Hafnium compound-containing sol-gel solution, method for producing hafnium compound-containing sol-gel solution, and method for producing hafnia-containing film

Patent metadata

Field	Value
Publication number	US-2024246054-A1
Application number	US-202218570093-A
Country	US
Kind code	A1
Filing date	Aug 30, 2022
Priority date	Sep 9, 2021
Publication date	Jul 25, 2024
Grant date	—

Abstract

A hafnium compound-containing sol-gel solution contains a lower alcohol having 5 or less carbon atoms that serves as a solvent, a hafnium compound that serves as a hafnium source, and a polyalcohol having either or both of an ether group and a N atom in a molecule, as a wettability improver. The hafnium compound-containing sol-gel solution preferably further contains a stabilizer. It is preferable that the content of the hafnium compound is regulated within a range of 0.05 mass % or more and 10 mass % or less, and the content of the polyalcohol is regulated within a range of 0.05 mass % or more and 20 mass % or less.

First claim

1 . A hafnium compound-containing sol-gel solution comprising:
a lower alcohol having 5 or less carbon atoms that serves as a solvent; a hafnium compound that serves as a hafnium source; and a polyalcohol having either or both of an ether group and a N atom in a molecule, as a wettability improver.

2 . The hafnium compound-containing sol-gel solution according to claim 1 , further comprising a stabilizer.

3 . The hafnium compound-containing sol-gel solution according to claim 1 ,
wherein a content of the hafnium compound is regulated within a range of 0.05 mass % or more and 10 mass % or less, and a content of the polyalcohol is regulated within a range of 0.05 mass % or more and 20 mass % or less.

4 . A method for producing a hafnium compound-containing sol-gel solution, for producing the hafnium compound-containing sol-gel solution according to claim 1 , the method comprising:
a hafnium compound adding step of adding the hafnium compound to the lower alcohol having 5 or less carbon atoms that serves as a solvent; a refluxing step of refluxing the solvent to which the hafnium compound is added; and a polyalcohol adding step of, after cooling the solvent to room temperature, adding and mixing the polyalcohol to and with the solvent.

5 . A method for producing a hafnia-containing film, for forming a hafnia-containing film on a surface of a substrate, the method comprising:
a hafnium compound-containing sol-gel solution coating step of applying the hafnium compound-containing sol-gel solution according to claim 1 onto the surface of the substrate; a drying step of drying the applied hafnium compound-containing sol-gel solution to form a hafnium compound-containing gel film; and a firing step of firing the hafnium compound-containing gel film to form a hafnia-containing film.

Assignees

• Mitsubishi Materials Corp

Inventors

• Tsujiuchi Naoto
• Tatsumi Koji

Classifications

• C23C18/1295

  with after-treatment of the deposited inorganic material · CPC title

• C23C18/1254

  Sol or sol-gel processing · CPC title

• C23C18/1216

  Metal oxides (C23C18/1212 takes precedence) · CPC title

• B01J13/0026

  containing a liquid organic phase · CPC title

• B01J13/0047 Primary

  containing a metal oxide · CPC title