ARCHITECTURE FOR InGaAs/GaAsSb SUPERLATTICES ON AN InP SUBSTRATE

Patent metadata

Field	Value
Publication number	US-2024113241-A1
Application number	US-202118265654-A
Country	US
Kind code	A1
Filing date	Nov 26, 2021
Priority date	Dec 23, 2020
Publication date	Apr 4, 2024
Grant date	—

Abstract

A device for detecting infrared radiation includes at least one pixel comprising: a first superlattice composed of the repetition of an elementary group comprising: a first layer having a first bandgap and a first conduction-band minimum; at least a second layer having a second bandgap and a second conduction-band minimum strictly lower than the first conduction-band minimum; a third layer having a third bandgap narrower than the first and second bandgaps and a third conduction-band minimum strictly lower than the second conduction-band minimum. The elementary group is produced in a first stacking configuration in the following order: the second layer, the third layer, the second layer, then the first layer; or in a second stacking configuration such that the third layer is confined between the first and second layers.

First claim

1 . A device (D 1 ) for detecting infrared radiation comprising at least one pixel (Pxl), a pixel comprising a planar absorbing structure (SPA), said planar absorbing structure (SPA) comprising:
a first superlattice (SR 1 , SR 2 ) comprising a stack along a stacking direction (Z) of an elementary group (G 1 , G 2 ) of semiconductor layers, the semiconductor layers of said elementary group (G 1 , G 2 ) each being arranged in a crystalline lattice structure of unit cells, said elementary group comprising:
a first layer (C 1 ) made of a first semiconductor (SC 1 ) having a first bandgap (Eg 1 );
and a first conduction-band minimum (Ec 1 );

at least a second layer (C 2 ) made of a second semiconductor (SC 2 ) having a second bandgap (Eg 2 );
and a second conduction-band minimum (Ec 2 ) strictly lower than the first conduction-band minimum (Ec 1 );

a third layer (C 3 ) made of a third semiconductor (SC 3 ) having a third bandgap (Eg 3 ) narrower than the first and second bandgaps (Eg 1 , Eg 2 );
and a third conduction-band minimum (Ec 3 ) strictly lower than the second conduction-band minimum (Ec 2 );

the elementary group (G 1 , G 2 ) being produced in a first stacking configuration in the following order: the second layer (C 2 ), the third layer (C 3 ), the second layer (C 2 ), then the first layer (C 1 );
or in a second stacking configuration such that the third layer (C 3 ) is confined between the first and second layers (C 1 , C 2 ).

2 . The device (D 1 ) for detecting infrared radiation as claimed in claim 1 , such that the first semiconductor (SC 1 ) further has a first valence-band maximum (Ev 1 ) and the second semiconductor (SC 2 ) further has a second valence-band maximum (Ev 2 ) strictly lower than the first valence-band maximum (Ev 1 ).

3 . The device (D 1 ) for detecting infrared radiation as claimed in claim 1 , wherein the first superlattice (SR 1 , SR 2 ) is produced by epitaxy on a substrate (Sub) made of a fourth semiconductor (SC 4 ) arranged in a crystalline lattice structure of unit cells, said first superlattice (SR 1 , SR 2 ) being produced such that, for each semiconductor layer (C 1 , C 2 , C 3 ) of the first superlattice (SR 1 , SR 2 ), the lattice of a semiconductor layer (C 1 , C 2 , C 3 ) undergoes internal mechanical strains to match the lattice of the crystal structure of the substrate (SUB).

4 . The device (D 1 ) for detecting infrared radiation as claimed in claim 3 , wherein the first, second, third and fourth semiconductors (SC 1 , SC 2 , SC 3 , SC 4 ) are III-V semiconductors.

5 . The device (D 1 ) for detecting infrared radiation as claimed in claim 4 , wherein the fourth semiconductor (SC 4 ) is indium phosphide (InP).

6 . The device (D 1 ) for detecting infrared radiation as claimed in claim 4 , wherein the compositions of the materials used to produce the semiconductor layers of said elementary group are chosen such that the band diagram of the conduction and valence bands in the stacking direction (Z) of the first superlattice has an effective bandgap (Eg eff ), an effective valence-band maximum (Ev eff ) and an effective conduction-band minimum (Ec eff ),
said effective bandgap (Eg eff ) being between 400 meV and 750 meV.

7 . The device (D 1 ) for detecting infrared radiation as claimed in claim 6 , wherein the effective mass of positive charge carriers in the superlattice (SR 1 , SR 2 ) in the stacking direction (Z) is lower than three times the mass of a free electron.

8 . The device (D 1 ) for detecting infrared radiation as claimed in claim 4 , wherein the third semiconductor (SC 3 ) is the binary composite InAs.

9 . The device (D 1 ) for detecting infrared radiation as claimed in claim 4 , wherein the second semiconductor (SC 2 ) is the ternary alloy In x Ga 1-x As,
with x the mole fraction of indium in the alloy In x Ga 1-x As.

10 . The device (D 1 ) for detecting infrared radiation as claimed in claim 9 , wherein the mole fraction x of indium In in the second semiconductor (SC 2 ) is lower than 0.55.

11 . The device (D 1 ) for detecting infrared radiation as claimed in claim 4 , wherein the first semiconductor (SC 1 ) is the ternary alloy GaAs y Sb 1-y ,
with y the mole fraction of arsenic in the alloy GaAs y Sb 1-y .

12 . The device (D 1 ) for detecting infrared radiation as claimed in claim 11 , wherein the mole fraction y of arsenic As in the first semiconductor (SC 1 ) is lower than 0.55.

13 . The device (D 1 ) for detecting infrared radiation as claimed in claim 9 , wherein the ratio between, on the one hand, the sum of the thicknesses of the layers (C 1 , C 2 , C 3 ) of the elementary group (G 1 , G 2 ) weighted by the amplitude of the strains undergone by each layer (C 1 , C 2 , C 3 ), and on the other hand, the total thickness of the elementary group (G 1 , G 2 ), is lower than or equal to a predetermined value.

14 . The device (D 1 ) for detecting infrared radiation as claimed in claim 9 , wherein the strains undergone by the lattice of the In x Ga 1-x As layer are tensile strains, and the strains undergone by the lattice of the GaAs y Sb 1-y layer are compressive strains.

15 . The device (D 1 ) for detecting infrared radiation as claimed in claim 9 , an, wherein the amplitude of a strain undergone by the lattice of any one layer (C 1 , C 2 , C 3 ) of the elementary group (G 1 ) is lower than a limiting strain at which dislocation occurs.

16 . The device (D 1 ) for detecting infrared radiation as claimed in claim 9 , wherein the thickness of a layer (C 1 , C 2 , C 3 ) of the elementary group (G 1 ) is comprised between 0.3 nm and 10 nm.

17 . A detecting device (D 1 ) as claimed in claim 6 , wherein a pixel comprises, along the stacking direction (Z), in this order:
the substrate (SUB); a lower contact layer (CONT_INF) made of an n*-doped fifth semiconductor (SC 5 ) having:
a fifth valence-band maximum (Ev 5 ) strictly lower than the effective valence-band maximum (Ev eff ) of the first superlattice (SR 1 , SR 2 ); and a fifth bandgap (Eg 5 ) wider than or equal to the effective bandgap (Eg eff ) of the first superlattice (SR 1 , SR 2 );
the planar absorbing structure (SPA), in which the semiconductor layers (C 1 , C 2 , C 3 ) of the first superlattice (SR 1 , SR 2 ) are n-doped; an upper contact layer (CONT_SUP) made of a p + -doped sixth semiconductor (SC 6 ) having:
a sixth valence-band maximum (Ev 6 ) strictly lower than the effective valence-band maximum (Ev eff ) of the first superlattice (SR 1 , SR 2 ); and a sixth conduction-band minimum (Ec 5 ) strictly higher than the effective conduction-band minimum (Ec eff ) of the first superlattice (SR 1 , SR 2 ).

18 . The detecting device (D 1 ) as claimed in claim 6 , wherein a pixel comprises, along the stacking direction (Z), in this order:
the substrate (SUB); a lower contact (CONT_INF) produced using an n + -doped second superlattice (SR_inf) respectively having:
a second effective valence-band maximum (Ev eff_inf ) strictly lower than the effective valence-band maximum (Ev eff ) of the first superlattice (SR 1 , SR 2 );
a second effective bandgap (Eg eff_inf ) wider than or equal to the effective bandgap (Eg eff ) of the first superlattice (SR 1 , SR 2 );
the planar absorbing structure (SPA), in which the semiconductor layers (C 1 , C 2 , C 3 ) of the first superlattice (SR 1 , SR 2 ) are n-doped; an upper contact (CONT_SUP) produced using a third superlattice (SR_sup) respectively having:
a third effective valence-band maximum (Ev eff_sup ) strictly lower than the effective valence-band maximum (E

Assignees

• Lynred
• Commissariat Energie Atomique

Inventors

• Evirgen Axel
• Reverchon Jean-Luc

Classifications

• H10P14/3421

  Arsenides · CPC title

• H10P14/3422

  Antimonides · CPC title

• H10P14/3221

  Arsenides · CPC title

• H10P14/3252

  Alternating layers, e.g. superlattice · CPC title

• H10P14/3222

  Antimonides · CPC title