3d interposer with through glass vias - method of increasing adhesion between copper and glass surfaces and articles therefrom

Patent metadata

Field	Value
Publication number	US-2024140864-A1
Application number	US-202418409103-A
Country	US
Kind code	A1
Filing date	Jan 10, 2024
Priority date	Nov 13, 2018
Publication date	May 2, 2024
Grant date	—

Abstract

In some embodiments, a method comprises: depositing an adhesion layer comprising manganese oxide (MnO x ) onto a surface of a glass or glass ceramic substrate; depositing a first layer of conductive metal onto the adhesion layer; and annealing the adhesion layer in a reducing atmosphere. Optionally, the method further comprises pre-annealing the adhesion layer in an oxidizing atmosphere before annealing the adhesion layer in a reducing atmosphere.

First claim

What is claimed is:

1 . An article comprising:
a substrate comprised of glass or glass ceramic; an adhesion layer on the substrate, the adhesion layer comprising manganese oxide (MnO x ), and the manganese oxide directly contacting the glass or glass ceramic; and a copper layer deposited on the adhesion layer, wherein the adhesion layer comprises an oxidation gradient such that the adhesion layer has a relatively higher oxidation state adjacent to the substrate and a relatively lower oxidation state adjacent to the copper layer.

2 . The article of claim 1 , wherein the substrate is comprised of fused silica glass, aluminoborosilicate glass, or the glass ceramic, and the manganese oxide directly contacts the fused silica glass, the aluminoborosilicate glass, or the glass ceramic.

3 . The article of claim 1 , wherein substrate is comprised of fused silica glass or aluminoborosilicate glass, and the manganese oxide directly contacts the fused silica glass or the aluminoborosilicate glass.

4 . The article of claim 1 , wherein the adhesion layer consists essentially of the manganese oxide.

5 . The article of claim 1 , wherein the adhesion layer adjacent to the substrate with the relatively higher oxidation state comprises MnO 2 , and the adhesion layer adjacent to the copper layer with the relatively lower oxidation state comprises MnO.

6 . The article of claim 1 , wherein the substrate comprises a via hole formed through the substrate, and the adhesion layer is on an interior surface of the via hole.

7 . The article of claim 6 , wherein the via hole comprises a first opening on a first surface of the substrate and a second opening on a second surface of the substrate and a waist between the first opening and the second opening, the waist comprising a diameter that is at least 70% of a diameter of the first opening or the second opening.

8 . The article of claim 6 , wherein the via hole has an aspect ratio from about 1:1 to about 10:1.

9 . The article of claim 8 , wherein the aspect ratio of the via hole is from about 2:1 to about 9:1.

10 . The article of claim 1 , wherein the adhesion layer has a thickness of about 3 nm or more.

11 . The article of claim 10 , wherein the thickness of the adhesion layer is about 6 nm or more.

12 . The article of claim 11 , wherein the thickness of the adhesion layer is from about 6 nm to about 9 nm.

13 . The article of claim 1 , wherein the copper layer has a thickness from about 1 micron to about 100 microns.

14 . The article of claim 1 , wherein:
the substrate is comprised of fused silica glass or aluminoborosilicate glass, the manganese oxide directly contacting the fused silica glass or the aluminoborosilicate glass, the adhesion layer consists essentially of the manganese oxide, and the substrate comprises a via hole formed through the substrate, the adhesion layer being on an interior surface of the via hole.

15 . The article of claim 14 , wherein the adhesion layer adjacent to the substrate with the relatively higher oxidation state comprises MnO 2 , and the adhesion layer adjacent to the copper layer with the relatively lower oxidation state comprises MnO.

Assignees

• Corning Inc

Inventors

• Kim Hoon
• Mazumder Prantik
• Rezikyan Aram
• Vaddi Rajesh

Classifications

• C03C27/048 Primary

  consisting of an adhesive specially adapted for that purpose · CPC title

• C03C17/245

  by deposition from the vapour phase · CPC title

• C03C17/3607

  Coatings of the type glass/inorganic compound/metal · CPC title

• C23C18/1637

  metallic substrate · CPC title

• C23C18/1692 Primary

  Heat-treatment · CPC title