Hard titanium aluminum nitride coating, hard-coated tool, and their production methods

Patent metadata

Field	Value
Publication number	US-2018305811-A1
Application number	US-201615770946-A
Country	US
Kind code	A1
Filing date	Nov 18, 2016
Priority date	Nov 25, 2015
Publication date	Oct 25, 2018
Grant date	—

Abstract

A titanium aluminum nitride coating having a columnar crystal structure, which is formed on a substrate, comprises high-Al TiAlN having an fcc structure, which has a composition represented by (Tix 1 , Aly 1 )N, wherein x 1 and y 1 are numbers meeting x 1 =0.005-0.1, and y 1 =0.995-0.9 by atomic ratio, and network-like, high-Ti TiAlN having an fcc structure, which has a composition represented by (Tix 2 , Aly 2 )N, wherein x 2 and y 2 are numbers meeting x 2 =0.5-0.9, and y 2 =0.5-0.1 by atomic ratio; the high-Al TiAlN being surrounded by the network-like, high-Ti TiAlN.

First claim

1 . A hard titanium aluminum nitride coating having a columnar crystal structure, and comprising high-Al TiAlN having an fcc structure, which has a composition represented by (Tix 1 , Aly 1 )N, wherein x 1 and y 1 are numbers meeting x 1 =0.005-0.1, and y 1 =0.995-0.9 by atomic ratio, and network-like, high-Ti TiAlN having an fcc structure, which has a composition represented by (Tix 2 , Aly 2 )N, wherein x 2 and y 2 are numbers meeting x 2 =0.5-0.9, and y 2 =0.5-0.1 by atomic ratio; said high-Al TiAlN being surrounded by said network-like, high-Ti TiAlN.

2 . The hard titanium aluminum nitride coating according to claim 1 , wherein said high-Al TiAlN has an average longitudinal cross section diameter of 2-50 nm and an average transverse cross section diameter of 10-300 nm.

3 . The hard titanium aluminum nitride coating according to claim 1 , wherein said columnar crystal has an average transverse cross section diameter of 0.1-1.2 μm.

4 . A hard-coated tool having a hard titanium aluminum nitride coating formed on a substrate, wherein said hard titanium aluminum nitride coating has a columnar crystal structure, and comprises high-Al TiAlN having an fcc structure, which has a composition represented by (Tix 1 , Aly 1 )N, wherein x 1 and y 1 are numbers meeting x 1 =0.005-0.1, and y 1 =0.995-0.9 by atomic ratio, and network-like, high-Ti TiAlN having an fcc structure, which has a composition represented by (Tix 2 , Aly 2 )N, wherein x 2 and y 2 are numbers meeting x 2 =0.5-0.9, and y 2 =0.5-0.1 by atomic ratio; said high-Al TiAlN being surrounded by said network-like, high-Ti TiAlN.

5 . The hard-coated tool according to claim 4 , wherein said high-Al TiAlN has an average longitudinal cross section diameter of 2-50 nm and an average transverse cross section diameter of 10-300 nm.

6 . The hard-coated tool according to claim 4 , wherein said columnar crystal has an average transverse cross section diameter of 0.1-1.2 μm.

7 . A method for producing a hard titanium aluminum nitride coating by chemical vapor deposition, comprising
(1) using a mixture gas A comprising a TiCl 4 gas, an AlCl 3 gas, an N 2 gas, and an H 2 gas, and a mixture gas B comprising an NH 3 gas, an N 2 gas, and an H 2 gas as starting material gases; (2) rotating first and second nozzles arranged with different distances from a rotation axis; and (3) ejecting said mixture gas A and said mixture gas B separately from said first and second nozzles.

8 . The method for producing a hard titanium aluminum nitride coating according to claim 7 , wherein with the total amount of said mixture gases A and B as 100% by volume, the composition of said mixture gas A comprises 0.02-0.31% by volume of a TiCl 4 gas, 0.15-0.8% by volume of an AlCl 3 gas, and 3-40% by volume of an N 2 gas, the balance being an H 2 gas, and the composition of said mixture gas B comprises 0.4-1.9% by volume of an NH 3 gas, and 2-26% by volume of an N 2 gas, the balance being an H 2 gas; a volume ratio H 2 (A)/H 2 (B) of the H 2 gas in said mixture gas A to the H 2 gas in said mixture gas B being 1-5.

9 . The method for producing a hard titanium aluminum nitride coating according to claim 7 , wherein the distance H 1 from an opening of said first nozzle to said rotation axis is longer than the distance H 2 from an opening of said second nozzle to said rotation axis; and wherein said mixture gas A is ejected from said first nozzle, and said mixture gas B is ejected from said second nozzle.

10 . The method for producing a hard titanium aluminum nitride coating according to claim 7 , wherein the distance H 1 from an opening of said first nozzle to said rotation axis is longer than the distance H 2 from an opening of said second nozzle to said rotation axis; and wherein said mixture gas B is ejected from said first nozzle, and said mixture gas A is ejected from said second nozzle.

11 . The method for producing a hard titanium aluminum nitride coating according to claim 9 , wherein a ratio H 1 /H 2 of the distance H 1 from an opening of said first nozzle to said rotation axis to the distance H 2 from an opening of said second nozzle to said rotation axis is in a range of 1.5-3.

12 . The method for producing a hard titanium aluminum nitride coating according to claim 7 , wherein the reaction pressure is 3-6 kPa, and the reaction temperature is 750-830° C.

13 . A method for producing a hard-coated tool having a hard titanium aluminum nitride coating by chemical vapor deposition, comprising
(1) using a mixture gas A comprising a TiCl 4 gas, an AlCl 3 gas, an N 2 gas, and an H 2 gas, and a mixture gas B comprising an NH 3 gas, an N 2 gas, and an H 2 gas as starting material gases; (2) rotating first and second nozzles arranged with different distances from said rotation axis; (3) disposing a tool substrate around said first and second nozzles; and (4) ejecting said mixture gas A and said mixture gas B separately from said first and second nozzles.

14 . The method for producing a hard-coated tool according to claim 13 , wherein with the total amount of said mixture gases A and B as 100% by volume, the composition of said mixture gas A comprises 0.02-0.31% by volume of a TiCl 4 gas, 0.15-0.8% by volume of an AlCl 3 gas, and 3-40% by volume of an N 2 gas, the balance being an H 2 gas, and the composition of said mixture gas B comprises 0.4-1.9% by volume of an NH 3 gas, and 2-26% by volume of an N 2 gas, the balance being an H 2 gas; and wherein a volume ratio H 2 (A)/H 2 (B) of the H 2 gas in said mixture gas A to the H 2 gas in said mixture gas B is 1-5.

15 . The method for producing a hard-coated tool according to claim 13 , wherein the distance H 1 from an opening of said first nozzle to said rotation axis is longer than the distance H 2 from an opening of said second nozzle to said rotation axis; and wherein said mixture gas A is ejected from said first nozzle, and said mixture gas B is ejected from said second nozzle.

16 . The method for producing a hard-coated tool according to claim 13 , wherein the distance H 1 from an opening of said first nozzle to said rotation axis is longer than the distance H 2 from an opening of said second nozzle to said rotation axis; and wherein said mixture gas B is ejected from said first nozzle, and said mixture gas A is ejected from said second nozzle.

17 . The method for producing a hard-coated tool according to claim 15 , wherein a ratio H 1 /H 2 of the distance H 1 from an opening of said first nozzle to said rotation axis to the distance H 2 from an opening of said second nozzle to said rotation axis is in a range of 1.5-3.

18 . The method for producing a hard-coated tool according to claim 13 , wherein the reaction pressure is 3-6 kPa, and the reaction temperature is 750-830° C.

Assignees

• Mitsubishi Hitachi Tool Eng Ltd

Inventors

• Fukunaga Yuuzoh
• Imai Masayuki

Classifications

• B23B2228/10

  Coatings · CPC title

• B23B27/148

  Composition of the cutting inserts · CPC title

• C23C16/45514

  Mixing in close vicinity to the substrate · CPC title

• C23C16/34 Primary

  Nitrides {(C23C16/303 takes precedence)} · CPC title

• C23C16/45574

  Nozzles for more than one gas · CPC title