Inspection method for display device

Patent metadata

Field	Value
Publication number	US-2024142391-A1
Application number	US-202318235406-A
Country	US
Kind code	A1
Filing date	Aug 18, 2023
Priority date	Nov 1, 2022
Publication date	May 2, 2024
Grant date	—

Abstract

An inspection method for a display device includes radiating a first light including a light of a radiation wavelength range to a first dam region located in a non-display region of the display device located outside a display region of the display device, receiving a second light reflected from the first dam region, and analyzing the radiation wavelength range of the second light to inspect an organic encapsulation layer remaining in the first dam region after etching the organic encapsulation layer.

First claim

What is claimed is:

1 . An inspection method for a display device, the inspection method comprising:
radiating a first light including a light of a radiation wavelength range to a first dam region located in a non-display region of the display device located outside a display region of the display device; receiving a second light reflected from the first dam region; and analyzing the radiation wavelength range of the second light to inspect an organic encapsulation layer remaining in the first dam region after etching the organic encapsulation layer.

2 . The inspection method of claim 1 , wherein the radiation wavelength range is about 290 nm or greater.

3 . The inspection method of claim 1 , wherein the radiation wavelength range is about 410 nm or less.

4 . The inspection method of claim 1 , wherein the first light is radiated at an inclination angle of about 150 or less.

5 . The inspection method of claim 1 , wherein the first light is radiated at an inclination angle of about 10° or greater.

6 . The inspection method of claim 1 , wherein the first light is radiated after the organic encapsulation layer is etched,
wherein the organic encapsulation layer is etched after being formed on a first inorganic encapsulation layer, wherein the first inorganic encapsulation layer is formed on a first dam and a light emitting element, wherein the first dam is spaced from an organic insulating layer and is formed in the first dam region, and wherein the light emitting element is formed on the organic insulating layer.

7 . The inspection method of claim 1 , wherein the first light is radiated after a second inorganic encapsulation layer is formed,
wherein the organic encapsulation layer is etched after being formed on a first inorganic encapsulation layer, wherein the second inorganic encapsulation layer is formed on the first inorganic encapsulation layer in the first dam region, wherein the first inorganic encapsulation layer is formed on a first dam and a light emitting element, wherein the first dam is spaced from an organic insulating layer and is formed in the first dam region, and wherein the light emitting element is formed on the organic insulating layer.

8 . The inspection method of claim 1 , wherein the first light is a polarized light.

9 . The inspection method of claim 1 , further comprising:
radiating the first light to a second dam region spaced from the first dam region; receiving a third light reflected from the second dam region; and analyzing the radiation wavelength range of the third light to inspect the organic encapsulation layer remaining in the second dam region after etching the organic encapsulation layer.

10 . The inspection method of claim 9 , wherein the first light is radiated after the organic encapsulation layer is etched,
wherein the organic encapsulation layer is etched after being formed on a first inorganic encapsulation layer, wherein the first inorganic encapsulation layer is formed on a first dam, a second dam spaced from the first dam, and a light emitting element, wherein the first dam is spaced from an organic insulating layer and is formed in the first dam region, and wherein the light emitting element is formed on the organic insulating layer.

11 . The inspection method of claim 9 , wherein the first light is radiated after a second inorganic encapsulation layer is formed on the organic encapsulation layer,
wherein the organic encapsulation layer is etched after being formed on a first inorganic encapsulation layer, wherein the second inorganic encapsulation layer is formed on the first inorganic encapsulation layer in the first dam region and the second dam region, wherein the first inorganic encapsulation layer is formed on a first dam, a second dam spaced from the first dam, and a light emitting element, wherein the first dam is spaced from an organic insulating layer and is formed in the first dam region, and wherein the light emitting element is formed on the organic insulating layer.

12 . An inspection method for a display device, the inspection method comprising:
radiating a first light including a light of an radiation wavelength range to a first dam region located in a camera region of the display device located inside a display region of the display device; receiving a second light reflected from the first dam region; and analyzing the radiation wavelength range of the second light to inspect an organic encapsulation layer remaining in the first dam region after etching the organic encapsulation layer.

13 . The inspection method of claim 12 , wherein the radiation wavelength range is about 290 nm or greater.

14 . The inspection method of claim 12 , wherein the radiation wavelength range is about 410 nm or less.

15 . The inspection method of claim 12 , wherein the first light is radiated at an inclination angle of about 150 or less.

16 . The inspection method of claim 12 , wherein the first light is radiated at an inclination angle of about 10° or greater.

17 . The inspection method of claim 12 , wherein the first light is radiated after the organic encapsulation layer is etched,
wherein the organic encapsulation layer is etched after being formed on a first inorganic encapsulation layer, wherein the first inorganic encapsulation layer is formed on a first dam and a light emitting element, wherein the first dam is spaced from an organic insulating layer and is formed in the first dam region, and wherein the light emitting element is formed on the organic insulating layer.

18 . The inspection method of claim 12 , wherein the first light is radiated after a second inorganic encapsulation layer is formed on the organic encapsulation layer,
wherein the organic encapsulation layer is etched after being formed on a first inorganic encapsulation layer, wherein the second inorganic encapsulation layer is formed on the first inorganic encapsulation layer in the first dam region, wherein the first inorganic encapsulation layer is formed on a first dam and a light emitting element, wherein the first dam is spaced from an organic insulating layer and is formed in the first dam region, and wherein the light emitting element is formed on the organic insulating layer.

19 . The inspection method of claim 12 , wherein the first light is a polarized light.

20 . The inspection method of claim 12 , further comprising:
radiating the first light to a second dam region spaced from the first dam region; receiving a third light reflected from the second dam region; and analyzing the radiation wavelength range of the third light to inspect the organic encapsulation layer remaining in the second dam region after etching the organic encapsulation layer.

Assignees

• Samsung Display Co Ltd

Inventors

• Kim Daehong
• Lee Jeongmoon

Classifications

• G01N2021/8848

  Polarisation of light · CPC title

• H10K71/70 Primary

  Testing, e.g. accelerated lifetime tests · CPC title

• H10K50/8445

  multilayered coatings having a repetitive structure, e.g. having multiple organic-inorganic bilayers · CPC title

• G01N21/958 Primary

  Inspecting transparent materials {or objects, e.g. windscreens (for conveyed flat sheet or rod G01N21/896)} · CPC title

• G01N21/33

  using ultraviolet light (G01N21/39 takes precedence) · CPC title