-side surfaces, particularly by removing residues and particles induced by backgrinding tape and dicing tape. The brush box cleaning module efficiently removes stubborn residues and particles both chemically and mechanically, resulting in a clean and passivated surface without causing watermarks, scratches, corrosion, or surface roughness. This disclosed approach enhances the bonding yield and provides significant advantages over existing methods in die-stack hybrid bonding applications.

First claim

What is claimed is:

1 . A hybrid bonding platform comprising:
a substrate handling system configured to transport a substrate through the platform; a brush box cleaning module coupled to the platform and configured to clean a surface of the substrate by removing residues and particles; a bonding module coupled to the platform and configured to bond dies to the surface of the substrate; and a controller configured to control the substrate handling system, the brush box cleaning module, and the bonding module.

2 . The hybrid bonding platform of claim 1 , wherein the substrate handling system is further configured to transport the substrate between different process modules.

3 . The hybrid bonding platform of claim 1 , wherein the brush box cleaning module is configured to remove residues and particles induced by backgrinding tape or dicing tape.

4 . The hybrid bonding platform of claim 1 , wherein the brush box cleaning module comprises a plurality of brushes configured to chemically and mechanically remove stubborn residues and particles from the substrate surface.

5 . The hybrid bonding platform of claim 1 , wherein the bonding module is configured to perform a hybrid bonding process on the cleaned surface of the substrate.

6 . The hybrid bonding platform of claim 1 , further comprising a system controller for managing and controlling the operation of each process module.

7 . A brush box assembly for cleaning a substrate in a hybrid bonding platform, the brush box assembly comprising:
a housing configured to enclose the substrate; a plurality of brushes configured to gently scrub a wafer surface; a plurality of rollers configured to support and rotate the wafer during the cleaning process; a cleaning agent delivery system configured to apply a cleaning agent to the wafer surface during the scrubbing process.

8 . The brush box assembly of claim 6 , further comprising a controller configured to control the operation of the brushes, rollers, and cleaning agent delivery system.

9 . The brush box assembly of claim 6 , wherein the plurality of brushes are configured to chemically and mechanically remove stubborn residues and particles induced by backgrinding tape or dicing tape from the substrate surface.

10 . The brush box assembly of claim 6 , wherein the cleaning agent delivery system is configured to deliver the cleaning agent to the plurality of brushes to facilitate removal of residues and particles from the substrate surface.

11 . The brush box assembly of claim 6 , wherein the cleaning agent delivery system comprises a cryogenic aerosol jet configured to dispense a cryogenic cleaning agent onto the substrate surface during the scrubbing process.

12 . A process of manufacturing a stacked semiconductor structure, the process comprising:
providing a substrate comprising a plurality of dies; cleaning a surface of the substrate using a brush box cleaning module to remove residues and particles; and bonding the dies of the substrate using a hybrid bonding process.

13 . The process of claim 11 , wherein cleaning the surface of the substrate comprises removing residues and particles induced by backgrinding tape or dicing tape.

14 . The process of claim 11 , wherein cleaning the surface of the substrate comprises chemically and mechanically removing stubborn residues and particles using a plurality of brushes.

15 . The process of claim 11 , wherein the cleaning step with at least one wet clean module is optional and can be performed before and/or after the brush box cleaning module step.

16 . The process of claim 11 , wherein the at least one degas module heats the wafer surface to evaporate water moisture and reduce plastic outgassing from the tape frame.

17 . The process of claim 11 , wherein the at least one plasma module uses ion bombardment to activate the wafer surface, making it hydrophilic for bonding.

18 . The process of claim 11 , wherein the at least one bonder module accurately aligns and bonds dies to substrates, creating a stacked semiconductor structure.

19 . The process of claim 11 , wherein the stacked semiconductor structure has enhanced bonding yield due to the removal of residues and particles by the brush box cleaning module.

Assignees

• Applied Materials Inc

Inventors

• Zheng Ke
• See Guan Huei
• Wang Ying W
• Wang Ruiping
• Lianto Prayudi

Classifications

• B08B3/022

  Cleaning travelling work (B08B3/042 takes precedence) · CPC title

• B08B1/20

  Cleaning of moving articles, e.g. of moving webs or of objects on a conveyor · CPC title

• B08B1/12 Primary

  Brushes · CPC title

• B08B1/34

  rotating about an axis parallel to the surface · CPC title