Hard coating, hard-coated tool, and their production methods
US-2019177839-A1 · Jun 13, 2019 · US
US2024198430A1 · US · A1
| Field | Value |
|---|---|
| Publication number | US-2024198430-A1 |
| Application number | US-202218279393-A |
| Country | US |
| Kind code | A1 |
| Filing date | Mar 4, 2022 |
| Priority date | Apr 30, 2021 |
| Publication date | Jun 20, 2024 |
| Grant date | — |
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A cutting tool comprising a base material and a coating, wherein the coating comprises a hard particle layer, the hard particle comprises a multilayer structure in which a first unit layer formed from a first compound and a second unit layer from a second compound are alternately stacked, each of the first compound and the second compound consists of one or more metal elements selected from the group consisting of a periodic table group 4 element, a periodic table group 5 element, and a periodic table group 6 element, silicon, and one or more elements selected from the group consisting of carbon, nitrogen, boron, and oxygen, and a percentage of the number of atoms of the silicon to a sum of the numbers of atoms of the metal element and the silicon in the first unit layer is different from that in the second unit layer.
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1 . A cutting tool comprising a base material and a coating disposed on the base material, wherein the coating comprises a hard particle layer formed from a hard particle, the hard particle comprises a multilayer structure in which a first unit layer and a second unit layer are alternately stacked, the first unit layer is formed from a first compound having a cubic crystal structure, the second unit layer is formed from a second compound having a cubic crystal structure, each of the first compound and the second compound consists of one or more metal elements selected from the group consisting of a periodic table group 4 element, a periodic table group 5 element, and a periodic table group 6 element, silicon, and one or more elements selected from the group consisting of carbon, nitrogen, boron, and oxygen, and a percentage of the number of atoms of the silicon to a sum of the numbers of atoms of the metal element and the silicon in the first unit layer is different from a percentage of the number of atoms of the silicon to a sum of the numbers of atoms of the metal element and the silicon in the second unit layer. 2 . The cutting tool according to claim 1 , wherein the first unit layer and the second unit layer have the same crystal orientation. 3 . The cutting tool according to claim 1 , wherein in each of the first unit layer and the second unit layer, the percentage of the number of atoms of the silicon to the sum of the numbers of atoms of the metal element and the silicon is 0.5% or more and 10% or less. 4 . The cutting tool according to claim 1 , wherein a thickness of the hard particle layer is 3 μm or more and 15 μm or less, and a thickness of the coating is 3 μm or more and 30 μm or less. 5 - 10 . (canceled) 11 . The cutting tool according to claim 1 , wherein a thickness of the hard particle layer is 5 m or more and 10 μm or less, and a thickness of the coating is 10 m or more and 20 μm or less. 12 . The cutting tool according to claim 1 , wherein a difference between the percentage of the number of atoms of the silicon, A Si , to the sum of the number of atoms of the metal element, A M , and the number of atoms of the silicon, A Si , {A Si /(A Si +A M )}×100, in the first unit layer and the percentage of the number of atoms of the silicon, A Si , to the sum of the number of atoms of the metal element, A M , and the number of atoms of the silicon, A Si , {A Si /(A Si +A M )}×100, in the second unit layer is 0.5% or more and 10% or less. 13 . The cutting tool according to claim 1 , wherein in the first unit layer, the percentage of the number of atoms of silicon, A Si , to the sum of the number of atoms of the metal element, A M , and the number of atoms of silicon, A Si , {A Si /(A Si +A M )}×100, is 6.0% or more and 10% or less. 14 . The cutting tool according to claim 1 , wherein in the second unit layer, the percentage of the number of atoms of silicon, A Si , to the sum of the number of atoms of the metal element, A M , and the number of atoms of silicon, A Si , {A Si /(A Si +A M )}×100, is 0.5% or more and 1.0% or less. 15 . The cutting tool according to claim 1 , wherein the coating comprises a base layer disposed between the base material and the hard particle layer, the base layer is formed from a third compound, and the third compound consists of one or more elements selected from the group consisting of a periodic table group 4 element, a periodic table group 5 element, a periodic table group 6 element, and aluminum, and one or more elements selected from the group consisting of carbon, nitrogen, boron, and oxygen. 16 . The cutting tool according to claim 1 , wherein the coating comprises a base layer disposed directly on the base material, and the base layer consists of at least one selected from the group consisting of a TiN layer, a TiC layer, a TiCN layer, a TiBN layer, and an Al 2 O 3 layer. 17 . The cutting tool according to claim 1 , wherein the coating comprises a surface layer disposed on a topmost surface thereof, the surface layer is formed from a fourth compound, and the fourth compound consists of one or more elements selected from the group consisting of a periodic table group 4 element, a periodic table group 5 element, a periodic table group 6 element, and aluminum, and one or more elements selected from the group consisting of carbon, nitrogen, boron, and oxygen. 18 . The cutting tool according to claim 17 , wherein the surface layer include a TiN layer. 19 . The cutting tool according to claim 15 , wherein the coating comprises an intermediate layer disposed between the base layer and the hard particle layer. 20 . The cutting tool according to claim 1 , wherein an average of a period width of the multilayer structure is 2 nm or more and 20 nm or less. 21 . A method for manufacturing the cutting tool according to claim 1 , the method comprising a first step of preparing a base material, and a second step of forming a coating on the base material to obtain a cutting tool, wherein the second step comprises a 2a-th step of forming a hard particle layer formed from a hard particle by a CVD method, the 2a-th step comprises a 2a-1-th step of ejecting a first raw material gas, a second raw material gas, and a third raw material gas toward a surface of the base material, the first raw material gas comprises one or more elements selected from the group consisting of a periodic table group 4 element, a periodic table group 5 element, and a periodic table group 6 element, the second raw material gas is SiCl 4 , the third raw material gas comprises one or more elements selected from the group consisting of carbon, nitrogen, boron, and oxygen, the first raw material gas is ejected from a plurality of first jet holes provided in a nozzle, the second raw material gas is ejected from a plurality of second jet holes provided in the nozzle, the third raw material gas is ejected from a plurality of third jet holes provided in the nozzle, in the 2a-1-th step, the nozzle rotates, the plurality of second jet holes comprise a 2-1-th jet hole and a 2-2-th jet hole, and a diameter r1 of the 2-1-th jet hole is different from a diameter r2 of the 2-2-th jet hole.
on hard metal substrates · CPC title
characterized by the composition of the alternating layers · CPC title
Coatings including alternating layers following a pattern, a periodic or defined repetition · CPC title
coatings specially adapted for cutting tools or wear applications · CPC title
Carbonitrides · CPC title
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